JP2553199Y2 - 力変換素子 - Google Patents

力変換素子

Info

Publication number
JP2553199Y2
JP2553199Y2 JP1991113507U JP11350791U JP2553199Y2 JP 2553199 Y2 JP2553199 Y2 JP 2553199Y2 JP 1991113507 U JP1991113507 U JP 1991113507U JP 11350791 U JP11350791 U JP 11350791U JP 2553199 Y2 JP2553199 Y2 JP 2553199Y2
Authority
JP
Japan
Prior art keywords
type
single crystal
force
conversion element
output
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1991113507U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0557856U (ja
Inventor
健志 森川
厚志 塚田
裕 野々村
義輝 大村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyota Central R&D Labs Inc
Original Assignee
Toyota Central R&D Labs Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyota Central R&D Labs Inc filed Critical Toyota Central R&D Labs Inc
Priority to JP1991113507U priority Critical patent/JP2553199Y2/ja
Priority to EP92121789A priority patent/EP0548907B1/en
Priority to DE69209804T priority patent/DE69209804T2/de
Priority to US07/995,826 priority patent/US5341688A/en
Publication of JPH0557856U publication Critical patent/JPH0557856U/ja
Application granted granted Critical
Publication of JP2553199Y2 publication Critical patent/JP2553199Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/18—Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
JP1991113507U 1991-12-26 1991-12-26 力変換素子 Expired - Lifetime JP2553199Y2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP1991113507U JP2553199Y2 (ja) 1991-12-26 1991-12-26 力変換素子
EP92121789A EP0548907B1 (en) 1991-12-26 1992-12-22 Piezoresistive force transducer
DE69209804T DE69209804T2 (de) 1991-12-26 1992-12-22 Piezoresistiver Kraftwandler
US07/995,826 US5341688A (en) 1991-12-26 1992-12-23 Force transducer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1991113507U JP2553199Y2 (ja) 1991-12-26 1991-12-26 力変換素子

Publications (2)

Publication Number Publication Date
JPH0557856U JPH0557856U (ja) 1993-07-30
JP2553199Y2 true JP2553199Y2 (ja) 1997-11-05

Family

ID=14614085

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1991113507U Expired - Lifetime JP2553199Y2 (ja) 1991-12-26 1991-12-26 力変換素子

Country Status (4)

Country Link
US (1) US5341688A (enExample)
EP (1) EP0548907B1 (enExample)
JP (1) JP2553199Y2 (enExample)
DE (1) DE69209804T2 (enExample)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3317084B2 (ja) * 1995-03-31 2002-08-19 株式会社豊田中央研究所 力検知素子およびその製造方法
US6029528A (en) * 1998-08-17 2000-02-29 Tiffany And Company Earring force tester
US6915702B2 (en) * 2001-11-22 2005-07-12 Kabushiki Kaisha Toyota Chuo Kenkyusho Piezoresistive transducers
US7021154B2 (en) * 2002-09-24 2006-04-04 Kabushiki Kaisha Toyota Chuo Kenkyusho Force sensing element
JP4708711B2 (ja) * 2004-02-03 2011-06-22 株式会社デンソー 圧力センサ
US7441467B2 (en) * 2006-07-12 2008-10-28 Cts Corporation Compression strain sensor
EP2169375B1 (en) * 2008-09-30 2019-09-18 Ngk Spark Plug Co., Ltd. Piezoresistive pressure sensor
JP5268189B2 (ja) * 2008-12-11 2013-08-21 日本特殊陶業株式会社 圧力センサ
WO2013084294A1 (ja) * 2011-12-06 2013-06-13 株式会社日立製作所 力学量測定装置
JP5761536B2 (ja) * 2013-04-24 2015-08-12 横河電機株式会社 力変換素子
DE102015104410B4 (de) 2015-03-24 2018-09-13 Tdk-Micronas Gmbh Drucksensor

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4071838A (en) * 1976-02-09 1978-01-31 Diax Corporation Solid state force transducer and method of making same
EP0195232B1 (en) * 1985-03-20 1991-12-11 Hitachi, Ltd. Piezoresistive strain sensing device
JPH0682847B2 (ja) * 1987-07-31 1994-10-19 株式会社豊田中央研究所 力変換素子
US4993266A (en) * 1988-07-26 1991-02-19 Kabushiki Kaisha Toyota Chuo Kenkyusho Semiconductor pressure transducer
JPH0714069B2 (ja) * 1988-07-26 1995-02-15 株式会社豊田中央研究所 力変換素子の製造方法

Also Published As

Publication number Publication date
DE69209804T2 (de) 1996-11-28
JPH0557856U (ja) 1993-07-30
EP0548907A3 (enExample) 1994-02-16
EP0548907A2 (en) 1993-06-30
DE69209804D1 (de) 1996-05-15
US5341688A (en) 1994-08-30
EP0548907B1 (en) 1996-04-10

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Legal Events

Date Code Title Description
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 19970610