JPH0770879B2 - Electronic component inspection device - Google Patents
Electronic component inspection deviceInfo
- Publication number
- JPH0770879B2 JPH0770879B2 JP61247207A JP24720786A JPH0770879B2 JP H0770879 B2 JPH0770879 B2 JP H0770879B2 JP 61247207 A JP61247207 A JP 61247207A JP 24720786 A JP24720786 A JP 24720786A JP H0770879 B2 JPH0770879 B2 JP H0770879B2
- Authority
- JP
- Japan
- Prior art keywords
- electronic component
- lead
- electronic
- inspection
- head
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Description
【発明の詳細な説明】 〔産業上の利用分野〕 この発明は、電子部品をプリント基板に実装する前工程
などで、電子部品のリードを検査するために用いる電子
部品の検査装置に関するものである。Description: BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electronic component inspection apparatus used for inspecting a lead of an electronic component in a pre-process of mounting the electronic component on a printed board. .
第６図は例えば実開昭60−189808号公報に示された従来
の電子部品の検査装置の斜視図である。第６図におい
て、１は検査される電子部品であり、電子部品１は４つ
の側辺の外周から複数のリード1aがそれぞれ突出してい
る平面矩形の薄板状のものである。２は電子部品１を着
脱可能に保持するための吸着ヘッドであり、吸着ヘッド
２は図示しない排気装置に接続されている。３は吸着ヘ
ッド２の下方に配設され、吸着ヘッド２を縦軸回りに旋
回させるためのモータ、４は吸着ヘッド２およびモータ
３が装着され、これらを水平に直線移動させるための移
動テーブル、５は移動テーブル４の移動量を検出するた
めの直線エンコーダ、６および７は吸着ヘッド２に保持
された電子部品１のリード1aの曲がりを検査するための
光ファイバおよびフォトセンサである。FIG. 6 is a perspective view of a conventional inspection apparatus for electronic parts disclosed in, for example, Japanese Utility Model Laid-Open No. 60-189808. In FIG. 6, reference numeral 1 denotes an electronic component to be inspected, and the electronic component 1 is a flat rectangular thin plate having a plurality of leads 1a protruding from the outer periphery of four sides. Reference numeral 2 denotes a suction head for detachably holding the electronic component 1, and the suction head 2 is connected to an exhaust device (not shown). 3 is a motor disposed below the suction head 2 for rotating the suction head 2 about the vertical axis, and 4 is a moving table for mounting the suction head 2 and the motor 3 for linearly moving them horizontally, Reference numeral 5 is a linear encoder for detecting the amount of movement of the moving table 4, and 6 and 7 are optical fibers and photosensors for inspecting the bending of the lead 1a of the electronic component 1 held by the suction head 2.
次に、以上のように構成された従来の電子部品の動作に
ついて説明する。電子部品１を吸着ヘッド２上に載置
し、吸着ヘッド２から排気して吸着ヘッド２に電子部品
１を吸着把持する。次に、移動テーブル４を適宜の手段
で直線移動させることで電子部品１を移動させ、これの
一側辺から突出した１番目のリード1aの先端部と光ファ
イバ６の先端面とが対向するように位置合せを行う。光
ファイバ６からリード1aの先端部に向って光を照射し、
その反射光の有無をフォトセンサ７で検出することで、
リード1aの上下方向の浮きを検出し、移動テーブル４に
よって電子部品１を移動させながら、この移動量を直線
エンコーダ５で検出し、リード1a先端部からの反射光の
有無をフォトセンサ７で検出することにより、リード1a
のピッチを検査する。また、モータ３によって吸着ヘッ
ド２に保持された電子部品１を90゜回転させ、他の側辺
から突出したリード1aの曲がり，ピッチの検査を上述し
た一側辺と同様にして行う。Next, the operation of the conventional electronic component configured as described above will be described. The electronic component 1 is placed on the suction head 2, exhausted from the suction head 2, and the suction head 2 suction-holds the electronic component 1. Next, the electronic table 1 is moved by linearly moving the moving table 4 by an appropriate means, and the tip part of the first lead 1a protruding from one side of this moves to the tip surface of the optical fiber 6. Align as follows. Light is emitted from the optical fiber 6 toward the tip of the lead 1a,
By detecting the presence or absence of the reflected light with the photo sensor 7,
The amount of movement of the lead 1a is detected by the linear encoder 5 while detecting the floating of the lead 1a in the vertical direction, and the movement amount of the electronic component 1 is moved by the moving table 4, and the presence or absence of the reflected light from the tip of the lead 1a is detected by the photo sensor 7. By lead 1a
Inspect the pitch. Further, the electronic component 1 held by the suction head 2 is rotated by 90 ° by the motor 3, and the bending and pitch of the leads 1a protruding from the other side are inspected in the same manner as the one side described above.
従来の電子部品の検査装置は、上述のように構成され、
光ファイバの先端面と電子部品のリード先端部との距離
が特定されており、特定寸法の電子部品しか検査でき
ず、また吸着ヘッド上に電子部品を置く際に吸着ヘッド
の中心に対する電子部品の位置ずれや、電子部品の回転
によるずれによって、光ファイバの先端面と電子部品の
リード先端部との距離が変化し、このため高精度のリー
ドの検査ができず、これはフラットパッケージ形の電子
部品をプリント基板に実装する工程においてリード間隔
ピッチが小さくなり、信頼性を確保しにくくなることに
つながるという問題点がある。さらに、リード先端部か
らの光の反射があるか否かによってリードの検査をして
いるため、リードの接合面から上下方向の浮き量は計測
できないという問題点があった。The conventional electronic component inspection device is configured as described above,
The distance between the tip surface of the optical fiber and the tip of the lead of the electronic component is specified, and only electronic components of a specific size can be inspected.When placing the electronic component on the suction head, The distance between the tip surface of the optical fiber and the tip of the lead of the electronic component changes due to misalignment or rotation of the electronic component, which prevents accurate inspection of the lead. In the process of mounting components on a printed circuit board, there is a problem that the lead pitch becomes small and it becomes difficult to secure reliability. Further, since the leads are inspected depending on whether or not light is reflected from the tip portions of the leads, there is a problem that the amount of floating in the vertical direction from the joint surface of the leads cannot be measured.
この発明は、上記のような問題点を解決するためになさ
れたあもので、寸法，形状が異なる多品種の電子部品の
リードを、これらのピッチと接合面からの浮き量とを高
精度に計測できる電子部品の検査装置を得ることを目的
としている。The present invention has been made in order to solve the above-mentioned problems, and it is possible to accurately measure leads of various types of electronic parts having different sizes and shapes, and to adjust the pitches and the amount of floating from the joint surface. The purpose is to obtain an inspection device for measurable electronic components.
この発明に係る電子部品の検査装置は、吸着ヘッドの両
側方に電子部品に押付ける少なくとも１組の相対向する
開閉可能な爪を配設した位置決め装置と、上記電子部品
の吸着ヘッドによる吸着面と傾斜した光軸上の電子部品
一側方および他側方に光源およびテレビカメラのような
リード撮像機を対向配置した画像計測装置とを備え、上
記撮像機を電子部品に対する距離調節可能に構成し、さ
らに画像計測装置で得た画像におけるリードの上下方向
及び左右方向の座標に基づきリードのピッチ及び浮き量
を計測し、この計測値と予めプログラムされたリードの
基準値とから制御装置によって電子部品の良否判定を行
うようにしたものである。An electronic component inspection apparatus according to the present invention comprises a positioning device having at least one pair of opposed openable claws which are pressed against the electronic component on both sides of the suction head, and a suction surface of the electronic component by the suction head. And an electronic component on the tilted optical axis, and an image measuring device in which a light source and a lead image pickup device such as a television camera are arranged facing each other on one side and the other side, and the image pickup device is configured so that the distance to the electronic component can be adjusted. In addition, the lead pitch and the floating amount are measured based on the vertical and horizontal coordinates of the lead in the image obtained by the image measuring device, and the control device electronically measures the lead pitch and the floating amount from the measured value and the pre-programmed reference lead value. The quality of the parts is determined.
この発明における電子部品の検査装置は、吸着ヘッドに
載置された電子部品を相対向する爪で対向側辺外側から
押付けて位置決めすることができ、これによって、電子
部品の吸着ヘッドに対する位置ずれや回転方向のずれを
なくすことができ、また光源と対向する撮像機を移動さ
せることで、撮像機の焦点を合せることができて、形状
寸法が異なる電子部品のリードを高精度に計測でき、さ
らに、電子部品の吸着ヘッドによる吸着面に対し光源お
よび光源に対向する撮像機の光軸を傾斜させたことで、
撮像機によって電子部品のリードのピッチだけではな
く、浮き量も画像として得られ、したがって、１台の撮
像機でリードのピッチと浮き量を同時に計測できる。The electronic component inspection apparatus according to the present invention can position the electronic component mounted on the suction head by pressing the electronic components from the outer side of the opposite side with the claws facing each other. It is possible to eliminate the deviation of the rotation direction, and by moving the imager facing the light source, it is possible to focus the imager, and it is possible to measure the leads of electronic components with different shape dimensions with high accuracy. By tilting the optical axis of the light source and the imaging device facing the light source with respect to the suction surface by the suction head of the electronic component,
Not only the lead pitch of the electronic component but also the floating amount can be obtained as an image by the image pickup device, so that the pitch of the lead and the floating amount can be simultaneously measured by one image pickup device.
以下、この発明の一実施例を第１図ないし第５図につい
て説明する。An embodiment of the present invention will be described below with reference to FIGS.
第１図ないし第５図において、第６図と同一符号は、同
一または相当部分を示す。第１図において、８はロボッ
トからなる搬送機構であり、この搬送機構８は、機台９
の後部上に配設した左右方向に直線往復動する第１アー
ム10と、このアーム10上に配設した前後方向に直線往復
動する第２アーム11と、第２アーム11の先端部に支持さ
れて上下方向に往復動する搭載ヘッド12とを備え、搭載
ヘッド12にこれを縦軸回りに90゜ずつ回転させる回転モ
ータ13が連結されている。なお、搭載ヘッド12は吸着ヘ
ッド２と同様に図示しない排気装置に接続されている。
14は機台９の高さの低い前部に設けた位置決め装置であ
り、位置決め装置14は、第２図にも示すように、相対向
する爪15,16の２組がモータ17,18によって回動するねじ
軸19,20の互いに反対方向のねじにそれぞれねじ嵌合さ
れ、爪15,16が図示しない固定部材にねじ軸19,20の軸方
向に沿う直線移動可能に係合されている。また、ねじ軸
19,20はx,y方向に互いに直交して立体交差され、さらに
一方の組の爪15は幅が広く、地方の組の爪16は幅が狭く
形成され、上端部が吸着ヘッド２の外側方にそれぞれ配
置されている。21,22は機台９の前部に設けた画像計測
装置であり、画像計測装置21,22は、第３図にも示すよ
うに、機台９上の位置決め装置14両側方に固定した支脚
23,24上部にねじ軸25,26が回転可能に架設され、ねじ軸
25,26に搭載台27,28がねじ嵌合され、ねじ軸25,26の外
端部にモータ29,30が連結され、モータ29,30の正逆回転
によってねじ軸25,26を介して位置決め装置14に対する
搭載台27,28の距離が調整されるように構成されてい
る。搭載台27,28上には工業用テレビカメラからなる撮
像機31,32が下向きに傾斜してそれぞれ固定され、撮像
機31,32と対向するランプからなる光源33,34が搭載台2
7,28に上向きに傾斜してそれぞれ固定され、光源33,34
の光軸35,36が吸着ヘッド２上に水平に吸着された電子
部品１のリード1a部を経て撮像機31,32の光軸と一致し
ている。なお、第１図中37は機台９の前後方向中間部上
に設けられた電子部品１の収納部、第２図中38は吸着ヘ
ッド２の排気管である。また、第４図において、39は撮
像機31,32の画像が映し出される監視用受像機であり、
制御装置に組込まれている。1 to 5, the same reference numerals as those in FIG. 6 indicate the same or corresponding portions. In FIG. 1, reference numeral 8 denotes a transfer mechanism including a robot, and this transfer mechanism 8 is a machine base 9
A first arm 10 disposed on the rear portion of the arm 10 that linearly reciprocates in the left-right direction, a second arm 11 disposed on the arm 10 that linearly reciprocates in the front-rear direction, and supported at the tip of the second arm 11. And a mounting head 12 that reciprocates in the vertical direction, and a rotation motor 13 that rotates the mounting head 12 by 90 ° about the vertical axis. The mounting head 12 is connected to an exhaust device (not shown) as in the suction head 2.
Reference numeral 14 denotes a positioning device provided on the front part of the machine base 9 having a low height. As shown in FIG. 2, the positioning device 14 includes two pairs of claws 15 and 16 facing each other by a motor 17 and 18, respectively. The rotating screw shafts 19 and 20 are screw-fitted in mutually opposite screws, and the claws 15 and 16 are engaged with a fixing member (not shown) so as to be linearly movable along the axial direction of the screw shafts 19 and 20. . Also, the screw shaft
19, 20 are three-dimensionally crossed at right angles to each other in the x and y directions. Further, one set of claws 15 has a wide width, and a local set of claws 16 has a narrow width, and the upper end portion is outside the suction head 2. It is arranged in each direction. 21 and 22 are image measuring devices provided in the front part of the machine base 9, and the image measuring devices 21 and 22 are supporting legs fixed to both sides of the positioning device 14 on the machine base 9 as shown in FIG.
The screw shafts 25 and 26 are rotatably installed on the upper part of the screw shafts 23 and 24.
The mounting bases 27 and 28 are screw-fitted to 25 and 26, the motors 29 and 30 are connected to the outer ends of the screw shafts 25 and 26, and the forward and reverse rotations of the motors 29 and 30 cause the screw shafts 25 and 26 to pass through. The distance between the mounting bases 27 and 28 with respect to the positioning device 14 is adjusted. On the mounts 27 and 28, image pickup devices 31 and 32, which are industrial TV cameras, are fixed by being inclined downward, and light sources 33 and 34 that are lamps facing the image pickup devices 31 and 32 are mounted on the mounts 2 and 28.
Light source 33,34
The optical axes 35 and 36 of the image pickup device 1 and the optical axes of the image pickup devices 31 and 32 pass through the lead 1a portion of the electronic component 1 horizontally attracted onto the suction head 2. Reference numeral 37 in FIG. 1 denotes a storage portion for the electronic component 1 provided on the intermediate portion of the machine base 9 in the front-rear direction, and reference numeral 38 in FIG. 2 denotes an exhaust pipe of the suction head 2. Further, in FIG. 4, 39 is a monitoring image receiver on which the images of the image pickup devices 31 and 32 are displayed,
It is built into the controller.
次に、以上のように構成された実施例の動作について説
明する。Next, the operation of the embodiment configured as described above will be described.
まず、搬送機構８によって収納部37に収納された第４図
に示す電子部品１の上面を搭載ヘッド12に吸着させ、電
子部品１を位置決め装置14の吸着ヘッド２上に搬入，載
置し、搭載ヘッド12による吸着を解除する。次に、位置
決め装置14のモータ17,18の正回転によって開いている
爪15,16をねじ軸19,20を介して閉方向に移動させ、電子
部品１の各側辺のリード1aを２組の対向する爪15,16で
両側からそれぞれ押付け、電子部品１の吸着ヘッド２に
対する位置ずれ、回転方向のずれを修正して電子部品１
を位置決めする。この場合に、位置決めされる電子部品
１の寸法は、第２図の２組の爪15,16のそれぞれの可動
範囲40,41で決定され、爪15に比べ爪16の幅が狭いの
で、多品種の電子部品に対応できる。その後、搭載ヘッ
ド12が電子部品１の上面を吸着把持する際、位置ずれ，
回転ずれを生じないよう電子部品１の下面を吸着ヘッド
２からの排気によって吸着ヘッド２上面に水平に吸着保
持し、搭載ヘッド12が電子部品１の上面に下降，吸着把
持した後、爪15,16による押付けおよび吸着ヘッド２に
よる吸着を解除した状態で搭載ヘッド12が、電子部品１
の形状寸法に応じ、画像計測装置21,22の撮像機31,32と
光源33,34の光軸35,36上に電子部品１のリード1aが位置
するように、電子部品１を移動させ、さらに電子部品１
の寸法に応じ画像計測装置21,22のモータ29,30の駆動に
よりねじ軸25,26を介して撮像機31,32を搭載台27,28と
共に光軸35,36方向に前後に移動させて焦点合せを行
う。２組の光軸35,36上のリード1aは光源33,34からの光
を遮断するために、撮像機31,32に陰影を結び、第４図
に示すように制御装置の監視用受像機39には、一方の撮
像機31の影像が上半部に、他方の撮像機32の影像が下半
部にそれぞれ映し出される。このため、電子部品１の対
向する両側辺のリード1aを同時に検査することができ
る。また、リード1aの第４図左右方向および上下方向の
座標を読取ることで、リードのピッチP1,P2…および浮
き量△h1,△h2…を同時に計測することができ、これら
の計測値と予めめプログラムされたピッチの基準値およ
び浮き量の許容値とを比較することで、リードの良否を
判定し、判定結果の出力を制御装置から取出すことがで
きる。そして、電子部品１の吸着ヘッド２による吸着面
と傾斜させた光軸上に、撮像機31,32と光源33,34とを対
向させて設置したので、１組の撮像機と光源で電子部品
１のリード1aのピッチとリードの接合面からの浮き量の
両方を検査できる。さらに、上記２側辺のリード1aの検
査を終った電子部品１を爪15,16による押付けおよび吸
着へッド２による吸着を解除した状態で、搭載ヘッド12
を回転をモータ13で90゜回転させることにより、残った
他の２側辺のリード1aの検査を上述した手順と同様にし
て検査できる。なお、検査後の電子部品１は、制御装置
の出力信号による搬送機構８の動作により、良品と不良
品とに分けて搬出する。First, the upper surface of the electronic component 1 shown in FIG. 4 stored in the storage unit 37 by the transport mechanism 8 is sucked by the mounting head 12, and the electronic component 1 is carried in and placed on the suction head 2 of the positioning device 14, The adsorption by the mounting head 12 is released. Next, the pawls 15 and 16 opened by the forward rotation of the motors 17 and 18 of the positioning device 14 are moved in the closing direction via the screw shafts 19 and 20, and two sets of leads 1a on each side of the electronic component 1 are set. By pressing the claws 15 and 16 facing each other from both sides, the positional deviation and the rotational direction deviation of the electronic component 1 with respect to the suction head 2 are corrected to correct the electronic component 1.
To position. In this case, the size of the electronic component 1 to be positioned is determined by the movable ranges 40 and 41 of the two sets of the claws 15 and 16 shown in FIG. 2, and the width of the claw 16 is narrower than that of the claw 15. Supports various types of electronic components. After that, when the mounting head 12 sucks and grips the upper surface of the electronic component 1, a positional deviation,
The lower surface of the electronic component 1 is sucked and held horizontally on the upper surface of the suction head 2 by evacuation from the suction head 2 so as not to cause rotational deviation, and the mounting head 12 descends onto the upper surface of the electronic component 1 and suction-holds the nails 15, In the state where the pressing by 16 and the suction by the suction head 2 are released, the mounting head 12
The electronic component 1 is moved so that the leads 1a of the electronic component 1 are located on the image pickup devices 31 and 32 of the image measuring devices 21 and 22 and the optical axes 35 and 36 of the light sources 33 and 34 according to the shape and dimensions of Further electronic components 1
By moving the motors 29 and 30 of the image measuring devices 21 and 22 according to the dimensions, the image pickup devices 31 and 32 are moved back and forth in the directions of the optical axes 35 and 36 together with the mounts 27 and 28 via the screw shafts 25 and 26. Focus on. The leads 1a on the two optical axes 35 and 36 shade the imaging devices 31 and 32 in order to block the light from the light sources 33 and 34, and as shown in FIG. On 39, the image of one image pickup device 31 is displayed in the upper half part, and the image of the other image pickup device 32 is displayed in the lower half part. Therefore, the leads 1a on both opposite sides of the electronic component 1 can be inspected at the same time. Further, by reading the coordinates of the lead 1a in the left-right direction and the up-down direction in FIG. 4, the lead pitches P 1 , P 2 ... And the floating amount Δh 1 , Δh 2 ... Can be measured at the same time. By comparing the measured value with the preprogrammed reference value of the pitch and the allowable value of the floating amount, it is possible to determine the quality of the lead and output the determination result from the control device. Then, since the image pickup devices 31, 32 and the light sources 33, 34 are installed so as to face each other on the optical axis that is inclined with respect to the suction surface of the suction head 2 of the electronic component 1, the electronic components are provided by one set of the image pickup device and the light source. It is possible to inspect both the pitch of the lead 1a and the floating amount from the joint surface of the lead. Further, with the electronic component 1 having been inspected for the leads 1a on the above-mentioned two sides being pressed by the claws 15 and 16 and the suction by the suction head 2, the mounting head 12 is released.
Is rotated by 90 degrees by the motor 13, the remaining two leads 1a on the two sides can be inspected by the same procedure as described above. The electronic component 1 after the inspection is carried out separately as a good product and a defective product by the operation of the transport mechanism 8 in response to the output signal of the control device.
この発明による検査装置は、電子部品の検査過程で、リ
ードのピッチおよび浮きの絶対量がわかるので、回路基
板の所定位置に精度よく電気部品を載置する電子部品搭
載装置に用いてもよい。The inspection apparatus according to the present invention can be used in an electronic component mounting apparatus that accurately mounts an electrical component at a predetermined position on a circuit board because the lead pitch and the absolute amount of floating can be known in the process of inspecting an electronic component.
また、この発明による検査装置は、対向する１組の側辺
のみからリードが突出した電子部品の場合は、搭載ヘッ
ドを回転させるモータなどの機構を省くことができ、ま
たこの回転機構を用いて電子部品を90゜ずつ回動させ、
画像計測装置の光源およびリード撮像機を１組のみにし
てもよい。さらに上記撮像機は工業用テレビカメラに限
られるものではなく適宜のものを用いることができる。Further, the inspection apparatus according to the present invention can omit a mechanism such as a motor for rotating the mounting head in the case of an electronic component in which leads are projected from only one pair of opposite sides, and the rotation mechanism is used. Rotate the electronic parts by 90 degrees,
The image measuring device may include only one light source and one lead imager. Further, the image pickup device is not limited to the industrial television camera, and an appropriate device can be used.
以上説明したように、この発明によれば、吸着ヘッドの
両側方に相対向させて開閉可能な爪を配設し、これらの
爪で電子部品を対向側辺外側から押付けて位置決めする
ようにしたので、電子部品を吸着ヘッドに対し高精度に
位置決めして吸着保持させることができ、また光源と対
向する撮像機を移動させることで、撮像機の焦点を合せ
ることができるので、形状寸法が異なる電子部品のリー
ドを高精度に計測でき、さらに電子部品の吸着ヘッドに
よる吸着面に対し光源および撮像機の光軸を傾斜させた
ので、１台の撮像機によって電子部品のリードのピッチ
と浮き量を同時に計測できるという効果が得られる。As described above, according to the present invention, the claws that are openable and closable are provided on both sides of the suction head so as to face each other, and the electronic components are pressed by the claws from the outer side of the opposite side and positioned. Therefore, the electronic component can be accurately positioned and held by suction with respect to the suction head, and the image pickup device can be focused by moving the image pickup device facing the light source. The lead of the electronic component can be measured with high accuracy, and the light source and the optical axis of the image pickup device are tilted with respect to the suction surface of the suction head of the electronic component. The effect of being able to measure simultaneously is obtained.
【図面の簡単な説明】 第１図はこの発明の一実施例による電子部品の検査装置
を示す斜視図、第２図は同位置決め装置の斜視図、第３
図は撮像機と光源との正面図、第４図は監視用受像機の
正面図、第５図は電子部品の平面図、第６図は従来の電
子部品の検査装置を示す斜視図である。 １……電子部品、1a……リード、２……吸着ヘッド、８
……搬送機構、12……搭載ヘッド、13……回転モータ、
14……位置決め装置、15,16……爪、17,18……モータ、
19,20……ねじ軸、21,22……画像計測装置、25,26……
ねじ軸、27,28……搭載台、29,30……モータ、31,32…
…撮像機、33,34……光源、39……監視用受像機。 なお、図中同一符号は同一または相当部分を示す。BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a perspective view showing an electronic component inspection apparatus according to an embodiment of the present invention, FIG. 2 is a perspective view of the positioning apparatus, and FIG.
FIG. 4 is a front view of an image pickup device and a light source, FIG. 4 is a front view of a surveillance image receiver, FIG. 5 is a plan view of electronic components, and FIG. 6 is a perspective view showing a conventional inspection device for electronic components. . 1 ... Electronic parts, 1a ... Lead, 2 ... Suction head, 8
…… Transport mechanism, 12 …… Mounting head, 13 …… Rotating motor,
14 …… Positioning device, 15,16 …… Pawl, 17,18 …… Motor,
19,20 …… Screw shaft, 21,22 …… Image measuring device, 25,26 ……
Screw shaft, 27,28 …… Mounting base, 29,30 …… Motor, 31,32…
… Imaging machine, 33,34 …… Light source, 39 …… Surveillance receiver. The same reference numerals in the drawings indicate the same or corresponding parts.
───────────────────────────────────────────────────── フロントページの続き (72)発明者 水野 修児 兵庫県尼崎市塚口本町８丁目１番１号 三 菱電機株式会社生産技術研究所内 (56)参考文献 特開 昭59−46179（ＪＰ，Ａ) 特開 昭60−148196（ＪＰ，Ａ) 特開 昭60−155325（ＪＰ，Ａ) ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Shuji Mizuno 8-1-1 Tsukaguchihonmachi, Amagasaki City, Hyogo Prefecture Sanryo Electric Co., Ltd. Production Technology Laboratory (56) Reference JP-A-59-46179 (JP, 59-46179) A) JP-A-60-148196 (JP, A) JP-A-60-155325 (JP, A)
Claims (5)
の一面を吸着保持する吸着ヘッドの両側方に上記電子部
品に押付けて位置決めする少なくとも１組の相対向した
開閉可能な爪を配設した位置決め装置と、上記吸着ヘッ
ドに対し電子部品を出し入れする搬送機構と、上記電子
部品の吸着ヘッドによる吸着面と傾斜した光軸上に電子
部品の一側方に配置した光源および電子部品の他側方に
電子部品との距離調整可能に配置したリード撮像機を対
向配置した画像計測装置と、この画像計測装置で得た画
像におけるリードの上下方向及び左右方向の座標に基づ
きリードのピッチ及び浮き量を計測し、この計測値と予
めプログラムされた上記リードの基準値とから電子部品
の複数のリードの同時良否判定の出力をする制御装置と
を備えたことを特徴とする電子部品の検査装置。1. At least one pair of openable and closable claws opposed to each other for pressing and positioning the electronic component on one side of an adsorption head that adsorbs and holds one surface of an electronic component having a plurality of leads protruding from the side. A positioning device, a transport mechanism for taking electronic components in and out of the suction head, a light source and an electronic component arranged on one side of the electronic component on an optical axis inclined with respect to the suction surface of the electronic component by the suction head. An image measuring device with a lead imager arranged sideways so that the distance to the electronic components can be adjusted, and the lead pitch and float based on the vertical and horizontal coordinates of the lead in the image obtained by this image measuring device. It is provided with a control device for measuring the quantity and outputting the simultaneous pass / fail judgment of a plurality of leads of the electronic component from the measured value and the pre-programmed reference value of the lead. Inspection apparatus for electronic parts that.
対向させて２組設け、電子部品の対向する側辺から突出
したリードを同時に検査するものである特許請求の範囲
第１項に記載の電子部品の検査装置。2. The image measuring apparatus according to claim 1, wherein two sets of light sources and lead imagers are provided so as to face each other, and the leads protruding from opposite sides of the electronic component are inspected at the same time. Inspection device for the electronic parts described.
ねじ軸の軸方向に移動する搭載台に固定してある特許請
求の範囲第１項または第２項に記載の電子部品の検査装
置。3. The inspection of the electronic component according to claim 1 or 2, wherein the lead photographing device is fixed to a mounting base that moves in the axial direction of the screw shaft by the rotation of the screw shaft. apparatus.
閉する２組の相対向した爪を有している特許請求の範囲
第１項、第２項または第３項に記載の電子部品の検査装
置。4. The inspection of the electronic component according to claim 1, 2, or 3, wherein the positioning device has two sets of facing claws that open and close in directions orthogonal to each other. apparatus.
上で90゜ずつ回動する搭載ヘッドを有している特許請求
の範囲第１項、第２項、第３項または第４項に記載の電
子部品の検査装置。5. The carrying device according to claim 1, 2, 3 or 4, wherein the carrying device has a mounting head for picking up an electronic component and rotating by 90 ° on the picking head. Inspection device for electronic parts described in.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61247207A JPH0770879B2 (en) | 1986-10-17 | 1986-10-17 | Electronic component inspection device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61247207A JPH0770879B2 (en) | 1986-10-17 | 1986-10-17 | Electronic component inspection device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63102294A JPS63102294A (en) | 1988-05-07 |
| JPH0770879B2 true JPH0770879B2 (en) | 1995-07-31 |
Family
ID=17160038
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61247207A Expired - Lifetime JPH0770879B2 (en) | 1986-10-17 | 1986-10-17 | Electronic component inspection device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0770879B2 (en) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02269943A (en) * | 1989-04-11 | 1990-11-05 | Mitsubishi Electric Corp | Outward appearance inspecting device for semiconductor device |
| JP3366244B2 (en) | 1998-02-04 | 2003-01-14 | 富士通株式会社 | Electronics |
| FR2787184B1 (en) * | 1998-12-15 | 2001-01-19 | Cogema | METHOD FOR MONITORING PERPENDICULARITY OF A CYLINDRICAL PART, SUCH AS A NUCLEAR FUEL PELLET |
| US6621566B1 (en) * | 2000-10-02 | 2003-09-16 | Teradyne, Inc. | Optical inspection system having integrated component learning |
| CN104897053A (en) * | 2014-03-05 | 2015-09-09 | 泰科电子(上海)有限公司 | Programmable digital machine vision detection platform |
| CN111829948A (en) * | 2019-04-17 | 2020-10-27 | 台达电子工业股份有限公司 | Electronic component detection system and method |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5946179A (en) * | 1982-09-09 | 1984-03-15 | 株式会社日立製作所 | Recognizer for chip part |
| JPS60148196A (en) * | 1984-01-13 | 1985-08-05 | 日本電気株式会社 | Apparatus for producing semiconductor device |
| JPS60155325A (en) * | 1984-01-20 | 1985-08-15 | Sanyo Electric Co Ltd | Positioner of electronic parts |
-
1986
- 1986-10-17 JP JP61247207A patent/JPH0770879B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63102294A (en) | 1988-05-07 |
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