JP2562958Y2 - Movable arm device of magnetic levitation transfer device - Google Patents
Movable arm device of magnetic levitation transfer deviceInfo
- Publication number
- JP2562958Y2 JP2562958Y2 JP1990083047U JP8304790U JP2562958Y2 JP 2562958 Y2 JP2562958 Y2 JP 2562958Y2 JP 1990083047 U JP1990083047 U JP 1990083047U JP 8304790 U JP8304790 U JP 8304790U JP 2562958 Y2 JP2562958 Y2 JP 2562958Y2
- Authority
- JP
- Japan
- Prior art keywords
- movable arm
- magnetic levitation
- branch
- transfer device
- vibration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Description
【考案の詳細な説明】 （産業上の利用分野） 本考案は、真空室内に於いて成膜等の処理が施される
ワークを搬送する磁気浮上搬送装置に設けられる可動ア
ーム装置に関する。DETAILED DESCRIPTION OF THE INVENTION (Industrial application field) The present invention relates to a movable arm device provided in a magnetic levitation transfer device that transfers a workpiece on which a process such as film formation is performed in a vacuum chamber.
（従来の技術） 従来、例えば成膜処理するワークを真空室内に設けた
磁気固定子により磁気浮上して移動する磁気浮上体で搬
送することが行われている。こうした磁気浮上式の搬送
装置は機械的摺動部がないので、ダストの発生がなく、
真空室内がクリーンに保てる有利さがある。2. Description of the Related Art Conventionally, for example, a workpiece to be subjected to a film forming process is transported by a magnetic levitation body that moves by magnetically levitating by a magnetic stator provided in a vacuum chamber. Since these magnetic levitation type transport devices have no mechanical sliding parts, there is no generation of dust,
There is an advantage that the vacuum chamber can be kept clean.
この場合、第１図示のように、該ワークａは磁気固定
子ｂから磁気浮上する磁気浮上体ｃに片持状態で取付け
た先端がフォーク状に分岐した可動アームｄに載置され
て搬送される。良好な磁気浮上状態を実現するには、磁
気浮上体ｃや可動アームｄの重量が少しでも軽いことが
好ましく、そのため第２図のように可動アームｄの分岐
部ｅはその全体を細く形成されている。In this case, as shown in FIG. 1, the workpiece a is mounted on a movable arm d whose tip is attached to a magnetic levitation body c that magnetically levitates from a magnetic stator b in a cantilever state, and is conveyed. You. In order to realize a good magnetic levitation state, it is preferable that the weight of the magnetic levitation body c and the movable arm d is as small as possible. Therefore, as shown in FIG. ing.
（考案が解決しようとする課題） 磁気浮上体ｃは、非接触状態で移動するので振動が生
じやすいものであるが、該磁気浮上体ｃの振動がこれに
固定した可動アームｄに伝達されると、細い分岐部ｅが
矢印方向に一種の共鳴振動をし、一度外乱が入ると磁気
浮上体ｃ及び可動アームの振動の減衰に時間が掛り、可
動アームｄ上のワークａに位置ずれや落下を生じさせて
しまうような搬送に不適当な振動が継続するためワーク
ａの搬送が遅れる欠点があった。(Problem to be Solved by the Invention) Since the magnetic levitation body c moves in a non-contact state, the vibration is likely to occur, but the vibration of the magnetic levitation body c is transmitted to the movable arm d fixed thereto. The thin branch portion e makes a kind of resonance vibration in the direction of the arrow, and once a disturbance enters, it takes time to attenuate the vibration of the magnetic levitation c and the movable arm, and the work a on the movable arm d is displaced or dropped. Therefore, there is a disadvantage that the conveyance of the work a is delayed because the vibration that is inappropriate for the conveyance that continues to cause the vibration continues.
本考案は、可動アームの形状を改良して前記した振動
の減衰性を向上させることを目的とするものである。It is an object of the present invention to improve the shape of a movable arm to improve the above-described vibration damping.
（課題を解決するための手段） 本考案では、磁気浮上搬送装置の磁気固定子に対して
磁気により浮上する磁気浮上体に、フォーク状に分岐し
た分岐部を有する可動アームを取付けてこれにワークを
載置するようにしたものに於いて、該可動アームの分岐
部間に形成される空間をその奥部で狭まる略Ｖ字に形成
して該分岐部の先端部よりも根部を幅広とし、該分岐部
の表面に凹部を形成して該分岐部を軽量化することによ
り、上記目的を達成するようにした。(Means for Solving the Problems) In the present invention, a movable arm having a fork-shaped branch portion is attached to a magnetic levitation body that magnetically floats with respect to a magnetic stator of a magnetic levitation transfer device, and a work is mounted on the movable arm. A space formed between the branch portions of the movable arm is formed in a substantially V-shape narrowing at the inner portion thereof, so that the root portion is wider than the tip portion of the branch portion, The above object is achieved by forming a concave portion on the surface of the branch portion to reduce the weight of the branch portion.
前記凹部は、分岐部のワークが載置される側とは反対
側の表面に形成することが好ましい。It is preferable that the concave portion is formed on a surface of the branch portion opposite to the surface on which the workpiece is placed.
（作用） 該磁気浮上搬送装置の磁気浮上体は、磁気固定子から
磁気浮上して移動するが、該磁気浮上体に取付けた可動
アームは、その分岐部間に形成される空間がその奥部で
狭まる略Ｖ字に形成されており、該分岐部の先端部より
も根部が幅広で剛性が増して振動し難くなっているの
で、該磁気浮上体に振動が発生してもそれ自体の振動減
衰時間内で振動がおさまり、可動アームと共鳴振動して
振動減衰時間が長引く不都合がない。従って短時間で円
滑にワークの搬送を行える。また、可動アームは磁気浮
上力を高めるために軽量でなくてはならないが、可動ア
ームの分岐部の表面に凹部を形成したので軽量でしかも
振動の少ない可動アームが得られる。(Function) The magnetic levitation body of the magnetic levitation transfer device moves by magnetic levitation from the magnetic stator, and the movable arm attached to the magnetic levitation body has a space formed between its branch portions in the inner part thereof. And the root portion is wider than the tip end of the branch portion, which increases rigidity and makes it difficult to vibrate. Therefore, even if vibration occurs in the magnetic levitation body, its own vibration Vibration subsides within the damping time, and there is no inconvenience that the vibration damping time is prolonged due to resonance vibration with the movable arm. Therefore, the work can be smoothly transported in a short time. Further, the movable arm must be lightweight to increase the magnetic levitation force, but the concave portion is formed on the surface of the branch portion of the movable arm, so that the movable arm is lightweight and has less vibration.
（実施例） 本考案の実施例を図面第３図乃至第５図に基づき説明
すると、第３図に於いて符号（１）は磁気浮上搬送装置
（２）の磁気固定子（３）に対して磁気により浮上する
直方体状の磁気浮上体、（４）は該磁気浮上体（１）に
腕片（５）で片持状態に取付けられて水平方向に延びる
２本のフォーク状に分岐した分岐部（６）を有する可動
アームを示す。該可動アーム（４）の上には、例えばシ
リコンウエハから成るワーク（７）が載置され、直方体
状の磁気浮上体（１）がその長さ方向へ磁気固定子
（３）から浮上して移動することにより該ワーク（７）
が搬送される。(Embodiment) An embodiment of the present invention will be described with reference to FIGS. 3 to 5. In FIG. 3, reference numeral (1) designates a magnetic stator (3) of a magnetic levitation transfer device (2). A magnetic levitation body in the shape of a rectangular parallelepiped that levitates by magnetism; 5 shows a movable arm having a section (6). A work (7) made of, for example, a silicon wafer is placed on the movable arm (4), and a rectangular magnetic levitation body (1) floats from the magnetic stator (3) in its length direction. By moving, the work (7)
Is transported.
該可動アーム（４）の詳細は第４図示の如くであり、
その分岐部（６）（６）間に形成される空間（８）をそ
の奥部で比較的急激に狭まる略Ｖ字に形成して該分岐部
（６）の先端部よりも根部（6a）を幅広とし、更に第５
図に見られるように、該分岐部（６）の裏側の表面
（９）に凹部（10）を形成して該分岐部（６）を軽量化
した。Details of the movable arm (4) are as shown in FIG.
The space (8) formed between the branches (6) (6) is formed in a substantially V-shape that narrows relatively sharply at the inner part thereof, so that the root (6a) is larger than the tip of the branch (6). And the fifth
As shown in the figure, a concave portion (10) was formed in the surface (9) on the back side of the branch portion (6) to reduce the weight of the branch portion (6).
磁気浮上搬送装置（２）の磁気浮上体（１）が磁気固
定子（３）から磁気浮上するとき、或いは磁気の変動で
可動アーム（４）に矢印（11）方向の振動が加わるが、
該可動アーム（４）は、その分岐部（６）の根部（6a）
は幅広で剛性が強いので、磁気浮上による加振を受け難
く、たとえ加振を受けても分岐部（６）の先端に行くに
従って低い周波数の振動は減衰していく。従って、磁気
浮上体（１）の振動減衰時間内で振動がおさまり、可動
アーム（４）と共鳴振動して振動減衰時間が長引く不都
合がない。When the magnetic levitation body (1) of the magnetic levitation transfer device (2) magnetically levitates from the magnetic stator (3) or due to a change in magnetism, the movable arm (4) is vibrated in the direction of the arrow (11).
The movable arm (4) is provided at the root (6a) of the branch (6).
Is wide and has high rigidity, so that it is hardly subjected to vibration by magnetic levitation, and even if it is subjected to vibration, low-frequency vibration is attenuated toward the tip of the branch portion (6). Therefore, the vibration is reduced within the vibration decay time of the magnetic levitation body (1), and there is no disadvantage that the vibration decay time is prolonged due to resonance vibration with the movable arm (4).
また、可動アーム（４）は、一般に分岐部の重量が増
大すると、モーメント荷重が増えて浮上の安定性が欠け
るようになり、逆に軽いと剛性が弱くなって磁気浮上の
加振を受け易くなるが、本考案の如く分岐部（６）の根
部（6a）を幅広としたことによる重量増を凹部（10）を
形成して剛性を損なわずに軽量化すると、磁気浮上の安
定性と振動の減衰性の良いものが得られる。In general, when the weight of the branching portion increases, the moment load increases, and the movable arm (4) loses floating stability. Conversely, if the movable arm (4) is light, its rigidity is weakened, and the magnetic arm (4) is more susceptible to magnetic levitation. However, if the weight increase caused by widening the root portion (6a) of the branch portion (6) as in the present invention is reduced by forming the concave portion (10) without reducing the rigidity, the stability and vibration of the magnetic levitation are improved. With good attenuation.
図示の実施例では、磁気浮上中に分岐部（６）に伝わ
る振動は非常に少なくなり、外乱を与えた時の減衰性も
従来の場合の約４倍良くなった。In the illustrated embodiment, the vibration transmitted to the branch portion (6) during magnetic levitation is very small, and the damping property when a disturbance is applied is about four times better than the conventional case.
（考案の効果） 以上のように本考案では、磁気浮上搬送装置の磁気浮
上体に取付けされるフォーク状に分岐して分岐部を有す
る可動アームを、その分岐部間に形成される空間を略Ｖ
字に形成した該分岐部の根部を幅広とし、該分岐部の表
面に凹部を形成して該分岐部を軽量化したので、振動の
減衰性がよくしかも軽量で磁気浮上の安定性の良い可動
アーム装置が得られ、迅速な搬送が可能になる等の効果
がある。(Effects of the Invention) As described above, according to the present invention, the movable arm having a fork and having a branch portion attached to the magnetic levitation body of the magnetic levitation transfer device has a space formed between the branch portions. V
The roots of the bifurcated parts are widened and concave parts are formed on the surface of the bifurcated parts to reduce the weight of the bifurcated parts. An effect is obtained in that an arm device can be obtained and quick transfer is enabled.
第１図は従来例の一部截断斜視図、第２図は第１図示の
可動アームの拡大平面図、第３図は本考案の実施例の一
部截断斜視図、第４図は第３図示の可動アームの拡大平
面図、第５図は第４図示の可動アームの裏面図である。 （１）……磁気浮上体 （２）……磁気浮上搬送装置 （４）……可動アーム、（６）……分岐部 （6a）……根部、（７）……ワーク （８）……空間、（９）……裏面 （10）……凹部FIG. 1 is a partially cutaway perspective view of a conventional example, FIG. 2 is an enlarged plan view of a movable arm shown in FIG. 1, FIG. 3 is a partially cutaway perspective view of an embodiment of the present invention, and FIG. FIG. 5 is an enlarged plan view of the movable arm shown, and FIG. 5 is a rear view of the movable arm shown in FIG. (1) Magnetically levitated body (2) Magnetically levitated conveyance device (4) Movable arm (6) Branch (6a) Root (7) Work (8) Space, (9)… Back side (10)… Recess
───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.6 識別記号 庁内整理番号 ＦＩ 技術表示箇所 Ｈ０１Ｌ 21/68 Ｈ０１Ｌ 21/68 Ａ (72)考案者 浅石 隆 神奈川県茅ケ崎市萩園2500番地 日本真 空技術株式会社内 (56)参考文献 特開 昭60−45023（ＪＰ，Ａ) 特開 平１−117041（ＪＰ，Ａ) 特開 昭64−99404（ＪＰ，Ａ) 特開 平１−157546（ＪＰ，Ａ) 特開 昭62−9881（ＪＰ，Ａ) 特開 昭60−178112（ＪＰ，Ａ) 実開 昭62−92646（ＪＰ，Ｕ) 実開 昭60−93627（ＪＰ，Ｕ)──────────────────────────────────────────────────続 き Continued on the front page (51) Int.Cl. 6 Identification number Agency reference number FI Technical indication H01L 21/68 H01L 21/68 A (72) Inventor Takashi Asaishi 2500 Hagizono, Chigasaki-shi, Kanagawa Nihonshin (56) References JP-A-60-45023 (JP, A) JP-A-1-117704 (JP, A) JP-A-64-99404 (JP, A) JP-A-1-157546 ( JP, A) JP-A-62-29881 (JP, A) JP-A-60-178112 (JP, A) JP-A-62-292646 (JP, U) JP-A-60-93627 (JP, U)
Claims (2)
気により浮上する磁気浮上体に、フォーク状に分岐した
分岐部を有する可動アームを取付けてこれにワークを載
置するようにしたものに於いて、該可動アームの分岐部
間に形成される空間をその奥部で狭まる略Ｖ字に形成し
て該分岐部の先端よりも根部を幅広とし、該分岐部の表
面に凹部を形成して該分岐部を軽量化したことを特徴と
する磁気浮上搬送装置の可動アーム装置。A movable arm having a fork-shaped branch is attached to a magnetic levitation body that magnetically floats with respect to a magnetic stator of a magnetic levitation transfer device, and a workpiece is mounted on the movable arm. In the above, the space formed between the branch portions of the movable arm is formed in a substantially V-shape narrowing at the back thereof, the root portion is made wider than the tip of the branch portion, and a concave portion is formed on the surface of the branch portion. A movable arm device of the magnetic levitation transfer device, wherein the branch portion is reduced in weight.
側とは反対側の表面に形成したことを特徴とする請求項
１に記載の磁気浮上搬送装置の可動アーム装置。2. The movable arm device for a magnetic levitation and transfer device according to claim 1, wherein the concave portion is formed on a surface of the branch portion opposite to a surface on which the work is placed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990083047U JP2562958Y2 (en) | 1990-08-04 | 1990-08-04 | Movable arm device of magnetic levitation transfer device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990083047U JP2562958Y2 (en) | 1990-08-04 | 1990-08-04 | Movable arm device of magnetic levitation transfer device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0440033U JPH0440033U (en) | 1992-04-06 |
| JP2562958Y2 true JP2562958Y2 (en) | 1998-02-16 |
Family
ID=31630392
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1990083047U Expired - Lifetime JP2562958Y2 (en) | 1990-08-04 | 1990-08-04 | Movable arm device of magnetic levitation transfer device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2562958Y2 (en) |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6045023A (en) * | 1983-08-23 | 1985-03-11 | Shimada Phys & Chem Ind Co Ltd | Plasma processor |
| JP2552886B2 (en) * | 1987-10-29 | 1996-11-13 | 日本真空技術 株式会社 | Magnetically levitated crossing conveyor in vacuum |
-
1990
- 1990-08-04 JP JP1990083047U patent/JP2562958Y2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0440033U (en) | 1992-04-06 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| EXPY | Cancellation because of completion of term |