JP2550484Y2 - 基板処理装置間のインターフェイス装置 - Google Patents

基板処理装置間のインターフェイス装置

Info

Publication number
JP2550484Y2
JP2550484Y2 JP1990078099U JP7809990U JP2550484Y2 JP 2550484 Y2 JP2550484 Y2 JP 2550484Y2 JP 1990078099 U JP1990078099 U JP 1990078099U JP 7809990 U JP7809990 U JP 7809990U JP 2550484 Y2 JP2550484 Y2 JP 2550484Y2
Authority
JP
Japan
Prior art keywords
substrate
process device
interface device
storage unit
arm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1990078099U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0436225U (en, 2012
Inventor
正美 大谷
義二 岡
健男 岡本
義光 福冨
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dainippon Screen Manufacturing Co Ltd
Original Assignee
Dainippon Screen Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dainippon Screen Manufacturing Co Ltd filed Critical Dainippon Screen Manufacturing Co Ltd
Priority to JP1990078099U priority Critical patent/JP2550484Y2/ja
Priority to DE69113553T priority patent/DE69113553T2/de
Priority to EP91112250A priority patent/EP0468409B1/en
Priority to KR1019910012615A priority patent/KR950001754B1/ko
Publication of JPH0436225U publication Critical patent/JPH0436225U/ja
Priority to US08/080,652 priority patent/US5308210A/en
Application granted granted Critical
Publication of JP2550484Y2 publication Critical patent/JP2550484Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1990078099U 1990-07-23 1990-07-23 基板処理装置間のインターフェイス装置 Expired - Lifetime JP2550484Y2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP1990078099U JP2550484Y2 (ja) 1990-07-23 1990-07-23 基板処理装置間のインターフェイス装置
DE69113553T DE69113553T2 (de) 1990-07-23 1991-07-22 Schnittstellenvorrichtung zum Transportieren von Substraten zwischen Verarbeitungsgeräten.
EP91112250A EP0468409B1 (en) 1990-07-23 1991-07-22 Interface apparatus for transporting substrates between substrate processing apparatus
KR1019910012615A KR950001754B1 (ko) 1990-07-23 1991-07-23 기판처리장치간의 기판수도용 인터페이스 장치
US08/080,652 US5308210A (en) 1990-07-23 1993-06-22 Interface apparatus for transporting substrates between substrate processing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990078099U JP2550484Y2 (ja) 1990-07-23 1990-07-23 基板処理装置間のインターフェイス装置

Publications (2)

Publication Number Publication Date
JPH0436225U JPH0436225U (en, 2012) 1992-03-26
JP2550484Y2 true JP2550484Y2 (ja) 1997-10-15

Family

ID=31621075

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990078099U Expired - Lifetime JP2550484Y2 (ja) 1990-07-23 1990-07-23 基板処理装置間のインターフェイス装置

Country Status (1)

Country Link
JP (1) JP2550484Y2 (en, 2012)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62195118A (ja) * 1986-02-21 1987-08-27 Hitachi Ltd フオトレジスト現像装置
JPS62213259A (ja) * 1986-03-14 1987-09-19 Shinkawa Ltd バツフア装置
JPS63139811A (ja) * 1986-11-29 1988-06-11 Toshiba Corp 枚葉製造装置

Also Published As

Publication number Publication date
JPH0436225U (en, 2012) 1992-03-26

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