JPS6118305A - Conveying apparatus - Google Patents
Conveying apparatusInfo
- Publication number
- JPS6118305A JPS6118305A JP14017984A JP14017984A JPS6118305A JP S6118305 A JPS6118305 A JP S6118305A JP 14017984 A JP14017984 A JP 14017984A JP 14017984 A JP14017984 A JP 14017984A JP S6118305 A JPS6118305 A JP S6118305A
- Authority
- JP
- Japan
- Prior art keywords
- conveyance
- carriage
- passage
- magnetic fluid
- permanent magnet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K7/00—Arrangements for handling mechanical energy structurally associated with dynamo-electric machines, e.g. structural association with mechanical driving motors or auxiliary dynamo-electric machines
- H02K7/08—Structural association with bearings
- H02K7/09—Structural association with bearings with magnetic bearings
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
- H02K41/02—Linear motors; Sectional motors
- H02K41/025—Asynchronous motors
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Electromagnetism (AREA)
- Non-Mechanical Conveyors (AREA)
- Control Of Vehicles With Linear Motors And Vehicles That Are Magnetically Levitated (AREA)
- Linear Motors (AREA)
Abstract
Description
【発明の詳細な説明】
（イ）産業上の利用分野
本発明は搬送台を浮上させる方法として、搬送台と搬送
路との間に磁性流体を入れ、この磁性流体を搬送台内部
に設けた永久磁石で吸引するようにした搬送装置に関す
る。[Detailed Description of the Invention] (a) Industrial Application Field The present invention provides a method for levitating a conveyance table by inserting a magnetic fluid between the conveyance table and a conveyance path, and providing this magnetic fluid inside the conveyance table. The present invention relates to a conveying device that uses permanent magnets for attraction.
（ロ）従来技術
搬送台に車輪を使用しないタイプの搬送装置の従来例と
しては、例えば搬送台に設けたりニアモータの平板状の
可動子に、下方から圧縮空気を前記可動子に対応したテ
ーブルに設けた多数のノズルから噴射せしめ、搬送台を
浮上させながらリニアモータ固定子の励磁によって移動
させる搬送装置が知られている。(B) Prior Art Conventional examples of conveyance devices that do not use wheels on the conveyor table include, for example, a conveyor device installed on the conveyor table or a flat plate-shaped movable element of a near motor, and compressed air is supplied from below to a table corresponding to the movable element. A conveyance device is known in which the conveyance table is moved by excitation of a linear motor stator while floating the conveyance table by ejecting liquid from a large number of provided nozzles.
しかしながら、上記装置においては圧縮空気源を必要と
し、このため設備費用が高価となる。However, the above device requires a source of compressed air, which results in high equipment costs.
また、空気には送風ダクト等からの塵埃を含んでいるこ
とが゛多く、被搬送物が精密電子回路部品のように塵埃
を嫌うものである場合には、従来の搬送装置を使用する
ことは好ましくない。In addition, air often contains dust from ventilation ducts, etc., and if the object to be transported is something that dislikes dust, such as precision electronic circuit parts, it is not possible to use conventional transport devices. Undesirable.
（ハ）目的
本発明は上記事情にかんがみてなされたもので、搬送台
を浮上させるのに圧縮空気を必要としない搬送装置を提
供することを目的としている。(c) Purpose The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a conveying device that does not require compressed air to levitate a conveying platform.
（ニ）構成
本発明は搬送路内に磁性流体を所定量大れるとともに、
搬送台内部に磁石を設け、両者の磁力作用テもって、搬
送台を浮上させつつ移送するように構成している。(D) Structure The present invention includes a predetermined amount of magnetic fluid in the conveyance path, and
A magnet is provided inside the conveyance table, and the conveyance table is configured to be transferred while floating due to the magnetic force of both.
（ホ）実施例
第１図は本発明に係る搬送装置の一実施例を示す搬送台
の進行方向に直角に切った断面図である。(E) Embodiment FIG. 1 is a cross-sectional view taken at right angles to the direction of movement of the conveyor table, showing an embodiment of the conveyance apparatus according to the present invention.
図において、１は固定子で、この固定子１は公知のりニ
アモータに使用されるものと同しであり搬送台の進行方
向に沿って所定の間隔をおいて、フレームに複数個対に
なって定置されている。In the figure, 1 is a stator, and this stator 1 is the same as that used in a known linear motor. It is in place.
２はポスト５によってフレームに固設された断面が略コ
の字の形状の非磁性体からなる搬送路である。Reference numeral 2 denotes a conveying path made of a non-magnetic material and having a substantially U-shaped cross section, which is fixed to the frame by a post 5.
４は搬送台であって、図示するように前記搬送路２の上
部に跨座している。Reference numeral 4 denotes a conveyance table, which straddles the upper part of the conveyance path 2 as shown in the figure.
そして、その断面は略口の字の形状に形成されていて、
側面には下方に折れ曲がったフランジ部４１が形成され
ており、このフランジ部４１はリニアモータのリアクシ
ョンプレートとして作用するもので、導電性材料例えば
アルミニュウム又は銅板等で構成され、前記固定＋１と
搬送台の垂直壁の間隙に配置される。 そして、前記搬
送台４の内底部には永久磁石６が取りつけてあり、さら
に搬送台４の底部と搬送路２の底部の空間部分には所定
量の磁性流体７が前記永久磁石６の磁界の作用する場所
に置かれている。And its cross section is approximately shaped like a mouth.
A downwardly bent flange portion 41 is formed on the side surface, and this flange portion 41 acts as a reaction plate of the linear motor, and is made of a conductive material such as aluminum or copper plate, and is connected to the fixing +1 and the transport platform. placed in the gap between the vertical walls of the A permanent magnet 6 is attached to the inner bottom of the conveyance table 4, and a predetermined amount of magnetic fluid 7 is placed in the space between the bottom of the conveyance table 4 and the bottom of the conveyance path 2. placed in a place where it will work.
磁性流体３は例えばフェライト等の磁性微粒子の粒子表
面を長鎖不飽和脂肪酸で被覆し、界面活性剤を使って溶
液中に分散させたコロイド溶液で公知のものである。The magnetic fluid 3 is a well-known colloidal solution in which the surface of magnetic fine particles such as ferrite is coated with long-chain unsaturated fatty acids and dispersed in a solution using a surfactant.
なお、搬送台４の天板はテーブルであって、このテーブ
ル４１の上には図示しない被搬送物が置かれる。Note that the top plate of the transport platform 4 is a table, and an object to be transported (not shown) is placed on the table 41.
次ぎに、本発明に係る搬送装置の動作について説明する
。Next, the operation of the conveying device according to the present invention will be explained.
前記した磁性流体７は磁気的には永久磁気モーメントを
もった分子の集合体であり、超常磁性の性質をもってい
るので、搬送台の内底部に設けた永久磁石６により発生
する磁界の影響によって磁性流体７は磁化される結果、
搬送台がリニアモータの駆動力により進行するにさいし
て、前記永久磁石とともに移動することとなる。Magnetically speaking, the magnetic fluid 7 described above is an aggregate of molecules with a permanent magnetic moment and has superparamagnetic properties, so it becomes magnetic due to the influence of the magnetic field generated by the permanent magnet 6 installed at the inner bottom of the carrier. As a result of the fluid 7 being magnetized,
When the conveyance table moves by the driving force of the linear motor, it moves together with the permanent magnet.
また、磁性流体７は特に容器にいれなくても、永久磁石
により常に吸引されているので、分散することなく、恰
も水銀のようにひと塊となって、移動する。Furthermore, even if the magnetic fluid 7 is not placed in a container, it is always attracted by the permanent magnet, so it does not disperse and moves as a lump, just like mercury.
さらに、磁性流体の量を適当に選ぶことにより、前記搬
送台を搬送路の垂直壁の頂部に当たらないように離隔せ
しめることとなる。Furthermore, by appropriately selecting the amount of magnetic fluid, the conveyance platform can be spaced apart from hitting the top of the vertical wall of the conveyance path.
もう一つの実施例として、第２．３図を示すことができ
る。As another example, FIG. 2.3 can be shown.
第２図では、永久磁石６は搬送台４の内側壁に２個取り
つけてあり、また磁性流体７は前記永久磁石７の位置に
対応して搬送路２の垂直壁と前記搬送台４の内側壁との
空間に置くようにする。In FIG. 2, two permanent magnets 6 are attached to the inner wall of the conveyor table 4, and the magnetic fluid 7 is attached to the vertical wall of the conveyor path 2 and the inner side of the conveyor table 4 in correspondence with the positions of the permanent magnets 7. Place it in a space between it and the wall.
第３図では、永久磁石６を搬送台４の内側壁に２個取り
つけてあり、また磁性流体７は前記永久磁石７の位置に
対応して搬送路２の垂直壁と前記搬送台４の内側壁との
空間に置くとともに、第１図にあるごとく、搬送路の底
部と搬送台の底部の空間に置くとともに、永久磁石を搬
送台の内底部に設けである。In FIG. 3, two permanent magnets 6 are attached to the inner wall of the conveyor table 4, and the magnetic fluid 7 is attached to the vertical wall of the conveyor path 2 and the inner side of the conveyor table 4 in correspondence with the positions of the permanent magnets 7. It is placed in the space between the wall and the space between the bottom of the conveyance path and the bottom of the conveyance table as shown in FIG. 1, and a permanent magnet is provided at the inner bottom of the conveyance table.
搬送台の速度制御・停止等の制御手段は周知のものであ
り、詳細説明は省略する。Control means for speed control, stopping, etc. of the conveyance platform are well known, and detailed explanation will be omitted.
また、上記の説明は両側駆動方式のりニアモータを使用
する場合につき述べたが、片側駆動方式のものであって
も良い。Further, although the above description has been made regarding the case where a linear motor of both-side drive type is used, a one-sided drive type linear motor may be used.
（へ）効果
本山によるときは、搬送路上に磁性流体を所定量大れる
のみで搬送台を搬送路から浮上させることができるので
、従来の圧縮空気の浮上手段に比して極めて簡便に浮上
させることができ、設備費用、維持費用等の面において
優れており、特にりリーンルーム内に於ける搬送装置と
して好適なものである。(f) Effect According to the present invention, it is possible to levitate the conveyor platform from the conveyor path simply by adding a predetermined amount of magnetic fluid onto the conveyor path, which makes levitation much easier than with conventional compressed air flotation means. It is excellent in terms of equipment cost, maintenance cost, etc., and is particularly suitable as a conveying device in a lean room.
第１図は本発明に係る搬送装置の一実施例を示す断面図
、第２図と第３図は本発明の他の実施例の断面図である
。
１ ・・・固定子、２ ・・・搬送路、４ ・・・搬送
台、５ ・・・ポスト、６ ・・・永久磁石、７ ・・
・磁性流体。
特許出願人 日立機電工業株式会社
代理人 弁理士 大 西 孝 治
第１図
第２図
第３図
手続補正書（自発）
昭和５９年 ９月 ６日
３、補正をする者
６、補正により増加する発明の数 ０８、補
正の内容
（１） 明細書中、特許請求の範囲を別紙の通り補正
する。
（２）同書第３頁第１８行目〜同第１９行目の「断面が
略コの字の形状の」を「溝状断面の」と補正する。
（３）同書第４頁第８行目の「搬送台ｊをｒ搬送路」と
補正する。
（４）同書第４頁第１４行目の「磁性流体３」を「磁性
流体７」と補正する。
（５）同書第５頁第１７行目の「第２．３図ｊを「第２
図」と補正する。
（６）同書第５頁第１９行目〜第６頁第２行目の「第２
図では、・・・にする。」を削除する。
（７）同書第６頁第３行目の「第３図では、Ｊを「第２
図では、」と補正する。
（８）同書第６頁第５行目の「磁石７」を「磁石６」と
補正する。
（９）同書第６頁第１６行目の「本山」をｒ本発明」と
補正する。
００）同書第７頁第５行目の「第２図と第３図」をｒ第
２図Ｊと補正する。
（ｌυ 図面を別紙の通り補正する。
２、特許請求の範囲
（１）搬送台の側面をリアクションプレートとし、該リ
アクションプレートとリアクションプレートに対向して
設けた固定子とからなるリニアモータを用いた搬送装置
において、ヂ′生 ｒをνて宅２成ユαζ溝１及逝１酊
をｊ−ＬＡ□搬送路と、該搬送路に跨座せしめた搬送台
と、前記搬送路と搬送台の間にある磁性流体と、前記搬
送台の内部に設けた永久磁石とを具備しており、且つ搬
送台が常に磁性流体により搬送路から浮上されつつ、移
送されるようにしたことを１）８＠とする搬送装置。
（２）前記永久磁石は搬送台の底部に設けてあることを
特徴とする請求
送装置。FIG. 1 is a cross-sectional view showing one embodiment of a conveying device according to the present invention, and FIGS. 2 and 3 are cross-sectional views of other embodiments of the present invention. 1...Stator, 2...Transportation path, 4...Transportation table, 5...Post, 6...Permanent magnet, 7...
・Magnetic fluid. Patent applicant Hitachi Kiden Kogyo Co., Ltd. Agent Patent attorney Takaharu Ohnishi Figure 1 Figure 2 Figure 3 Procedural amendment (voluntary) September 6, 1980 3, person making the amendment 6, increase due to amendment Number of inventions: 08, Contents of amendment (1) The claims in the specification are amended as shown in the attached sheet. (2) "Having a substantially U-shaped cross section" in lines 18 to 19 of page 3 of the same book is corrected to "having a groove-shaped cross section." (3) Correct the 8th line of page 4 of the same book to read ``transfer platform j is r transport path''. (4) "Magnetic fluid 3" on page 4, line 14 of the same book is corrected to "magnetic fluid 7." (5) In the same book, page 5, line 17, “Figure 2.3 j is
Correct it to ``Figure''. (6) “Second line of page 5, line 19 to page 6, line 2 of the same book
In the figure,... ” to be deleted. (7) In the same book, page 6, line 3, “In Figure 3, J is
In the figure, it is corrected as ". (8) "Magnet 7" on page 6, line 5 of the same book is corrected to "magnet 6." (9) "Motoyama" on page 6, line 16 of the same book is amended to read "r present invention." 00) Correct "Figures 2 and 3" in the 5th line of page 7 of the same book to rFigure 2J. (lυ The drawing has been amended as per the attached sheet. 2. Scope of Claims (1) The side surface of the conveyance platform is a reaction plate, and a linear motor consisting of the reaction plate and a stator provided opposite to the reaction plate is used. In the conveyance device, the conveyance path, the conveyance table that is placed astride the conveyance path, and the connection between the conveyance path and the conveyance table. 1) 8. The magnetic fluid in between and a permanent magnet provided inside the conveyance table are provided, and the conveyance table is always floated from the conveyance path by the magnetic fluid while being transferred. Conveyance device with @. (2) A billing device, characterized in that the permanent magnet is provided at the bottom of a conveyance table.
Claims (3)
アクションプレートとリアクションプレートに対向して
設けた固定子とからなるリニアモータを用いた搬送装置
において、非磁性体でもって形成した断面略コの字形状
の搬送路と、該搬送路に跨座せしめた搬送台と、前記搬
送路と搬送台の間にある磁性流体と、前記搬送台の内部
に設けた永久磁石とを具備しており、且つ搬送台が常に
磁性流体により搬送路から浮上されつつ、移送されるよ
うにしたことを特徴とする搬送装置。(1) In a conveyance device using a linear motor, which has a reaction plate on the side surface of the conveyance table and a stator provided opposite to the reaction plate, the cross section is approximately U-shaped and made of non-magnetic material. The apparatus includes a shaped conveyance path, a conveyance table placed astride the conveyance path, a magnetic fluid between the conveyance path and the conveyance table, and a permanent magnet provided inside the conveyance table, and A conveyance device characterized in that the conveyance table is always floated from a conveyance path by a magnetic fluid while being conveyed.
特徴とする実用新案登録請求の範囲第１項記載の搬送装
置。(2) The conveyance device according to claim 1, wherein the permanent magnet is provided at the bottom of the conveyance table.
特徴とする実用新案登録請求の範囲第１項記載の搬送装
置。(3) The conveyance device according to claim 1, wherein the permanent magnet is provided on a side surface of the conveyance table.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14017984A JPS6118305A (en) | 1984-07-05 | 1984-07-05 | Conveying apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14017984A JPS6118305A (en) | 1984-07-05 | 1984-07-05 | Conveying apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6118305A true JPS6118305A (en) | 1986-01-27 |
Family
ID=15262729
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14017984A Pending JPS6118305A (en) | 1984-07-05 | 1984-07-05 | Conveying apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6118305A (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63123719A (en) * | 1986-11-11 | 1988-05-27 | Seibu Electric & Mach Co Ltd | Conveying device |
| US4805761A (en) * | 1987-07-14 | 1989-02-21 | Totsch John W | Magnetic conveyor system for transporting wafers |
| US4877123A (en) * | 1987-11-02 | 1989-10-31 | Ichiro Fukuwatari | Conveyor means for wafers |
| US6183615B1 (en) | 1992-06-26 | 2001-02-06 | Tokyo Electron Limited | Transport system for wafer processing line |
| KR100895899B1 (en) | 2007-12-13 | 2009-05-04 | 한국기계연구원 | Magnetically levitated vehicle system using linear switched reluctance motor and halbach array |
| CN109039007A (en) * | 2018-09-03 | 2018-12-18 | 北京航空航天大学 | The microvibration-preventing flexibility micro-displacement of magnetic fluid driving adjusts platform |
-
1984
- 1984-07-05 JP JP14017984A patent/JPS6118305A/en active Pending
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63123719A (en) * | 1986-11-11 | 1988-05-27 | Seibu Electric & Mach Co Ltd | Conveying device |
| JPH0545490B2 (en) * | 1986-11-11 | 1993-07-09 | Seibu Electric & Machinery Co | |
| US4805761A (en) * | 1987-07-14 | 1989-02-21 | Totsch John W | Magnetic conveyor system for transporting wafers |
| US4877123A (en) * | 1987-11-02 | 1989-10-31 | Ichiro Fukuwatari | Conveyor means for wafers |
| US6183615B1 (en) | 1992-06-26 | 2001-02-06 | Tokyo Electron Limited | Transport system for wafer processing line |
| KR100895899B1 (en) | 2007-12-13 | 2009-05-04 | 한국기계연구원 | Magnetically levitated vehicle system using linear switched reluctance motor and halbach array |
| CN109039007A (en) * | 2018-09-03 | 2018-12-18 | 北京航空航天大学 | The microvibration-preventing flexibility micro-displacement of magnetic fluid driving adjusts platform |
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