JP2562958Y2 - 磁気浮上搬送装置の可動アーム装置 - Google Patents

磁気浮上搬送装置の可動アーム装置

Info

Publication number
JP2562958Y2
JP2562958Y2 JP1990083047U JP8304790U JP2562958Y2 JP 2562958 Y2 JP2562958 Y2 JP 2562958Y2 JP 1990083047 U JP1990083047 U JP 1990083047U JP 8304790 U JP8304790 U JP 8304790U JP 2562958 Y2 JP2562958 Y2 JP 2562958Y2
Authority
JP
Japan
Prior art keywords
movable arm
magnetic levitation
branch
transfer device
vibration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1990083047U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0440033U (cs
Inventor
一郎 盛山
忠 武松
収 藤木
隆 浅石
Original Assignee
日本真空技術株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本真空技術株式会社 filed Critical 日本真空技術株式会社
Priority to JP1990083047U priority Critical patent/JP2562958Y2/ja
Publication of JPH0440033U publication Critical patent/JPH0440033U/ja
Application granted granted Critical
Publication of JP2562958Y2 publication Critical patent/JP2562958Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Non-Mechanical Conveyors (AREA)
  • Control Of Vehicles With Linear Motors And Vehicles That Are Magnetically Levitated (AREA)
JP1990083047U 1990-08-04 1990-08-04 磁気浮上搬送装置の可動アーム装置 Expired - Lifetime JP2562958Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990083047U JP2562958Y2 (ja) 1990-08-04 1990-08-04 磁気浮上搬送装置の可動アーム装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990083047U JP2562958Y2 (ja) 1990-08-04 1990-08-04 磁気浮上搬送装置の可動アーム装置

Publications (2)

Publication Number Publication Date
JPH0440033U JPH0440033U (cs) 1992-04-06
JP2562958Y2 true JP2562958Y2 (ja) 1998-02-16

Family

ID=31630392

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990083047U Expired - Lifetime JP2562958Y2 (ja) 1990-08-04 1990-08-04 磁気浮上搬送装置の可動アーム装置

Country Status (1)

Country Link
JP (1) JP2562958Y2 (cs)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6045023A (ja) * 1983-08-23 1985-03-11 Shimada Phys & Chem Ind Co Ltd プラズマ処理装置
JP2552886B2 (ja) * 1987-10-29 1996-11-13 日本真空技術 株式会社 真空中に於ける磁気浮上式交差搬送装置

Also Published As

Publication number Publication date
JPH0440033U (cs) 1992-04-06

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