JPH0440033U - - Google Patents

Info

Publication number
JPH0440033U
JPH0440033U JP8304790U JP8304790U JPH0440033U JP H0440033 U JPH0440033 U JP H0440033U JP 8304790 U JP8304790 U JP 8304790U JP 8304790 U JP8304790 U JP 8304790U JP H0440033 U JPH0440033 U JP H0440033U
Authority
JP
Japan
Prior art keywords
movable arm
branch
magnetic levitation
magnetically
space
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8304790U
Other languages
English (en)
Japanese (ja)
Other versions
JP2562958Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1990083047U priority Critical patent/JP2562958Y2/ja
Publication of JPH0440033U publication Critical patent/JPH0440033U/ja
Application granted granted Critical
Publication of JP2562958Y2 publication Critical patent/JP2562958Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Non-Mechanical Conveyors (AREA)
  • Control Of Vehicles With Linear Motors And Vehicles That Are Magnetically Levitated (AREA)
JP1990083047U 1990-08-04 1990-08-04 磁気浮上搬送装置の可動アーム装置 Expired - Lifetime JP2562958Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990083047U JP2562958Y2 (ja) 1990-08-04 1990-08-04 磁気浮上搬送装置の可動アーム装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990083047U JP2562958Y2 (ja) 1990-08-04 1990-08-04 磁気浮上搬送装置の可動アーム装置

Publications (2)

Publication Number Publication Date
JPH0440033U true JPH0440033U (cs) 1992-04-06
JP2562958Y2 JP2562958Y2 (ja) 1998-02-16

Family

ID=31630392

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990083047U Expired - Lifetime JP2562958Y2 (ja) 1990-08-04 1990-08-04 磁気浮上搬送装置の可動アーム装置

Country Status (1)

Country Link
JP (1) JP2562958Y2 (cs)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6045023A (ja) * 1983-08-23 1985-03-11 Shimada Phys & Chem Ind Co Ltd プラズマ処理装置
JPH01117041A (ja) * 1987-10-29 1989-05-09 Ulvac Corp 真空中に於ける磁気浮上式交差搬送装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6045023A (ja) * 1983-08-23 1985-03-11 Shimada Phys & Chem Ind Co Ltd プラズマ処理装置
JPH01117041A (ja) * 1987-10-29 1989-05-09 Ulvac Corp 真空中に於ける磁気浮上式交差搬送装置

Also Published As

Publication number Publication date
JP2562958Y2 (ja) 1998-02-16

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Legal Events

Date Code Title Description
R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

EXPY Cancellation because of completion of term