JP2001231242A - Linear dc motor conveyance apparatus - Google Patents

Linear dc motor conveyance apparatus

Info

Publication number
JP2001231242A
JP2001231242A JP2000038658A JP2000038658A JP2001231242A JP 2001231242 A JP2001231242 A JP 2001231242A JP 2000038658 A JP2000038658 A JP 2000038658A JP 2000038658 A JP2000038658 A JP 2000038658A JP 2001231242 A JP2001231242 A JP 2001231242A
Authority
JP
Japan
Prior art keywords
permanent magnet
linear
track
magnet
motor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000038658A
Other languages
Japanese (ja)
Inventor
Motonori Inagaki
元紀 稲垣
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shinko Electric Co Ltd
Original Assignee
Shinko Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shinko Electric Co Ltd filed Critical Shinko Electric Co Ltd
Priority to JP2000038658A priority Critical patent/JP2001231242A/en
Publication of JP2001231242A publication Critical patent/JP2001231242A/en
Pending legal-status Critical Current

Links

Landscapes

  • Linear Motors (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide a linear DC motor conveyance apparatus capable of ensuring high efficiency by reducing the clearance between a permanent magnet and a linear DC motor and shortening working time necessary for assembling work at low cost. SOLUTION: This apparatus attracts and retains a magnetic flat plate with a prescribed thickness which is a protective cover for permanent magnet forming magnetic fields on a track thereof, by means of the magnetic force of the permanent magnet, thereby protecting the permanent magnet.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】この発明は、搬送物を無人搬
送するリニア直流モータ搬送機に関し、特に永久磁石界
磁を磁性体被覆したリニア直流モータ搬送機に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a linear DC motor carrier for unmanned conveyance of articles, and more particularly to a linear DC motor carrier having a permanent magnet field coated with a magnetic material.

【0002】[0002]

【従来の技術】クリーンルーム等で被加工物(例えば、
複数のシリコンウエーハを収容したウエーハカセット)
を搬送するとき、省力化と汚染防止のため、無人搬送機
が使用されることが多い。予め搬送ルートが固定され、
搬送後の載置位置が高精度であることを要求されるとき
は、天井付近に搬送軌道を敷設し、この軌道に永久磁石
を配設して界磁とし、軌道に吊り下げ、もしくは軌道に
跨座した搬送機に組み込んだ電機子との間でリニア直流
モータを形成して搬送することが行われる。
2. Description of the Related Art Workpieces (for example, in a clean room)
Wafer cassette containing multiple silicon wafers)
When transporting paper, unmanned transporters are often used to save labor and prevent contamination. The transport route is fixed in advance,
When the placement position after transport is required to be high precision, a transport track is laid near the ceiling, permanent magnets are arranged on this track to make it a field, and it is suspended on the track or A linear DC motor is formed and conveyed to and from an armature incorporated in a straddled conveyor.

【0003】図4は、軌道1と搬送機16の外観斜視図
である。また、図5及び図6は軌道とリニア直流モータ
(以下、リニアモータと略称する)周りの構造を示す説
明図である。搬送機16に組み込まれたリニアモータ
(電機子)5を駆動することによって鉛直下向きに取り
付けられた永久磁石3による界磁との間に推進力が発生
する。
FIG. 4 is an external perspective view of the track 1 and the transporter 16. FIGS. 5 and 6 are explanatory views showing the structure around a track and a linear DC motor (hereinafter abbreviated as a linear motor). By driving the linear motor (armature) 5 incorporated in the transfer device 16, a propulsion force is generated between the linear motor (armature) 5 and the field generated by the permanent magnet 3 mounted vertically downward.

【0004】従って、永久磁石3とリニアモータ5との
ギャップ長(空隙)は、できる限り短い(狭い)ことが
望ましいが、両者が接触してどちらかが損傷を受けるこ
とを避けるために、また、外観上の観点から永久磁石3
に保護用として磁石カバー14を設けている。この保護
カバー14は、非磁性材料の曲げ加工品を用い、磁石保
持材2にネジで取り付けている。
Accordingly, it is desirable that the gap length (gap) between the permanent magnet 3 and the linear motor 5 be as short (narrow) as possible. From the viewpoint of appearance, the permanent magnet 3
Is provided with a magnet cover 14 for protection. The protective cover 14 is formed by bending a non-magnetic material, and is attached to the magnet holding member 2 with screws.

【0005】[0005]

【発明が解決しようとする課題】ところが上述の方法で
は、曲げ加工を精密に行うことが困難で丸みを持ち、ま
た磁石中央で膨らみを生じてしまうので、リニアモータ
のモールド面とのギャップ長(空隙)を大きくとらざる
を得ず、効率的でないという課題があった。また、磁石
カバーは非磁性材料の曲げ加工品をネジ止めで取り付け
る構造なので、取付作業に時間がかかり、コストが高く
なってしまうという課題があった。また、軌道の分岐等
のため、磁石の配置が不連続となったとき、磁石カバー
とリニアモータとが接触して互いに損傷を受ける心配が
あるという課題があった。
However, in the above-mentioned method, it is difficult to perform bending precisely, and the method has roundness and swells at the center of the magnet. There is a problem that the gap has to be large and inefficient. In addition, since the magnet cover has a structure in which a bent product made of a non-magnetic material is attached with screws, there is a problem in that it takes a long time to attach the magnet cover and the cost increases. Further, when the arrangement of the magnets becomes discontinuous due to a branch of the track or the like, there is a problem that the magnet cover and the linear motor may be in contact with each other and may be damaged.

【0006】本発明はこのような背景の下になされたも
ので、磁石カバーの材質を磁性体平板として永久磁石の
磁力によってこの磁石カバーを吸引、保持して固定する
ことにより、リニアモータとの間の空隙を確実に確保で
き、接触による損傷を回避できるとともに、その分だけ
空隙を小さくして効率アップを図ることができ、低コス
トで取り付け作業に要する作業時間を短くすることがで
きるリニア直流モータ搬送機を提供することを目的とす
る。
SUMMARY OF THE INVENTION The present invention has been made under such a background. The material of the magnet cover is made of a magnetic flat plate, and the magnet cover is attracted, held and fixed by the magnetic force of a permanent magnet so that it can be connected to a linear motor. A linear DC that can reliably secure the gap between them, avoid damage due to contact, and reduce the gap by that amount to improve efficiency, and reduce the time required for installation work at low cost. An object is to provide a motor carrier.

【0007】[0007]

【課題を解決するための手段】請求項1に記載の発明
は、リニア直流モータ搬送機の軌道の界磁を形成する永
久磁石の保護カバーであって、所定板厚の磁性平板を前
記永久磁石の磁力により吸引、保持して固定することに
よって前記永久磁石を保護することを特徴とするリニア
直流モータ搬送機を提供する。
According to a first aspect of the present invention, there is provided a protective cover for a permanent magnet for forming a field of a track of a linear DC motor carrier, wherein the magnetic flat plate having a predetermined thickness is formed by the permanent magnet. A linear DC motor carrier, wherein the permanent magnet is protected by being attracted, held and fixed by the magnetic force.

【0008】[0008]

【発明の実施の形態】以下、この発明の一実施形態につ
いて図を参照しながら説明する。図1はこの発明の一実
施形態によるリニアモータ搬送機の構成を示す分解斜視
図である。図1において、符号1は軌道であり、天井付
近に敷設されている。この軌道1の下面には、磁石保持
材2を介して永久磁石3が取り付けられている。この永
久磁石3は図2に示すように交互に逆極性の磁極をもつ
ようになっている。さらに、この永久磁石3の保護のた
めの磁石カバー4が設けられている。
DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described below with reference to the drawings. FIG. 1 is an exploded perspective view showing a configuration of a linear motor carrier according to an embodiment of the present invention. In FIG. 1, reference numeral 1 denotes a track, which is laid near a ceiling. A permanent magnet 3 is attached to the lower surface of the track 1 via a magnet holding material 2. As shown in FIG. 2, the permanent magnets 3 have magnetic poles of alternately opposite polarities. Further, a magnet cover 4 for protecting the permanent magnet 3 is provided.

【0009】軌道1には、前出の図4に示すように搬送
機16が吊り下げられ、この搬送機16の上部には図1
に示すリニアモータ(電機子)5が実装され、このリニ
アモータ(電機子)5からの駆動によって前記永久磁石
3との間に推進力を発生させる。
A conveyor 16 is suspended from the track 1 as shown in FIG.
Is mounted, and driving from the linear motor (armature) 5 generates a propulsion force between the linear motor and the permanent magnet 3.

【0010】以下、永久磁石3を保護する本発明の一実
施形態による磁石カバー4について説明する。この磁石
カバー4には永久磁石3を覆う寸法の磁性平板を用い、
永久磁石3の磁力によって吸引、保持、固定されて永久
磁石3を保護する役割をもつ。このようにして固定され
た磁石カバー4と永久磁石3及びリニアモータ(電機
子)5の断面図を図3に示す。
Hereinafter, a magnet cover 4 for protecting the permanent magnet 3 according to an embodiment of the present invention will be described. For the magnet cover 4, a magnetic flat plate having a size to cover the permanent magnet 3 is used.
It is attracted, held and fixed by the magnetic force of the permanent magnet 3 and has a role of protecting the permanent magnet 3. FIG. 3 shows a sectional view of the magnet cover 4, the permanent magnet 3, and the linear motor (armature) 5 fixed in this manner.

【0011】磁石カバー4に使用される磁性平板には、
錆等の発生防止のため磁性ステンレス板を用いることが
望ましいが、磁性体であれば鉄板などでもよく、板厚も
0.3mm程度の薄板で充分目的を達することができ
る。このように磁石カバー4として磁性平板を使用する
ことにより、漏れ磁束が5%程度増加するが、磁石カバ
ー4は永久磁石3と密着するため、永久磁石3とリニア
モータ5との空隙を確実に確保しながら接触を回避で
き、さらにギャップ長(間隔)を短く(狭く)すること
が期待できる。
The magnetic flat plate used for the magnet cover 4 includes:
It is desirable to use a magnetic stainless steel plate in order to prevent the occurrence of rust and the like, but an iron plate or the like may be used as long as it is a magnetic material, and a thin plate having a thickness of about 0.3 mm can sufficiently achieve the purpose. The use of a magnetic flat plate as the magnet cover 4 increases the leakage magnetic flux by about 5%. However, since the magnet cover 4 is in close contact with the permanent magnet 3, the gap between the permanent magnet 3 and the linear motor 5 can be reliably formed. Contact can be avoided while securing the gap, and the gap length (interval) can be expected to be shortened (narrowed).

【0012】以上、本発明の一実施形態の動作を図面を
参照して詳述してきたが、本発明はこの実施形態に限ら
れるものではなく、本発明の要旨を逸脱しない範囲の設
計変更等があっても本発明に含まれる。例えば、実施形
態は吊り下げ式のリニア直流モータ搬送機の場合であっ
たが、軌道上に跨座して走行する形式の搬送機にも適用
できる。また、磁石カバーは、他の固定手段と併用する
ようにしてもよい。
The operation of one embodiment of the present invention has been described in detail with reference to the drawings. However, the present invention is not limited to this embodiment, and a design change or the like may be made without departing from the gist of the present invention. The present invention is also included in the present invention. For example, the embodiment is the case of the suspension type linear DC motor carrier, but the present invention is also applicable to a carrier of a type that runs while straddling a track. Further, the magnet cover may be used in combination with other fixing means.

【0013】[0013]

【発明の効果】これまでに説明したように、この発明に
よれば、永久磁石を保護する磁石カバーに板厚の薄い磁
性平板を用い、永久磁石の磁力によって吸引、保持、固
定するようにしたので、永久磁石と保護カバーとは密着
し、永久磁石とリニアモータとの間隔を狭くすることが
でき、効率の高いシステムとすることができるという効
果が得られる。また、加工精度を必要としない平板を永
久磁石に貼り付けるだけなので、加工及び取り付けコス
トを低減できるという効果が得られる。
As described above, according to the present invention, a thin magnetic flat plate is used for the magnet cover for protecting the permanent magnet, and the magnet is attracted, held, and fixed by the magnetic force of the permanent magnet. Therefore, the permanent magnet and the protective cover are in close contact with each other, and the distance between the permanent magnet and the linear motor can be reduced, so that an effect that a highly efficient system can be obtained can be obtained. In addition, since a flat plate that does not require processing accuracy is merely attached to the permanent magnet, the effect of reducing processing and mounting costs can be obtained.

【図面の簡単な説明】[Brief description of the drawings]

【図1】 本発明の一実施形態によるリニアモータ周り
の構成を示す分解斜視図。
FIG. 1 is an exploded perspective view showing a configuration around a linear motor according to an embodiment of the present invention.

【図2】 永久磁石の極性を示す説明図。FIG. 2 is an explanatory diagram showing the polarity of a permanent magnet.

【図3】 本発明の一実施形態による軌道とリニアモー
タ周りの構造を示す断面図。
FIG. 3 is a sectional view showing a track and a structure around a linear motor according to an embodiment of the present invention.

【図4】 軌道と搬送機の外観斜視図。FIG. 4 is an external perspective view of a track and a transporter.

【図5】 従来の技術による軌道とリニアモータ周りの
構成を示す分解斜視図。
FIG. 5 is an exploded perspective view showing a configuration around a track and a linear motor according to a conventional technique.

【図6】 従来の技術による軌道とリニアモータ周りの
構造を示す断面図。
FIG. 6 is a cross-sectional view showing a track and a structure around a linear motor according to a conventional technique.

【符号の説明】[Explanation of symbols]

1…軌道 2…磁石保持材 3…永久磁石 4…磁石カバー 5…リニアモータ(電機子) 14…磁石カバー 14a…取付穴 16…搬送機 DESCRIPTION OF SYMBOLS 1 ... Track 2 ... Magnet holding material 3 ... Permanent magnet 4 ... Magnet cover 5 ... Linear motor (armature) 14 ... Magnet cover 14a ... Mounting hole 16 ... Carrier

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 リニア直流モータ搬送機の軌道の界磁
を形成する永久磁石の保護カバーであって、 所定板厚の磁性平板を前記永久磁石の磁力により吸引、
保持して固定することによって前記永久磁石を保護する
ことを特徴とするリニア直流モータ搬送機。
1. A permanent magnet protection cover for forming a field of a track of a linear DC motor carrier, wherein a magnetic flat plate having a predetermined thickness is attracted by a magnetic force of the permanent magnet.
A linear DC motor carrier, wherein the permanent magnet is protected by holding and fixing.
JP2000038658A 2000-02-16 2000-02-16 Linear dc motor conveyance apparatus Pending JP2001231242A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000038658A JP2001231242A (en) 2000-02-16 2000-02-16 Linear dc motor conveyance apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000038658A JP2001231242A (en) 2000-02-16 2000-02-16 Linear dc motor conveyance apparatus

Publications (1)

Publication Number Publication Date
JP2001231242A true JP2001231242A (en) 2001-08-24

Family

ID=18562357

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000038658A Pending JP2001231242A (en) 2000-02-16 2000-02-16 Linear dc motor conveyance apparatus

Country Status (1)

Country Link
JP (1) JP2001231242A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006340492A (en) * 2005-06-01 2006-12-14 Sanyo Denki Co Ltd Linear motor
EP2843814A3 (en) * 2013-08-30 2016-03-09 Yamaha Hatsudoki Kabushiki Kaisha Cover for slider of linear conveyer, linear conveyer, slider assembly, and method of detaching cover from slider of linear conveyer
JP2017220982A (en) * 2016-06-03 2017-12-14 村田機械株式会社 Track traveling vehicle system, assembly method, and linear motor
JP2019154141A (en) * 2018-03-02 2019-09-12 株式会社日立産機システム Linear motor
JP2020054166A (en) * 2018-09-28 2020-04-02 日立グローバルライフソリューションズ株式会社 Linear motor, vibration damping device, and washing machine including them
KR20220020084A (en) * 2020-08-11 2022-02-18 현대엘리베이터주식회사 Linear motor and ropeless elevator system having the same

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0614521A (en) * 1992-06-25 1994-01-21 Hitachi Metals Ltd Magnetic circuit
JPH10146039A (en) * 1996-11-13 1998-05-29 Hitachi Metals Ltd Movable coil type linear motor
JP2002531042A (en) * 1998-11-18 2002-09-17 シーメンス リニア モーター システムズ ゲゼルシャフト ミット ベシュレンクテル ハフツング ウント コンパニ コマンディートゲゼルシヤフト Linear motor and secondary side member of linear motor

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0614521A (en) * 1992-06-25 1994-01-21 Hitachi Metals Ltd Magnetic circuit
JPH10146039A (en) * 1996-11-13 1998-05-29 Hitachi Metals Ltd Movable coil type linear motor
JP2002531042A (en) * 1998-11-18 2002-09-17 シーメンス リニア モーター システムズ ゲゼルシャフト ミット ベシュレンクテル ハフツング ウント コンパニ コマンディートゲゼルシヤフト Linear motor and secondary side member of linear motor

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006340492A (en) * 2005-06-01 2006-12-14 Sanyo Denki Co Ltd Linear motor
JP4708093B2 (en) * 2005-06-01 2011-06-22 山洋電気株式会社 Linear motor
EP2843814A3 (en) * 2013-08-30 2016-03-09 Yamaha Hatsudoki Kabushiki Kaisha Cover for slider of linear conveyer, linear conveyer, slider assembly, and method of detaching cover from slider of linear conveyer
JP2017220982A (en) * 2016-06-03 2017-12-14 村田機械株式会社 Track traveling vehicle system, assembly method, and linear motor
JP2019154141A (en) * 2018-03-02 2019-09-12 株式会社日立産機システム Linear motor
JP7092521B2 (en) 2018-03-02 2022-06-28 株式会社日立産機システム Linear motor and compressor
JP2020054166A (en) * 2018-09-28 2020-04-02 日立グローバルライフソリューションズ株式会社 Linear motor, vibration damping device, and washing machine including them
JP7099926B2 (en) 2018-09-28 2022-07-12 日立グローバルライフソリューションズ株式会社 Linear motors, vibration damping devices, and washing machines equipped with them
KR20220020084A (en) * 2020-08-11 2022-02-18 현대엘리베이터주식회사 Linear motor and ropeless elevator system having the same
KR102465547B1 (en) 2020-08-11 2022-11-11 현대엘리베이터주식회사 Linear motor and ropeless elevator system having the same

Similar Documents

Publication Publication Date Title
KR940006242A (en) Clean Room Transfer System
JP2008245475A (en) Movable coil type linear motor
DE69611700D1 (en) PERMANENT MAGNETIC ROTOR FOR AN ELECTRIC MOTOR
JPS607725A (en) Electromagnetic positioning device
JP2001231242A (en) Linear dc motor conveyance apparatus
JP2008508738A (en) Apparatus and process system for transporting substrates
KR100786737B1 (en) Work transporting device
EP2439836B1 (en) Linear motor and stage device
WO2023281687A1 (en) Position detector and linear conveyance device
JP2003070226A (en) Linear synchronous motor
JPH03223021A (en) Carrier device used in special environment
JP2547403B2 (en) Magnetic levitation transport device for vacuum equipment
JPS6146756A (en) Conveyor
JPS63174895A (en) Magnetic levitation type carrying manipulator
JP3015566B2 (en) AC magnetic levitation transfer device
JPH0585620A (en) Magnetically operable conveyor device for article
JP2004222419A (en) Linear motor
JPS6118305A (en) Conveying apparatus
KR20210104134A (en) Magnetic levitation system, carrier for magnetic levitation system, vacuum system, and method of transporting carrier
JP2804458B2 (en) Water magnetizer
WO2022091555A1 (en) Conveyance device
JPH0312057Y2 (en)
JP2000343472A (en) Workpiece transfer device
JPH02193504A (en) Transferring equipment of conveyor
JPH068344U (en) Magnetic levitation device

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20060713

RD04 Notification of resignation of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7424

Effective date: 20090507

RD04 Notification of resignation of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7424

Effective date: 20090501

RD02 Notification of acceptance of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7422

Effective date: 20090622

A711 Notification of change in applicant

Free format text: JAPANESE INTERMEDIATE CODE: A711

Effective date: 20091023

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A821

Effective date: 20091117

RD02 Notification of acceptance of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7422

Effective date: 20091117

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20100113

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20100202

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20100601