JP2674795B2 - Clean room measurement robot - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial field of application] The present invention relates to a clean room measurement robot, and particularly, an unattended leak test of an air filter (HEPA filter) arranged in a clean room and an air cleanliness test in the clean room. Clean room measurement robot that can do

[Conventional technology]

For HEPA filters placed on the ceiling or wall of a clean room, generally, air that does not pass through the filter material is leaking from the filter surface, and air is leaking from the seam around the filter mounting frame. It is necessary to perform a leak test such as whether or not it is not. When attempting to perform this leak test manually, the operator must be able to reach a certain speed (5c
(m / sec or less), it is necessary to scan the entire surface of the filter while maintaining the distance between the sampling tube (probe) and the filter at a predetermined distance (within 2.5 cm). Will require. In addition, although the air cleanliness test in the clean room is also performed using the above-mentioned probe, since humans are the largest source of dust in the clean room,
This deteriorates the measurement accuracy and adversely affects the maintenance of cleanliness.

For this reason, conventionally, an inspection device that performs a leak test and a cleanliness test using an unmanned traveling vehicle that travels autonomously has been proposed. This inspection device provides a guideline on the running floor, while detecting this guideline with a sensor, the unmanned traveling vehicle is run along the guideline and stopped immediately below the filter, and the image sensor detects the presence of the filter,
After aligning the XY table that moves up and down with the filter frame, the filter surface is scanned with a probe provided on the XY table to perform a leak test or the like.

[Problems to be solved by the invention]

However, the conventional inspection device has a problem that the workability is poor because the guideline is required to be attached to the floor surface when the unmanned traveling vehicle travels.

The present invention has been made to solve the above problems, and an object of the present invention is to provide a clean room measurement robot capable of running an unmanned traveling cart and performing a test without the need for attaching a guideline. To do.

[Means for solving the problem]

In order to achieve the above-mentioned object, the present invention provides an unmanned traveling vehicle, a manipulator mounted on the unmanned traveling vehicle, a storage unit for storing arrangement information of a plurality of filters arranged in a clean room, and a traveling distance of the unmanned traveling vehicle. An unmanned vehicle for the filter by detecting a distance sensor, a measurement probe attached to the manipulator, a contact sensor attached to the manipulator, and controlling the manipulator to move the contact sensor along the contour of the filter. And a control means for driving and controlling the manipulator while controlling the traveling of the unmanned traveling vehicle based on the placement information of the filter, the traveling distance of the unmanned traveling vehicle, and the orientation of the unmanned traveling vehicle. It is composed.

[Action]

A manipulator is mounted on the unmanned traveling vehicle of the present invention, and a probe for measurement and a contact sensor are attached to the manipulator. The judging means judges the direction of the unmanned traveling vehicle with respect to the filter by controlling the manipulator and moving the contact sensor along the contour of the filter. Usually, the vertical and horizontal lengths of the filter are different, so that the direction of the traveling vehicle with respect to the filter can be determined by detecting the contour of the filter. Then, by controlling the traveling of the unmanned traveling vehicle based on the placement information of the filter, the traveling distance of the unmanned traveling vehicle, and the direction of the unmanned traveling vehicle, it is possible to cause the unmanned traveling vehicle to travel just below all the filters. . Further, a test such as a leak test of the filter can be performed by stopping the unmanned traveling vehicle just below the filter and controlling the manipulator to move the probe along a predetermined locus.

〔The invention's effect〕

As described above, according to the present invention, the traveling control of the unmanned traveling vehicle can be performed based on the filter arrangement information stored in advance, so that the guideline is not required and the test can be performed with good workability. Can be

〔Example〕

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

As shown in FIGS. 1 (1), (2), and (3), on the upper surface side of the autonomously traveling unmanned vehicle 10 equipped with a pair of driving wheels 18 and a pair of free wheels 20, a vertical line is provided. A cylindrical coordinate manipulator 12 in which a rotatable vertical arm 48 and a horizontal arm 50 attached to the vertical arm and movable in the horizontal direction and the vertical direction are arranged orthogonally, that is, a manipulator having three degrees of freedom is attached. There is. At the tip of the horizontal arm 50 of the cylindrical coordinate manipulator 12, a probe 14 for a leak test and a probe 16 for a cleanliness test are fixed. A contact sensor 22 is attached to a distal end of the probe 14, and a proximal end is connected to a dust remover (not shown) having a built-in suction device disposed in the unmanned traveling vehicle 10 via a flexible pipe 24. ing. Flexible pipe 24
It can be removed from the probe 14 and connected to the probe 16. The probe 16 for measuring cleanliness is provided with a temperature / humidity sensor 26 for detecting temperature and humidity, a wind speed sensor 28 for detecting airflow, and a laser displacement sensor 29 for measuring displacement to an object to be measured. . An emergency stop button 32 for stopping the unmanned traveling vehicle 10 in an emergency is provided on the upper surface of the unmanned traveling vehicle 10. In addition, 30 is a wiring.

As shown in FIGS. 2A and 2B, the drive wheel 18 is mounted on an axle 34 rotatably supported about a vertical shaft 38 extending in a vertical direction. The axle 34 is connected to a drive shaft of a servomotor 36 via a bevel gear 31. Therefore, by rotating the servo motor 36, the drive wheel 18 is rotated around the axle 34. Vertical axis 38
Has its base end fixed to the chassis 11 of the traveling vehicle and extends in the vertical direction.
It is connected to a drive shaft of a servomotor 42 via a bevel gear 33. Drive wheel 18, axle 34, bevel gears 31, 3
3, the worm gear 40 and the servomotors 36, 42 are mounted in one housing. Therefore, the servo motor
By rotating the housing 42, the housing rotates around the vertical axis 38, whereby the drive wheel 18 and the servomotors 36 and 42 rotate integrally in a horizontal plane. Each of the servo motor 36 and the servo motor 42 has a rotary encoder 41 (FIG. 7) for detecting the rotational position of the drive wheel 18 and a rotary encoder 35 (for a rotary encoder 35) for detecting the traveling distance of the unmanned traveling vehicle 10. 7) is attached. Swivel 20
It is composed of a caster or the like, and is rotatably attached to a tip of a support body 44 attached to the unmanned traveling vehicle 10 so as to be rotatable around a vertical line. As described above, since the unmanned traveling vehicle 10 is provided with the pair of drive wheels 18 and the pair of free wheels 20,
After the direction of the drive wheel 18 in the horizontal plane is controlled by rotating the servo motor 42, the drive wheel 18 is rotated to move the unmanned traveling vehicle 10 in an arbitrary linear direction and to perform a rotational motion.

Next, the cylindrical coordinate manipulator 12 will be described in detail with reference to FIGS. 3 and 4 (1), (2) and (3). The vertical arm 48 is configured by arranging a pair of non-magnetic stainless steel pipes 49 in parallel and fixing both ends with fixing members 53. Each of the fixing members 53 has a pulley
The pulley 54 is rotatably accommodated.
An endless timing belt 56 provided to pass through the inside of the pair of stainless steel pipes 49 is stretched. A movable magnet 58 accommodated in a stainless steel pipe 49 is attached to the timing belt 56. The base end of the vertical arm 48 is provided so as to protrude into the unmanned traveling vehicle 10 through a through hole 46 formed in the unmanned traveling vehicle 10.
The base end of the vertical arm 48 is connected to the drive shaft of the servomotor 62. Therefore, by rotating the servo motor 62, the vertical arm 48 can rotate around the vertical line. A drive shaft of a servomotor (not shown), whose drive shaft is orthogonal to the drive shaft of the servomotor 62, is connected to the rotation shaft of the pulley 54 projecting into the unmanned traveling vehicle 10. . Therefore, by rotating the servo motor, the movable magnet 58 can move in the vertical direction in the stainless steel pipe 49.

The guide member 52 is slidable with respect to the vertical arm 48.
Is installed. A pair of fixed magnets 60 are fixed to the guide member 52 at positions facing one of the stainless steel pipes 49 of the vertical arm 48 and the movable magnets 58 in the stainless steel pipes 49. The directions of the magnetic poles of the movable magnet 58 and the fixed magnet 60 are determined so that an attractive force acts between them. A horizontal arm 50 is attached to the guide member 52 so as to be orthogonal to the vertical arm 48 and slidable with respect to the guide member 52. The horizontal arm 50 is configured by arranging a pair of carbon fiber pipes 51 in parallel and fixing both ends with fixing members. The weight can be reduced by configuring the arm with a carbon fiber pipe. Therefore, as described above, when the movable magnet 58 is moved in the vertical direction, the fixed magnet 60 is moved in the vertical direction together with the movable magnet 58 by the attraction force, whereby the horizontal arm 50 can be moved in the vertical direction. On the side of the guide member 52 opposite to the side where the fixed magnet 60 is mounted, as shown in FIGS.
64 are installed. A drive transmission pulley 66 composed of a rubber roller or the like is attached to the rotation shaft of the servo motor 64 so as to penetrate a groove 68 formed in the guide member 52 and to be pressed against one of the carbon fiber pipes 51. I have. Since the carbon fiber pipe 51 is slidable with respect to the guide member 52,
By rotating the drive transmission pulley 66 by the servo motor 64 fixed to the guide member 52, the horizontal arm 50 can be moved in the horizontal direction. This manipulator 12 is detachably attached to the unmanned traveling vehicle 10 and disassembled during transportation to further facilitate transportation.

The contact sensor 22 arranged at the tip of the probe 14 includes a plurality of tactile sensors 74 including a pressure sensor fixed near the tip of the probe 14 as shown in FIG.
It comprises a ring-shaped contact 70 arranged so as to surround the tip of the probe 14 in a non-contact state with the probe 14, and a rod 72 connecting the contact 70 and each of the tactile sensors 74. When an object comes into contact with the contact 70 from the upper direction or the entire circumferential direction of the side, the contact pressure is increased through the rod 72 to the tactile sensor 74.
, It is possible to sense contact from the upper direction and the entire circumferential direction of the side portion. Also, the sensitivity can be increased by increasing the number of tactile sensors 74.

FIG. 6 shows three axes of the cylindrical coordinate manipulator 12 (Z axis,
The cylindrical coordinate manipulator 12 is arranged so that the Z-axis points in the vertical direction and the R-axis points in the horizontal direction. The probe 14 attached to the tip of the cylindrical coordinate manipulator 12
Is placed directly under the filter attached to the ceiling surface, and the manipulator is controlled to scan the filter surface in a zigzag shape as shown in FIG. 6 while maintaining the distance between the tip of the probe 14 and the filter 76 at about 2.5 cm. Then, a leak test is performed. Although the Z-axis is oriented in the vertical direction, it may be oriented in the horizontal direction or another direction.

FIG. 7 schematically shows a control device housed in the unmanned traveling vehicle 10. The probe 14 is connected to a dust meter 98 including a flexible pipe 24 and a suction device 96. The number of dusts detected by the dust meter 98 and the temperature, humidity, and airflow detected by various sensors are input to the micro computer 85 and transmitted from the transmission / reception device 81 to a transmission / reception device provided outside the clean room. Micro computer
The contact sensor 22, the rotary encoder 35, the rotary encoder 41, the filter arrangement data storage unit 91, etc. are connected to the microcomputer 85, and the micro computer 85 outputs the contact sensor 22, the rotary encoders 35 and 41 according to a program stored in advance. Filter arrangement data storage unit 91 based on the
Detects the position of the unmanned traveling vehicle 10 with respect to the filter arrangement information stored in the vehicle, controls the braking device 77, the driving wheel 18, the servomotor 62, etc. to drive the unmanned traveling vehicle 10 and the manipulator 12, and performs a leak test and the like. Perform various tests.

FIG. 8 shows an apparatus for analyzing the detection data transmitted from the transceiver 81 during the automatic measurement of the above-mentioned clean room control robot. This apparatus comprises a transceiver 78 having an antenna 80 and a hand-held computer 84. It is composed of The handheld computer 84 includes a liquid crystal display 86 for displaying data and the like, a keyboard 88 for inputting data and the like, and a disk driver 90 for reading and writing data to and from a floppy disk as an external storage device. The transceiver 78 and the handheld computer 84 are connected by an RS-232C (EIA standard) cable 82.

Next, an operation box for manual operation will be described. As shown in FIG. 9, the operation box 78 includes an antenna 87, an emergency stop switch 102 for stopping the measurement robot in an emergency, a leak test (LEAK), and a cleanness test (C).
LEAN) and a selection switch 104 for selecting, a switching switch 106 for switching between automatic control (AUTO) and manual control (MANUAL), an alarm mode switch 108 for deciding whether or not the alarm generation mode is set, A start switch 110 for starting the operation of the measurement robot, and an origin position adjustment switch 112 for adjusting the origin position of the measurement robot and the filter arrangement information stored in the filter arrangement data storage unit 91 and acting as absolute coordinates in advance. , A stop switch 114 for stopping the measuring robot, a joystick 116 for remotely controlling the traveling direction of the measuring robot or the operation of the manipulator manually, and a switching switch 118 for washing the target to be remotely controlled by the joystick 116 (when WHEEL is set). Unmanned traveling vehicle 10, cylindrical coordinate manipulator for ARM 12), front and rear of unmanned traveling vehicle 10 (VE
RTICAL) or move the cylindrical coordinate manipulator 12 to Z
Selection switch 12 for selecting whether to move in the axial direction
0, a selection switch 122 for selecting whether to move the unmanned traveling vehicle 10 in the horizontal direction (HORIZONTAL) or to move the cylindrical coordinate manipulator 12 in the R-axis direction, and an unmanned traveling vehicle 1
Rotate 0 (CIRCLE) or cylindrical coordinate manipulator 12
A selection switch 124 and a power switch 126 are provided for selecting whether to rotate in the θ-axis direction.

FIGS. 10 (1), (2) and FIG. 11 show filter arrangement information to be stored in the filter arrangement data storage section 91. FIG. The filter 76 has a frame 92 as shown in FIG.
A plurality of (four in the figure) filters are arranged in one block surrounded by a frame 92 and arranged between them. The filter 76 is installed at a position of HPh from the floor surface, and an illuminating lamp 94 is installed at a necessary portion of the frame 92. This lamp 94 is at the height of OBh from the floor. Therefore, the length Fx of the one-block filter in the X direction, the length Fy of the one-block filter in the Y-axis (= 4HPy), the frame
The width Wx of the frame 92 in the X-axis direction and the width Wy of the frame 92 in the Y-axis direction are
It is stored as one unit as plane information shown in FIG. In the normal case, Fx ₁ = Fx ₂ =..., Fy ₁ = Fy ₂ =.
Wx ₁ = Wx ₂ ..., Wy ₁ = Wy ₂ =. The plane information is stored as absolute coordinates X and Y. Further, the height information of the filters and the illumination lights is also stored in the storage unit 91 at that time.

FIG. 12 shows a control routine of the microcomputer 85 when performing a leak test. First, in step 200, the unmanned traveling vehicle 10 is moved to the block corresponding to the measurement start position of the filter 76 (block shown as start in FIG. 11) in the manual mode. When the automatic switch is switched to the automatic mode in this state and the start switch 110 is turned on, the unmanned vehicle 10 automatically travels to move the contact sensor 22 so as to contact the frame 92 and detect the approximate position of the filter 76 (step 202). This approximate position can be detected by moving the contact sensor 22 along the contour of the filter and detecting the presence of a frame corresponding to the short side and the long side of the filter. Then, based on the approximate position of the filter, the orientation of the unmanned traveling vehicle 10 with respect to the filter, the distance from the current position of the unmanned traveling vehicle 10 to the preset filter measurement start position, and the driving vehicle based on the rotary encoder output. The unmanned traveling vehicle 10 is caused to travel to the filter start position by controlling. That is,
By detecting the frame corresponding to the long side and the frame corresponding to the short side of the filter of the measurement start block shown in FIG. 10 (1) and comparing them with the absolute coordinates stored in the storage unit 91, unmanned traveling It is possible to determine the direction of the carriage 10 with respect to the filter and the current position of the traveling carriage with respect to the detected frame, and therefore to calculate in which direction and by how much, the unmanned traveling carriage 10 can reach the filter start position. can do. In the next step 204, the contact sensor 22 is moved along the entire circumference of the frame so that the contact sensor 22 comes into contact with the inner circumference of the frame, and each side of the frame of the measurement start block is corresponded based on the output of the contact sensor 22. Then, the coordinates corresponding to the corners of the frame of the measurement start block are obtained by finding the intersection points of these straight lines, and compared with the data stored in advance corresponding to the frame of the measurement start block and the unmanned traveling cart Ten
Correct the position of. As a result, the contour of the frame of the measurement start block detected by the contact sensor 22 matches the contour of the frame of the measurement start block previously stored in the filter placement data storage unit 91. In the next step 206, the probe 14 is scanned in a zigzag manner along the trajectory shown in FIG. 6 while keeping the interval between the tip of the cylindrical coordinate manipulator 12 and the filter 76 at a predetermined distance (for example, 2.5 cm). It is determined by the 96 whether or not a leak has occurred based on the output of the dust meter 98 when sucked through the probe 14. In the next step 208, it is judged whether or not the leak measurement of the last filter is carried out based on the data stored in advance in the filter arrangement data storage section 91, which shows the measurement order shown by the broken line in FIG. 11, and it is not the last filter. At step 210, the unmanned vehicle 10 is moved to the next filter measuring position and then the process returns to step 102. When the last filter is measured, this routine is completed.

In addition, a gas sensor for detecting toxic gas or the like may be provided in the unmanned traveling vehicle 10 and the environment of the clean room may be measured to be used as a monitor for daily management of the clean room. May be used as a sensor for measuring the distance from the relative displacement with respect to. Further, the example in which the measurement robot is run directly under the screen has been described, but the measurement robot may not be directly under the screen as long as the manipulator can reach it.

[Brief description of the drawings]

FIG. 1 (1) is a front view of the measurement robot, FIG. 1 (2) is a plan view of the measurement robot, FIG. 1 (3) is a side view of the measurement robot, and FIG. FIG. 2 (2) is a cross-sectional view taken along line II of FIG. 2 (1), FIG. 3 is a schematic view of a cylindrical coordinate manipulator, FIG. 4 (1).
Is a cross-sectional view of the intersection between the horizontal arm and the vertical arm.
FIG. 2B is a sectional view taken along the line II-II of FIG. 4A, FIG. 4C is a perspective view of an intersection between a vertical arm and a horizontal arm,
FIG. 5 is a schematic view of the contact sensor, FIG. 6 is a diagram showing the three axes of the cylindrical coordinates and the scanning locus of the probe, FIG. 7 is a schematic view of the control circuit housed in the measurement robot, and FIG. Is a perspective view of an apparatus for remotely scanning the measurement robot and analyzing the data, FIG. 9 is a plan view of the operation box, and FIGS. 10 (1) and 10 (2) are one block filters surrounded by a frame. FIG. 11 is a plan view and a side view, FIG. 11 is a plan view of a filter group arranged on a ceiling for performing a leak test, and FIG. 12 is a flow chart of a control routine for performing the leak test. 10 ... unmanned traveling cart, 12 ... cylindrical coordinate manipulator, 14 ... probe, 18 ... drive wheel, 20 ... free wheel, 70 ... contact member, 74 tactile sensor.

Front page continued (72) Inventor Takashi Manabu 8-21-1, Ginza, Chuo-ku, Tokyo Inside the Takenaka Corporation Tokyo main store (72) Inventor Hideo Takahashi 1-18-22 Nishiki, Naka-ku, Nagoya-shi, Aichi Takenaka Corporation Nagoya Branch (72) Inventor Kenichi Unno 2-5-14 Minamisuna, Koto-ku, Tokyo Inside Takenaka Corporation Technical Research Institute (72) Inventor Keita Yamazaki 2-5 Minamisuna, Koto-ku, Tokyo No. 14 Incorporated Takenaka Corporation Technical Research Institute (72) Inventor Minoru Kato 1-10-6 Omorinaka, Ota-ku, Tokyo Zestec Co., Ltd. (56) Bibliography Sho 60-159305 (JP, U)

Claims (1)

(57) [Claims] 1. An unmanned traveling vehicle, a manipulator mounted on the unmanned traveling vehicle, a storage means for storing arrangement information of a plurality of filters arranged in a clean room, and a distance sensor for detecting a traveling distance of the unmanned traveling vehicle. , A measurement probe mounted on the manipulator, a contact sensor mounted on the manipulator, and a judgment for controlling the manipulator to move the contact sensor along the contour of the filter to determine the orientation of the unmanned vehicle with respect to the filter. A clean room measurement robot that includes means for controlling the travel of the unmanned vehicle based on the placement information of the filter, the travel distance of the unmanned vehicle and the orientation of the unmanned vehicle, and a control means for driving and controlling the manipulator.