JP2567699Y2 - 電子探針微小部分析装置用試料台取付構造 - Google Patents

電子探針微小部分析装置用試料台取付構造

Info

Publication number
JP2567699Y2
JP2567699Y2 JP40607290U JP40607290U JP2567699Y2 JP 2567699 Y2 JP2567699 Y2 JP 2567699Y2 JP 40607290 U JP40607290 U JP 40607290U JP 40607290 U JP40607290 U JP 40607290U JP 2567699 Y2 JP2567699 Y2 JP 2567699Y2
Authority
JP
Japan
Prior art keywords
sample stage
sample
electron probe
stage
attachment structure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP40607290U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0494258U (OSRAM
Inventor
秀樹 森
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Stanley Electric Co Ltd
Original Assignee
Stanley Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Stanley Electric Co Ltd filed Critical Stanley Electric Co Ltd
Priority to JP40607290U priority Critical patent/JP2567699Y2/ja
Publication of JPH0494258U publication Critical patent/JPH0494258U/ja
Application granted granted Critical
Publication of JP2567699Y2 publication Critical patent/JP2567699Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP40607290U 1990-12-29 1990-12-29 電子探針微小部分析装置用試料台取付構造 Expired - Lifetime JP2567699Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP40607290U JP2567699Y2 (ja) 1990-12-29 1990-12-29 電子探針微小部分析装置用試料台取付構造

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP40607290U JP2567699Y2 (ja) 1990-12-29 1990-12-29 電子探針微小部分析装置用試料台取付構造

Publications (2)

Publication Number Publication Date
JPH0494258U JPH0494258U (OSRAM) 1992-08-17
JP2567699Y2 true JP2567699Y2 (ja) 1998-04-02

Family

ID=31883390

Family Applications (1)

Application Number Title Priority Date Filing Date
JP40607290U Expired - Lifetime JP2567699Y2 (ja) 1990-12-29 1990-12-29 電子探針微小部分析装置用試料台取付構造

Country Status (1)

Country Link
JP (1) JP2567699Y2 (OSRAM)

Also Published As

Publication number Publication date
JPH0494258U (OSRAM) 1992-08-17

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