JPH0271985A - Manipulator - Google Patents

Abstract

PURPOSE:To improve the portability of a manipulator by providing a 1st arm rotatably around Z axis by extending in the Z axial direction and providing a 2nd arm slidable in the direction orthogonal with Z axis on the guide member freely slidable along this 1st arm. CONSTITUTION:A theta coordinate is determined by rotating a 1st arm 48 around Z axis by a 1st driving device 62, and Z coordinate is determined by sliding a guide member 52 and the 2nd arm 50 provided thereon by a 2nd driving device(58, 60). Moreover, R coordinate is determined by sliding the 2nd arm 50 in the direction orthogonal with the Z axis by a 3rd driving device. In this case, the 1st arm 48 is consisting of the cylindrical member 49 of non-magnetic body and the 2nd driving device is consisting of a movable magnet 58 stored inside this cylindrical member 49 and a stationary magnet 60 fixed to the guide member 52 so as to oppose to the movable magnet 58. By forming a manipulator like this the portability is improved and dusting property is reduced.

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a manipulator, and particularly to a clean room in which leak tests of air filters (HEPA filters) placed in clean rooms and air cleanliness tests in clean rooms are performed unmanned. related to manipulators used in measuring robots.

[Conventional technology]

Regarding HEPA filters placed on the ceiling or wall of a clean room, - During boat fishing, check whether air that does not pass through the filter material is leaking from the filter surface, or whether air is leaking from the joints around the filter mounting frame. It is necessary to perform a leak test to see if there is a problem. If this leak test were to be performed manually, the operator would have to move at a constant speed (
It is necessary to scan the entire surface of the filter while maintaining the distance between the sample collection tube (probe) and the filter at a predetermined distance (within 2.5 cm) at a speed of 5 cm/sec or less. It will require time. In addition, air cleanliness tests in clean rooms are also conducted using the above-mentioned probes, but since humans are the largest source of dust generation in clean rooms, measurement accuracy deteriorates and the maintenance of cleanliness is adversely affected.

For this reason, conventionally, an inspection device has been proposed that performs a leak test or a cleanliness test using an autonomously running unmanned trolley. This inspection device installs a guideline on the running floor, detects this guideline with a sensor, runs an unmanned trolley along the guideline, stops directly below the filter, detects the presence of the filter with an image sensor, and moves up and down. After aligning the X-Y table and the filter frame, the filter surface is scanned with a probe provided on the X-Y table to perform a leak test or the like.

[Problem to be solved by the invention]

However, since the conventional inspection apparatus uses an X-Y table as a manipulator for moving the probe, there is a problem in that the manipulator has a flat plate shape, resulting in poor portability.

The present invention was made to solve the above problems, and an object of the present invention is to provide a manipulator with good portability.

[Means to solve the problem]

In order to achieve the above object, the present invention includes a first arm extending in the Z-axis direction of cylindrical coordinates and rotatable around the Z-axis, and a first drive for rotating the first arm. a device, a guide member slidably provided on the first arm, a second drive device that slides the guide member along the first arm, and a second drive device that slides the guide member along the first arm; a second arm extending and slidably provided on the guide member in a direction perpendicular to the Z-axis; and a third drive for sliding the second arm in a direction perpendicular to the Z-axis. It is configured to include a device.

In the present invention, the first arm is made of a non-magnetic cylindrical member, and the second driving device is configured to include a first magnet housed in the cylindrical member, and a first magnet that is attached to the cylindrical member. The guide member may include a moving device that moves in the axial direction, and a second magnet fixed to the guide member so as to face the first magnet.

[Effect]

The manipulator of the present invention has a cylindrical coordinate system, and a guide member that is orthogonal to the first arm is slidably provided on a guide member that is slidably provided on the first arm. The Z coordinate can be determined by the drive, the θ coordinate by the first drive, and the R coordinate by the third drive.

Further, the first arm is constituted by a cylindrical member made of a non-magnetic material, and the first magnet is housed in the cylindrical member, and a second magnet is fixed to the guide member so as to face the magnet. By moving the magnet, the second arm can be moved in two axial directions by the attraction force.

〔Effect of the invention〕

As explained above, according to the present invention, since the manipulator is composed of two arms, portability is improved,
Furthermore, if the cylinder is driven by a magnet, dust generation can be reduced compared to the case of an air cylinder.

〔Example〕

Embodiments of the present invention will be described in detail below with reference to the drawings.

As shown in FIGS. 1 (1), (2), and (3), the top side of the autonomously moving unmanned vehicle 10, which is equipped with a pair of drive wheels 18 and a pair of free wheels 20, has a vertical opening. A cylindrical coordinate manipulator 12, that is, a three-degree-of-freedom manipulator, is attached, in which a vertical arm 48 that can rotate and a horizontal arm 50 that is attached to the vertical arm and is movable in the horizontal and vertical directions are arranged orthogonally. ing. At the tip of the horizontal arm 50 of the cylindrical coordinate manipulator 12,
A probe 14 for leak testing and a probe 16 for cleanliness testing are fixed. A contact sensor 22 is attached to the tip of the probe 14, and the base end is connected via a flexible vibrator 24 to a degradator (not shown) with a built-in suction device located inside the unmanned traveling vehicle 10. has been done. The flexible vibe 24 can be removed from the probe 14 and connected to the probe 16. Further, the probe 16 for measuring cleanliness includes a temperature/humidity sensor 26 for detecting temperature and humidity, and a wind speed sensor 2 for detecting airflow.
8 and a laser displacement sensor 29 that measures the displacement up to the measurement target. An emergency stop button 32 is provided on the top surface of this unmanned traveling vehicle 10 to stop the unmanned traveling vehicle 10 in an emergency. Note that 30 is a wiring.

As shown in FIGS. 2(1) and 2(2), the drive wheel 18 is attached to an axle 34 rotatably supported around a vertical shaft 38 extending in the vertical direction. . This axle 34 is connected to a drive shaft of a servo motor 36 via a bevel gear 31. Therefore, by rotating the servo motor 36, the drive wheel 18 is rotated around the axle 34. The base end of the vertical shaft 38 is fixed to the chassis 11 of the traveling truck and extends in the vertical direction, and the intermediate portion thereof is connected to the drive shaft of the servo motor 42 via a worm gear 40 and a bevel gear 33. has been done. Above drive wheel 1
8, Axle 34, bevel gear 31.33, worm gear 40
and servo motors 36, 42 are mounted in one housing. Thus, rotating the servo motor 42 causes the housing to rotate about the vertical axis 38, thereby causing the drive wheel 18 and the servo motor 36, 42 to rotate together in a horizontal plane. In addition, servo motor 3
6. Each of the servo motors 42 is equipped with a rotary encoder 41 (FIG. 7) for detecting the rotational position of the drive wheel 18 and a rotary encoder 35 (FIG. 7) for detecting the travel distance of the unmanned vehicle 10. is installed. The free wheel 20 is constructed of casters or the like, and is rotatably attached to the tip of a support 44 that is rotatably attached to the unmanned vehicle 10 around a vertical line. In this way, since the unmanned traveling trolley 10 is provided with the pair of drive wheels 18 and the pair of free wheels 20, the rear drive wheels control the direction of the drive wheels 18 in the horizontal plane by rotating the servo motor 42. 18
By rotating the unmanned vehicle 10, it is possible to move the unmanned vehicle 10 in any linear direction and to perform rotational movement.

Next, the cylindrical coordinate manipulator 12 will be explained in detail with reference to FIGS. 3 and 4 (1), (2), and (3). The vertical arm 48 has a pair of non-magnetic stainless steel vibes 4.
9 are arranged in parallel and fixed at both ends with fixing members 53. A pulley 54 is rotatably housed in each of the fixed members 53, and an endless timing belt 56, which is provided so as to pass through a pair of stainless steel vibes 49, is passed between the pulleys 54. There is. A movable magnet 58 housed within a stainless steel vibrator 49 is attached to the timing belt 56 . The base end portion of the vertical arm 48 is provided so as to pass through a through hole 46 formed in the unmanned traveling vehicle 10 and protrude into the unmanned traveling vehicle 10 . The base end of this vertical arm 48 is connected to a drive shaft of a servo motor 62.

Therefore, by rotating the servo motor 62, the vertical arm 48 can be rotated around the vertical line.

Further, a drive shaft of a servo motor (not shown) is connected to the rotation shaft of the pulley 54 protruding into the unmanned traveling vehicle lo, the drive shaft of which is disposed orthogonal to the drive shaft of the servo motor 62. .

Therefore, by rotating this servo motor, the movable magnet 58 can be moved in the vertical direction within the stainless steel vibrator 49.

The guide member 5 is configured to be slidable relative to the vertical arm 48.
2 is installed. A pair of fixed magnets 60 are fixed to the guide member 52 at positions sandwiching one stainless steel vibrator 49 of the vertical arm 48 and facing the movable magnet 58 inside the stainless steel pipe 49. The magnetic poles of the movable magnet 58 and the fixed magnet 60 are oriented so that a bow-sucking force acts between them.

A horizontal arm 50 is attached to the guide member 52 so as to be orthogonal to the vertical arm 48 and slidable relative to the guide member 52 . This horizontal arm 50 is constructed by arranging a pair of carbon fiber vibrators 51 in parallel and fixing both ends with fixing members. Arm with carbon fiber vibe +
It is possible to reduce the weight by forming a. Therefore, as explained above, when the movable magnet 58 is moved in the vertical direction, the fixed magnet 60 is moved in the vertical direction together with the movable magnet 53 due to the attractive force, thereby making it possible to move the horizontal arm 50 in the vertical direction. On the side of the guide member 52 opposite to the side where the fixed magnet 60 is attached,
A servo motor 64 is attached as shown in FIGS. 1 and 4. A drive transmission pulley 66 made of a rubber roller or the like is attached to the rotating shaft of the servo motor 64 so as to pass through a groove 68 formed in the guide member 52 and come into contact with one of the carbon fiber vibes 51. There is. Since the carbon fiber vibe 51 is slidable with respect to the guide member 52, the horizontal arm 50 can be moved in the horizontal direction by rotating the drive transmission pulley 66 using the servo motor 64 fixed to the guide member 52. It is.

This manipulator 12 is removably attached to the unmanned vehicle 10 and disassembled during transportation, making transportation even easier.

The contact sensor 22 attached to the tip of the probe 14 is
As shown in FIG. 5, there are a plurality of tactile sensors 74 consisting of pressure sensors etc. fixed near the tip of the probe 14, and a ring-shaped sensor 74 arranged so as to surround the tip of the probe 14 without contacting the probe 14. It is composed of a contact 70 and a rod 72 that connects the contact 70 and each of the tactile sensors 74. When an object comes into contact with this contactor 70 from the top direction or the entire circumferential direction of the side part, contact pressure is applied to the rod 70.
2 to the tactile sensor 74, it is possible to sense contact from the top direction and the entire circumferential side direction.

Furthermore, the sensitivity can be increased by increasing the number of tactile sensors 74.

Figure 6 shows the three axes of the cylindrical coordinate manipulator 12 (Z-axis,
The cylindrical coordinate manipulator 12 is arranged so that the two axes are oriented vertically and the R axis is oriented horizontally. Then, the probe 14 attached to the tip of the cylindrical coordinate manipulator 12 is placed directly below the filter attached to the ceiling surface, and the manipulator is controlled to keep the distance between the tip of the probe 14 and the filter 76 at about 2.5 cm. A leak test is performed by scanning the filter surface in a zigzag pattern as shown in FIG. Note that although the Z axis is oriented vertically, it may be oriented horizontally or in any other direction.

FIG. 7 schematically shows a control device housed in the unmanned traveling vehicle 10. The probe 14 is connected to a dust meter 98 that includes a flexible vibrator 24 and a suction device 96. The number of abrasive particles detected by the dust meter 98, the temperature and humidity detected by various sensors, and the airflow are recorded by the microcomputer 8.
5, the data is transmitted manually from the transmitting/receiving device 81 to a transmitting/receiving device provided outside the clean room. The microcomputer 85 is connected to the contact sensor 22, the low-return encoder 35, the low-return encoder 41, the filter arrangement data storage section 91, etc., and the microcomputer 85 adjusts the contact sensor 22 and low-return encoder according to a pre-stored program. The position of the unmanned traveling trolley 10 is detected with respect to the filter arrangement information stored in the filter arrangement data storage section 91 based on the outputs of the encoders 35 and 41, etc., and the braking device 77, drive wheel 18, and servo motor 62
etc. to control the unmanned traveling trolley 10 and the manipulator 1.
2 and performs various tests such as a leak test.

FIG. 8 shows a device for analyzing detection data transmitted from a transceiver 81 during automatic measurement of the above-mentioned clean room control robot, and this device includes a transceiver 78 equipped with an antenna 80 and a hand belt computer. It consists of 84.

The hand belt computer 84 includes a liquid crystal display 86 for displaying data, a keyboard 88 for inputting data, and a disk driver 90 for reading and writing data on a floppy disk as an external storage device. There is. The transmitter/receiver 78 and the hand belt computer 84 are connected by an R3-232C (EIA standard) cable 82.

Next, the manual operation box will be explained. As shown in FIG. 9, the operation box 78 includes an antenna 87, an emergency stop switch 102 for stopping the measurement robot in an emergency, and a selection for selecting a leak test (LEAK) or a cleanliness test (CLEAN). Switch 104, automatic control (AUTO) and manual control (MANUA)
L), an alarm mode switch 108 for determining whether to set the alarm generation mode, a start switch 110 for starting the operation of the measurement robot, and a measurement robot and filter arrangement data stored in advance. An origin position adjustment switch 112 for adjusting the origin position with the filter arrangement information acting as absolute coordinates stored in the unit 91, a stop switch 114 for stopping the measuring robot, the running direction of the measuring robot or the operation of the manipulator. A joystick 116 for manually and remotely controlling the object, and a changeover switch 118 for selecting an object to be remotely controlled with the joystick 116.
(Unmanned traveling trolley 10 when set to WHEEL, cylindrical coordinate manipulator 12 when set to ARM), to select whether to run the unmanned running trolley 10 in the longitudinal direction (VE RTICAL) or to move the cylindrical coordinate manipulator 12 in two-axis directions. a selection switch 120 for selecting whether to run the unmanned traveling vehicle 10 in the left-right direction (HORI ZONTAL) or moving the cylindrical coordinate manipulator 12 in the R-axis direction; A selection switch 124 and a power switch 126 are provided for selecting whether to rotate the cylindrical coordinate manipulator 12 in the θ-axis direction.

10(1), (2) and FIG. 11 show filter placement information to be stored in the filter placement data record 4, α section 91. The filter 76 is disposed across the frames 92 as shown in FIG.
A plurality of filters (four in the figure) are arranged within one block surrounded by 2. This filter 76 is
h, and illuminating lights 94 are attached to necessary locations on the frame 92. This illumination light 94 is O from the floor.
It is at the height of Bh. Therefore, X of one block of filter
The length in the direction Fx, the length in the Y-axis direction of the l-block filter Fy (=4HPy), the width 'vV x in the X-axis direction of the frame 92, and the width wy in the Y-axis direction of the frame 92 are taken as one unit. It is stored as plane information shown in FIG. In addition, in the normal case, FxFx2=..., Fy1=Fy, =
...Wx1=Wx2 ..., WyI=Wy2=...
・It is. Further, this plane information is stored in absolute coordinates X and Y. Further, height information of the filter and illumination lamp is also stored in the storage unit 91 at the same time.

FIG. 12 shows a control routine of the microcomputer 85 when performing a leak test. First, in step 200, the measuring robot is set to filter 7 in manual mode.
Move to the block corresponding to the measurement start position No. 6 (the block labeled START in FIG. 11). In this state, when the mode is switched to automatic mode and the start switch 110 is turned on, the measuring robot automatically moves and moves the contact sensor 22 so as to come into contact with the frame 92 to detect the approximate position of the filter 76 (step 202). This approximate position can be detected by moving the contact sensor 22 along the contour of the filter and detecting the presence of frames corresponding to the short and long sides of the filter. Then, based on the approximate position of the filter, calculate the orientation of the measuring robot with respect to the filter, the distance from the current position of the measuring robot to the preset filter measurement start position, and control the drive vehicle based on the rotary encoder output. The robot moves to the filter starting position. That is, a frame corresponding to the long side and a frame corresponding to the short side of the filter of the measurement start block shown in FIG. 10 (1) are detected and compared with the absolute coordinates stored in the storage section 91. By doing this, it is possible to determine the orientation of the unmanned traveling trolley 10 with respect to the filter and the current position of the traveling trolley with respect to the detected frame, so that the robot can be moved in which direction and by how much to reach the filter starting position. can be calculated. In the next step 204, the contact sensor 22 is moved along the entire circumference of the frame so that it contacts the inner circumference of the frame, and the contact sensor 22 is moved along the entire circumference of the frame to correspond to each side of the frame of the measurement start block based on the output of the contact sensor 22. By finding the intersection of these straight lines, we find the coordinates corresponding to the corner of the frame of the measurement start block, and compare it with the data corresponding to the frame of the measurement start block stored in advance to determine the robot's position. Correct.

As a result, the outline of the frame of the measurement start block detected by the contact sensor 22 matches the outline of the frame of the measurement start block stored in advance in the filter arrangement data storage section 91. next step 206
Now, the tip of the cylindrical coordinate manipulator 12 and the filter 7
6 while maintaining a predetermined distance (for example, 2.5c+!+) with the probe 14 along the trajectory shown in FIG. Based on the dust meter 98 output, it is determined whether a leak has occurred. In the next step 208, it is determined whether or not the last filter leak measurement is to be performed based on the data indicating the measurement order indicated by the broken line in FIG. If the measuring robot is not a filter, the measuring robot is moved to the next fixed position on the filter side in step 210, and then the process returns to step 102. If the measuring robot is the last filter, this routine is ended.

Note that a gas sensor for detecting toxic gas, etc. may be installed inside the unmanned traveling trolley 10 to measure the environment of the clean room, so that it can be used as a monitor for daily management of the clean room. It may also be used as a sensor to measure distance from the relative displacement.

Further, an example in which the measuring robot is run directly under the screen has been described, but fL< may be used directly under the screen as long as it is within the reach of the manipulator.

[Brief explanation of the drawing]

Figure 1 (1) is a front view of the measuring robot, Figure 1 (2) is a plan view of the measuring robot, Figure 1 (3) is a side view of the measuring robot, and Figure 2 (1) is a drive wheel and 2(2) is a sectional view taken along line I-1 in FIG. 2(i), and 3rd
The figure is a schematic diagram of the cylindrical coordinate manipulator, Figure 4 (1) is a sectional view of the intersection of the horizontal arm and the vertical arm, Figure 4 (2) is a sectional view taken along the line ■-■ of Figure 4 (1), Figure 4 (3)
is a perspective view of the intersection of the vertical arm and the horizontal arm, Figure 5 is a schematic diagram of the contact sensor, Figure 6 is a diagram showing the three axes of cylindrical coordinates and the scanning locus of the probe, and Figure 7 is the inside of the measuring robot. 8 is a perspective view of a device for remotely controlling the measurement robot and analyzing data, FIG. 9 is a plan view of the operation box, and FIG. 10 (1)
), (2) are a plan view and side view of one block of filters surrounded by a frame, Figure 11 is a plan view of a group of filters placed on the ceiling where a leak test is performed, and Figure 12 is a diagram when a leak test is performed. 2 is a flowchart of a control routine of FIG. DESCRIPTION OF SYMBOLS 10... Unmanned traveling trolley, 12... Cylindrical coordinate manipulator, 14... Probe, 18... Drive wheel, 20... Free wheel, 70... Contact member, 74... Tactile sensor.

Claims (2)

[Claims] (1) A first arm that extends in the Z-axis direction of cylindrical coordinates and is rotatable around the Z-axis; a first drive device that rotates the first arm; and the first arm. a second drive device that slides the guide member along the first arm; A manipulator comprising: a second arm provided on the guide member so as to be slidable in a direction perpendicular to the Z-axis; and a third drive device configured to slide the second arm in a direction perpendicular to the Z-axis. (2) The first arm is made of a non-magnetic cylindrical member, and the second drive device is made of a first magnet housed in the cylindrical member, and the first magnet is made of a non-magnetic cylindrical member. The manipulator according to claim (1), comprising: a moving device for moving the member in the axial direction; and a second magnet fixed to the guide member so as to face the first magnet.