JPS63174895A - Magnetic levitation type carrying manipulator - Google Patents
Magnetic levitation type carrying manipulatorInfo
- Publication number
- JPS63174895A JPS63174895A JP62001833A JP183387A JPS63174895A JP S63174895 A JPS63174895 A JP S63174895A JP 62001833 A JP62001833 A JP 62001833A JP 183387 A JP183387 A JP 183387A JP S63174895 A JPS63174895 A JP S63174895A
- Authority
- JP
- Japan
- Prior art keywords
- floating body
- force
- yoke
- manipulator
- restraining force
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005339 levitation Methods 0.000 title claims description 6
- 230000000452 restraining effect Effects 0.000 claims description 27
- 235000012431 wafers Nutrition 0.000 description 12
- 238000005192 partition Methods 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000000428 dust Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Manipulator (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
［産業上の利用分野］
本発明は磁気浮上式搬送マニピュレータ、特に半導体製
造装置においてウェハーを搬送するのに用いられる磁気
浮上式搬送マニピュレータに関するものである。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a magnetic levitation type transport manipulator, and particularly to a magnetic levitation type transport manipulator used for transporting wafers in semiconductor manufacturing equipment.
［従来の技術］
従来の磁気浮上式直線搬送マニピュレータでは、第３図
と第４図に示すように、真空室１内に浮上体ヨーク２，
２およびこれらのヨークを連結する浮上体アーム３を備
える浮上体４を配置し、真空室の隔壁７を隔てて電磁石
ヨーク５．５およびこれらのヨークを連結する電磁石ア
ーム６が配置されている構成のものがある。浮上体ヨー
ク２．２にはマグネット８が取付けられ、また電磁石ヨ
ーク５，５にはコイル９が巻回されており、このコイル
に電磁石を制御するための電流が流される。[Prior Art] In a conventional magnetically levitated linear conveyance manipulator, as shown in FIGS. 3 and 4, a floating body yoke 2,
2 and a floating body arm 3 that connects these yokes, and an electromagnetic yoke 5.5 and an electromagnetic arm 6 that connects these yokes are arranged across a partition wall 7 of the vacuum chamber. There is something like that. A magnet 8 is attached to the floating body yoke 2.2, and a coil 9 is wound around the electromagnetic yokes 5, 5, and a current for controlling the electromagnets is passed through this coil.
隔壁７によって隔離された真空外にある電磁石ヨーク５
．５からの磁場の力により浮上体４の浮上は、上下から
の力の釣合った位置に浮上している。この場合、浮上体
を浮かしている力は上下の電磁石による引力である。磁
力線は第４図に矢印で示す向きに閉じている。この場合
には、進行方向に対して横方向に強い拘束力がΩくけれ
ども、進行方向に対しては拘束力は比較的弱いものとな
る。An electromagnetic yoke 5 outside the vacuum isolated by a partition wall 7
．． The floating body 4 is levitated by the force of the magnetic field from the magnetic field 5 to a position where the forces from above and below are balanced. In this case, the force that keeps the floating object afloat is the attractive force caused by the upper and lower electromagnets. The lines of magnetic force are closed in the direction shown by the arrow in FIG. In this case, although there is a strong restraining force in the transverse direction to the traveling direction, the restraining force in the traveling direction is relatively weak.
従来のこの方式の搬送マニピュレータは、第３図に示す
ように、浮上体の進行方向に対して横方向の拘束力は強
いが、進行方向に対しては拘束力が弱く、そのため搬送
マニピュレータが前後方向に振動するなどの原因となっ
ていた。As shown in Figure 3, the conventional transport manipulator of this type has a strong restraining force in the lateral direction with respect to the traveling direction of the floating object, but the restraining force in the traveling direction is weak, so that the transport manipulator cannot move back and forth. This caused the device to vibrate in different directions.
［発明が解決しようとする問題点］
従来の搬送マニピュレータは、上述したようなｔＲ造を
しているため、第３図において真空室の上下に配置され
る電磁石と、浮上体が前後にずれを生じた時の復元力は
、上下方向の吸引力であるが、この力は横方向の閉じた
磁力線の拘束力に比べて比較的弱い、このため浮上体に
前後方向の振動が生じたり、また浮上体の停止精度が低
いものであった。[Problems to be Solved by the Invention] Since the conventional transfer manipulator has the above-mentioned tR structure, the electromagnets placed above and below the vacuum chamber and the floating body as shown in FIG. The restoring force generated is an attractive force in the vertical direction, but this force is relatively weak compared to the restraining force of closed magnetic lines of force in the horizontal direction, so it may cause the floating body to vibrate in the longitudinal direction, or The stopping accuracy of the floating object was low.
本発明は、横方向の拘束力に加えて進行方向にも強い拘
束力を持たせて、上述し外問題点を解決せんとするもの
である。The present invention aims to solve the above-mentioned problems by providing a strong restraining force in the traveling direction in addition to the horizontal restraining force.
［問題点を解決するための手段］
本発明は上述したような問題点を解決するために、電磁
石ヨークの前後と左右の４組のヨークのうち１組以上３
組以下のヨークを進行方向に拘束力を持たせる配置にし
たものである。[Means for Solving the Problems] In order to solve the above-mentioned problems, the present invention provides at least one set of three out of the four sets of yokes on the front, rear, left and right sides of the electromagnet yoke.
The yokes below the set are arranged to provide a restraining force in the direction of travel.
こうして本発明によれば、磁気浮上を利用した直進ウェ
ーハ搬送マニピュレータにおいて、浮上体の横方向の拘
束力に加え進行方向の拘束力を強めかつマニピュレータ
の前後方向の振動を低減するため、浮上体の進行方向と
横方向の各々の方向に拘束力が■くように浮上体にヨー
クを取付けたことを特徴とする磁気浮上式搬送マニピュ
レータが提供される。Thus, according to the present invention, in a straight wafer transfer manipulator using magnetic levitation, in addition to the lateral restraining force of the floating body, the restraining force in the advancing direction is strengthened and the vibration of the manipulator in the longitudinal direction is reduced. A magnetically levitated transport manipulator is provided, characterized in that a yoke is attached to a floating body so that a restraining force is exerted in both the traveling direction and the lateral direction.
［作用］
本発明はこの様な棺成のヨーク配置となっているために
、進行方向と横方向に閉じた磁力による拘束力が働く、
磁気浮上式搬送マニピュレータで問題となるのは、ウェ
ハーアームの振動と停止位ｌｐ度であるが、この方式の
搬送マニピュレータでは、進行方向にも閉じた磁力によ
る拘束力が働くので、ウェハーアームの振動は抑えられ
、またその停止位置精度は格段に向上し、振動が非常に
少なく、位置精度の高い直進搬送が可能となる。[Function] Since the present invention has such a yoke arrangement of the coffin structure, a restraining force due to a closed magnetic force acts in the traveling direction and the lateral direction.
The problem with magnetically levitated transfer manipulators is the vibration of the wafer arm and the stopping position lp, but with this type of transfer manipulator, the restraining force due to the closed magnetic force also acts in the direction of movement, so the vibration of the wafer arm is reduced. In addition, the stopping position accuracy is significantly improved, vibration is extremely low, and straight forward conveyance with high positional accuracy is possible.
［実施例］
第５図と第６図に示す本発明の原理を示す概略図におい
て、真空室１内には、浮上体ヨーク２およびこれらのヨ
ークを連結する浮上体アーム３を備える浮上体４が配置
される。この浮上体４は、その横方向に配置される浮上
体ヨーク２と、浮上体の進行方向に２連で配列される浮
上体ヨーク２ａ、２ｂ、２Ｃと、これらのヨークを連結
している浮上体アーム３とから成り、各浮上体ヨーク間
にはマグネット８が固定されている。[Example] In the schematic diagrams illustrating the principle of the present invention shown in FIGS. 5 and 6, in a vacuum chamber 1 there is a floating body 4 comprising a floating body yoke 2 and a floating body arm 3 connecting these yokes. is placed. The floating body 4 includes a floating body yoke 2 arranged laterally, floating body yokes 2a, 2b, and 2C arranged in two rows in the traveling direction of the floating body, and a floating body yoke connecting these yokes. A magnet 8 is fixed between each floating body yoke.
真空室ｌの隔Ｗ！７を隔てて電磁石ヨーク５およびこれ
らのヨークを連結する電磁石アーム６が浮上体４と対応
する位置に配置されている。電磁石ヨークは、その横方
向に配置される電磁石ヨーク５と、浮上体の進行方向に
２連で配列される電磁石ヨーク５ａ、５ｂ、５Ｃと、こ
れらのヨークを連結している電磁石アーム６とから成り
、各電磁石ヨーク間にはコイル９が巻回されており、こ
のコイルに電磁石を制御するための電流が流される。Vacuum chamber l distance W! An electromagnetic yoke 5 and an electromagnetic arm 6 connecting these yokes are arranged at a position corresponding to the floating body 4 with a distance 7 between them. The electromagnetic yoke consists of an electromagnetic yoke 5 arranged laterally, electromagnetic yokes 5a, 5b, and 5C arranged in two rows in the direction of movement of the floating body, and an electromagnetic arm 6 connecting these yokes. A coil 9 is wound between each electromagnet yoke, and a current for controlling the electromagnet is passed through this coil.
障壁７によって隔間された真空外にある電磁石ヨーク５
からの磁場の力により浮上体４の浮上は、上下からの力
の釣合った位置に浮上している。この場合、浮上体を浮
かしている力は上下の電磁石による引力である。磁力線
は第５図と第６図に矢印で示す向きに閉じている。第５
図には、浮上体の進行方向に閉じた磁力による拘束力が
働いている状態が示されている。また第６図には、浮上
体の横方向に閉じた磁力による拘束力が例いている状態
が示されている。Electromagnetic yoke 5 outside the vacuum separated by a barrier 7
The floating body 4 is levitated by the force of the magnetic field from above to a position where the forces from above and below are balanced. In this case, the force that keeps the floating object afloat is the attractive force caused by the upper and lower electromagnets. The lines of magnetic force are closed in the directions shown by the arrows in FIGS. 5 and 6. Fifth
The figure shows a state in which a restraining force due to a closed magnetic force is acting in the traveling direction of the floating body. Further, FIG. 6 shows a state in which a restraining force is exemplified by a horizontally closed magnetic force of the floating body.
従って、この浮上体にはその横方向に対してと同様進行
方向にも強い拘束力が［有］く。Therefore, this floating body has a strong restraining force in its traveling direction as well as in its lateral direction.
上下の電磁石と浮上体が進行方向にズレを生じた時の復
元力は、上下方向の吸引力であるが、第５図と第６図に
示す本発明のヨーク構造では、前後と左右の４組のヨー
クのうち２１Ｎを進行方向に拘束力を持たせる配置とし
たため、進行方向にも閉じた磁力線による拘束力が働く
、ここまでは２連のヨーク２ａ、 ２ｂ、２ｃの場合を
説明したが、１連のヨーク（２，ａ ＊ ２ ｂのみ）
あるいは２以上の多数連の場合、さらに、１連のヨーク
を多数個進行方向に設置しても同じ効果がある。The restoring force when the upper and lower electromagnets and the floating object are displaced in the traveling direction is an attractive force in the vertical direction, but in the yoke structure of the present invention shown in Figs. Since 21N of the yokes in the set is arranged to have a restraining force in the traveling direction, a restraining force due to closed magnetic lines of force also acts in the traveling direction.Up to this point, we have described the case of two yokes 2a, 2b, and 2c. , 1 series of yokes (2, a * 2 b only)
Alternatively, in the case of two or more yokes, the same effect can be obtained even if a large number of yokes are installed in the traveling direction.
本発明の一実施例を第１図と第２図を参照して説明する
。本発明の磁気浮上式搬送マニピュレー夕は、円筒形の
ケーシング１０と、このケーシングの両端部を覆うフラ
ンジ１１．１２と、これらのフランジ間に支持されるパ
ルスモータ−ガイドレール１４と、円筒形のケージジグ
１０の中央部に配置される真空隔壁７とを備えている。An embodiment of the present invention will be described with reference to FIGS. 1 and 2. The magnetically levitated transfer manipulator of the present invention includes a cylindrical casing 10, flanges 11.12 covering both ends of the casing, a pulse motor guide rail 14 supported between these flanges, and a cylindrical casing 10. The cage jig 10 includes a vacuum partition wall 7 disposed at the center of the cage jig 10.
真空隔壁７内に細長い縦方向の真空室１が形成され、こ
の真空室内を浮上体４が無接触状態で搬送される。An elongated vertical vacuum chamber 1 is formed within the vacuum partition 7, and the floating body 4 is transported within this vacuum chamber in a non-contact state.
前方のフランジ１１には、浮上体の後述するウェハーア
ームが通過するアーム窓１６が設けられる。The front flange 11 is provided with an arm window 16 through which a wafer arm (described later) of the floating body passes.
浮上体４は、第２図に平面図で示すように横方向の拘束
力を生じさせる浮上体ヨーク２と、進行方向の拘束力を
生じさせる浮上体ヨーク２ａ、２ｂ、２ｃとが取付けら
れ、これらのヨークにはマグネット８が固定されている
。As shown in a plan view in FIG. 2, the floating body 4 is attached with a floating body yoke 2 that generates a restraining force in the lateral direction, and floating body yokes 2a, 2b, and 2c that generate a restraining force in the traveling direction. Magnets 8 are fixed to these yokes.
更に浮上体４の前端部には、ウェハーアーム１８が固定
されていて、その先端にウェハーを保持する受は皿（図
示していない）が付いている。Further, a wafer arm 18 is fixed to the front end of the floating body 4, and a holder (not shown) for holding a wafer is attached to the tip of the wafer arm 18.
真空室外で真空隔壁７の上下に配置される電磁石アーム
６は、図示されていないリニヤパルスモータ−によりパ
ルスモータ−ガイドレール１４に沿って前後に移動され
る。電磁石アーム６には、それぞれ電磁石ヨーク５が固
定され、そのヨーク形状は、前に説明したように前後と
左右に同等の拘束力をもつように、対向する２組が対に
なっている。電磁石ヨーク５にはそれぞれコイル９が巻
回され、ヨーク外方には電磁石外枠２０が固定される。The electromagnetic arm 6 disposed above and below the vacuum partition wall 7 outside the vacuum chamber is moved back and forth along a pulse motor guide rail 14 by a linear pulse motor (not shown). An electromagnet yoke 5 is fixed to each electromagnet arm 6, and the yoke shape is such that two sets of yokes face each other so as to have the same binding force in the front and rear and left and right directions as described above. A coil 9 is wound around each electromagnet yoke 5, and an electromagnet outer frame 20 is fixed to the outside of the yoke.
更に電磁石アーム６には″、浮上体の浮上制御用位置セ
ンサー（図示せず）が取り付けられる。Furthermore, a position sensor (not shown) for controlling the levitation of the floating body is attached to the electromagnetic arm 6.
浮上体４は、電磁石の拘束力によってパルスモータ−の
移動に追従して動く、この実施例では、搬送マニピュレ
ータのストロークは、２うＯｍｍで、停止位置精度は０
．５ｍｍである。The floating body 4 moves by following the movement of the pulse motor due to the restraint force of the electromagnet. In this embodiment, the stroke of the transport manipulator is 20 mm, and the stop position accuracy is 0.
．． It is 5mm.
この搬送マニピュレータは、全体的に、図に示されてい
ない円筒形容器に入れられており、電磁石とリニヤパル
スモータ−が収納されている部分は、円筒形ケーシング
１０、真空隔壁１５およびフランジ１１．１２により隔
離密閉されている。The entire conveyance manipulator is housed in a cylindrical container (not shown), and the portion in which the electromagnet and linear pulse motor are housed consists of a cylindrical casing 10, a vacuum partition 15, and a flange 11. It is isolated and sealed by 12.
従って真空室１内の浮上体４とウェハーアーム１８を含
む空間と電磁石がある空間とは隔離されている。Therefore, the space in the vacuum chamber 1 containing the floating body 4 and the wafer arm 18 is isolated from the space in which the electromagnet is located.
この搬送マニピュレータを半導体製造装置に応用する場
合、マニピュレータの摺動部からのダスト粒子が被搬送
ウェハー上に付着し、製造プロセスに悪影響を及ぼし、
製品の歩留まりの低下をもたらすことがあるが、本発明
の搬送マニピュレータでは、摺動部がウェハーとは完全
に隔離されていてしかも無接触の搬送であるため、上記
原因によるダスト粒子による汚染が防止される。When this transport manipulator is applied to semiconductor manufacturing equipment, dust particles from the sliding parts of the manipulator adhere to the wafer being transported, adversely affecting the manufacturing process.
However, in the transport manipulator of the present invention, the sliding part is completely isolated from the wafer and transport is carried out without contact, thus preventing contamination by dust particles caused by the above-mentioned causes. be done.
［発明の効果コ
本発明による搬送マニピュレータは、特に浮上体を磁力
によって拘束するヨーク形状を改善したものである。浮
上体は真空隔壁を隔てて位置する電磁石に拘束されてい
て、パルスモータ−により駆動される電磁石の動きに追
従して前後に運動する。この場合上下方向の拘束力、即
ち浮上体を空間に保持する力は、浮上体自体の重量およ
び上下の電磁石と浮上体のマグネットの吸引力の釣り合
いにより生じる。こうして、電磁石と浮上体の相対距離
を位置センサでモニターし、電磁石に流れる電流を制御
することにより、浮上位置を保持する。[Effects of the Invention] The conveying manipulator according to the present invention has an improved yoke shape that specifically restrains the floating body by magnetic force. The floating body is restrained by electromagnets located across a vacuum partition, and moves back and forth following the movement of the electromagnets driven by a pulse motor. In this case, the restraining force in the vertical direction, that is, the force that holds the floating body in space, is generated by the weight of the floating body itself and the balance between the attraction forces of the upper and lower electromagnets and the magnets of the floating body. In this way, the relative distance between the electromagnet and the floating body is monitored by the position sensor, and the floating position is maintained by controlling the current flowing through the electromagnet.
平面内での拘束力も電磁石と浮上体との間の磁力である
が、この場合には磁力線が閉じた平面方向に強い拘束力
が生じる。そこで浮上体の進行方向と横方向に磁力線の
閉じた拘束力を生じるようにそれぞれのヨークを配置す
れば、この浮上体は電磁石から安定した拘束を受ける。The restraining force within the plane is also the magnetic force between the electromagnet and the floating body, but in this case, a strong restraining force occurs in the plane direction where the lines of magnetic force are closed. Therefore, by arranging each yoke so as to generate a restraining force of closed magnetic lines of force in the traveling direction and the lateral direction of the floating body, the floating body will be stably restrained by the electromagnets.
このため振動の小さい、位置精度の高い直進搬送が可能
となる。Therefore, straight forward conveyance with low vibration and high positional accuracy is possible.
第１図は、本発明の実施例を示ず搬送マニピュレータの
縦断面図である。
第２図は、本発明の搬送マニピュレータに用いられる浮
上体の平面図である。
第３図と第４図は、従来の搬送マニピュレータの原理を
示す縦断面図と横断面図である。
第５図と第６図は、本発明の搬送マニピュレータの原理
を示すｗ１断面図と横断面図である。
図中、１・・・真空室、２・・・浮上体ヨーク、３・・
・浮上体アーム、４・・・浮上体、５・・・電磁石ヨー
ク、６・・・電磁石アーム、７・・・真空隔壁、８・・
・マグネット、９・・・コイル、１ｏ・・・ケーシング
、１１．１２・・・フランジ、１４・・・ガイドレール
、１６・・・アーム窓、１８・・・ウェハーアーム
第１図
第２図
」嘉３図
第４図
第５図
第６図FIG. 1 is a longitudinal cross-sectional view of a conveyance manipulator that does not show an embodiment of the present invention. FIG. 2 is a plan view of a floating body used in the conveyance manipulator of the present invention. 3 and 4 are a longitudinal sectional view and a transverse sectional view showing the principle of a conventional conveyance manipulator. 5 and 6 are a w1 cross-sectional view and a cross-sectional view showing the principle of the conveyance manipulator of the present invention. In the figure, 1...vacuum chamber, 2...levitating body yoke, 3...
- Floating body arm, 4... Floating body, 5... Electromagnet yoke, 6... Electromagnetic arm, 7... Vacuum partition, 8...
・Magnet, 9...Coil, 1o...Casing, 11.12...Flange, 14...Guide rail, 16...Arm window, 18...Wafer arm Figure 1 Figure 2 Figure 3 Figure 4 Figure 5 Figure 6
Claims (1)
おいて、浮上体の横方向の拘束力に加え進行方向の拘束
力を強めかつマニピュレータの前後方向の振動を低減す
るため、浮上体の進行方向と横方向の各々の方向に拘束
力が働くように浮上体にヨークを取付けたことを特徴と
する磁気浮上式搬送マニピュレータ。In a straight wafer transfer manipulator that uses magnetic levitation, in addition to the lateral restraining force of the floating body, in order to strengthen the restraining force in the traveling direction and reduce the longitudinal vibration of the manipulator, A magnetically levitated transfer manipulator characterized in that a yoke is attached to the floating body so that a restraining force acts in the direction of.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP183387A JPH07115315B2 (en) | 1987-01-09 | 1987-01-09 | Magnetically levitated transfer manipulator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP183387A JPH07115315B2 (en) | 1987-01-09 | 1987-01-09 | Magnetically levitated transfer manipulator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63174895A true JPS63174895A (en) | 1988-07-19 |
| JPH07115315B2 JPH07115315B2 (en) | 1995-12-13 |
Family
ID=11512557
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP183387A Expired - Fee Related JPH07115315B2 (en) | 1987-01-09 | 1987-01-09 | Magnetically levitated transfer manipulator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH07115315B2 (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01274991A (en) * | 1988-04-26 | 1989-11-02 | Seiko Seiki Co Ltd | Magnetic levitation transfer device |
| JPH0271985A (en) * | 1988-09-05 | 1990-03-12 | Takenaka Komuten Co Ltd | Manipulator |
| US5397212A (en) * | 1992-02-21 | 1995-03-14 | Ebara Corporation | Robot with dust-free and maintenance-free actuators |
| JP2004040089A (en) * | 2002-05-21 | 2004-02-05 | Otb Group Bv | Substrate processing equipment |
-
1987
- 1987-01-09 JP JP183387A patent/JPH07115315B2/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01274991A (en) * | 1988-04-26 | 1989-11-02 | Seiko Seiki Co Ltd | Magnetic levitation transfer device |
| JPH0271985A (en) * | 1988-09-05 | 1990-03-12 | Takenaka Komuten Co Ltd | Manipulator |
| US5397212A (en) * | 1992-02-21 | 1995-03-14 | Ebara Corporation | Robot with dust-free and maintenance-free actuators |
| JP2004040089A (en) * | 2002-05-21 | 2004-02-05 | Otb Group Bv | Substrate processing equipment |
| JP4578784B2 (en) * | 2002-05-21 | 2010-11-10 | オーテーベー、ソーラー、ベスローテン、フェンノートシャップ | Substrate processing equipment |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH07115315B2 (en) | 1995-12-13 |
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| Date | Code | Title | Description |
|---|---|---|---|
| R250 | Receipt of annual fees |
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|
| R250 | Receipt of annual fees |
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|
| LAPS | Cancellation because of no payment of annual fees |