JP2554424Y2 - 内周刃砥石 - Google Patents
内周刃砥石Info
- Publication number
- JP2554424Y2 JP2554424Y2 JP1989034901U JP3490189U JP2554424Y2 JP 2554424 Y2 JP2554424 Y2 JP 2554424Y2 JP 1989034901 U JP1989034901 U JP 1989034901U JP 3490189 U JP3490189 U JP 3490189U JP 2554424 Y2 JP2554424 Y2 JP 2554424Y2
- Authority
- JP
- Japan
- Prior art keywords
- inner peripheral
- grindstone
- cutting
- base metal
- abrasive layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000002093 peripheral effect Effects 0.000 claims description 31
- 239000010953 base metal Substances 0.000 claims description 23
- 239000002184 metal Substances 0.000 claims description 3
- 238000007747 plating Methods 0.000 claims description 3
- 238000005520 cutting process Methods 0.000 description 26
- 235000012431 wafers Nutrition 0.000 description 22
- 239000006061 abrasive grain Substances 0.000 description 8
- 239000000463 material Substances 0.000 description 8
- 230000000873 masking effect Effects 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000006866 deterioration Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 229920002120 photoresistant polymer Polymers 0.000 description 3
- 229910003460 diamond Inorganic materials 0.000 description 2
- 239000010432 diamond Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000004904 shortening Methods 0.000 description 2
- 230000000087 stabilizing effect Effects 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 239000000110 cooling liquid Substances 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Landscapes
- Polishing Bodies And Polishing Tools (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1989034901U JP2554424Y2 (ja) | 1989-03-28 | 1989-03-28 | 内周刃砥石 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1989034901U JP2554424Y2 (ja) | 1989-03-28 | 1989-03-28 | 内周刃砥石 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH02126762U JPH02126762U (enrdf_load_stackoverflow) | 1990-10-18 |
JP2554424Y2 true JP2554424Y2 (ja) | 1997-11-17 |
Family
ID=31539781
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1989034901U Expired - Lifetime JP2554424Y2 (ja) | 1989-03-28 | 1989-03-28 | 内周刃砥石 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2554424Y2 (enrdf_load_stackoverflow) |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5821039B2 (ja) * | 1975-09-26 | 1983-04-26 | 株式会社東芝 | 内周刃型ダイヤモンドブレ−ド |
-
1989
- 1989-03-28 JP JP1989034901U patent/JP2554424Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH02126762U (enrdf_load_stackoverflow) | 1990-10-18 |
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