JP2555801Y2 - ロータリー式可変コンダクタンスバルブ - Google Patents
ロータリー式可変コンダクタンスバルブInfo
- Publication number
- JP2555801Y2 JP2555801Y2 JP5792589U JP5792589U JP2555801Y2 JP 2555801 Y2 JP2555801 Y2 JP 2555801Y2 JP 5792589 U JP5792589 U JP 5792589U JP 5792589 U JP5792589 U JP 5792589U JP 2555801 Y2 JP2555801 Y2 JP 2555801Y2
- Authority
- JP
- Japan
- Prior art keywords
- shaft
- lid
- valve
- rotation
- shutter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000007246 mechanism Effects 0.000 claims description 10
- 230000005540 biological transmission Effects 0.000 claims description 8
- 230000000149 penetrating effect Effects 0.000 claims description 3
- 239000004020 conductor Substances 0.000 claims 1
- 239000007789 gas Substances 0.000 description 39
- 239000012530 fluid Substances 0.000 description 3
- 239000012495 reaction gas Substances 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000011553 magnetic fluid Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Sliding Valves (AREA)
- Control Of Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5792589U JP2555801Y2 (ja) | 1989-05-19 | 1989-05-19 | ロータリー式可変コンダクタンスバルブ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5792589U JP2555801Y2 (ja) | 1989-05-19 | 1989-05-19 | ロータリー式可変コンダクタンスバルブ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02149406U JPH02149406U (OSRAM) | 1990-12-20 |
| JP2555801Y2 true JP2555801Y2 (ja) | 1997-11-26 |
Family
ID=31583078
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5792589U Expired - Lifetime JP2555801Y2 (ja) | 1989-05-19 | 1989-05-19 | ロータリー式可変コンダクタンスバルブ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2555801Y2 (OSRAM) |
-
1989
- 1989-05-19 JP JP5792589U patent/JP2555801Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH02149406U (OSRAM) | 1990-12-20 |
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