JP2549093Y2 - 石英延長管 - Google Patents

石英延長管

Info

Publication number
JP2549093Y2
JP2549093Y2 JP1987095719U JP9571987U JP2549093Y2 JP 2549093 Y2 JP2549093 Y2 JP 2549093Y2 JP 1987095719 U JP1987095719 U JP 1987095719U JP 9571987 U JP9571987 U JP 9571987U JP 2549093 Y2 JP2549093 Y2 JP 2549093Y2
Authority
JP
Japan
Prior art keywords
extension tube
gas
tube
quartz extension
quartz
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987095719U
Other languages
English (en)
Japanese (ja)
Other versions
JPS64328U (enExample
Inventor
俊二 川上
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Priority to JP1987095719U priority Critical patent/JP2549093Y2/ja
Publication of JPS64328U publication Critical patent/JPS64328U/ja
Application granted granted Critical
Publication of JP2549093Y2 publication Critical patent/JP2549093Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Branch Pipes, Bends, And The Like (AREA)
JP1987095719U 1987-06-22 1987-06-22 石英延長管 Expired - Lifetime JP2549093Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987095719U JP2549093Y2 (ja) 1987-06-22 1987-06-22 石英延長管

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987095719U JP2549093Y2 (ja) 1987-06-22 1987-06-22 石英延長管

Publications (2)

Publication Number Publication Date
JPS64328U JPS64328U (enExample) 1989-01-05
JP2549093Y2 true JP2549093Y2 (ja) 1997-09-24

Family

ID=30960602

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987095719U Expired - Lifetime JP2549093Y2 (ja) 1987-06-22 1987-06-22 石英延長管

Country Status (1)

Country Link
JP (1) JP2549093Y2 (enExample)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6031261Y2 (ja) * 1979-04-11 1985-09-18 三菱電機株式会社 ガス置換装置
JPS5691418A (en) * 1979-12-25 1981-07-24 Nec Corp Heat treatment device
JPS57211729A (en) * 1981-06-23 1982-12-25 Fujitsu Ltd Furnace for semiconductor heat treatment

Also Published As

Publication number Publication date
JPS64328U (enExample) 1989-01-05

Similar Documents

Publication Publication Date Title
JPH08264521A (ja) 半導体製造用反応炉
US4992044A (en) Reactant exhaust system for a thermal processing furnace
US4950156A (en) Inert gas curtain for a thermal processing furnace
JPH11251422A (ja) ウェーハ収納容器
JP2549093Y2 (ja) 石英延長管
JP3785194B2 (ja) 酸化鉄粒子の製造方式及び製造装置
JPS63102225A (ja) 縦形半導体熱処理装置のウエ−ハボ−ト
JP2828429B2 (ja) 化学気相蒸着設備のウェーハローディング室の空気流案内装置
JPH0226156B2 (enExample)
JP3710587B2 (ja) ガス噴射ヘッド
JPH0487323A (ja) Ｃｖｄ装置
KR930007610Y1 (ko) 가스 배출 장치
JPH0477234B2 (enExample)
JPS6260466B2 (enExample)
JP2938070B1 (ja) 常圧ｃｖｄ装置
JP2008066662A (ja) ガスヘッドおよび半導体製造装置
JPH0133935Y2 (enExample)
JPH069504Y2 (ja) バッファ型熱処理炉
JPH09260363A (ja) 半導体製造装置
JPH08159420A (ja) 平面炎ガスバーナ
JPS6126869Y2 (enExample)
JPH0336721A (ja) 熱加工炉及びその作動方法
JP2517975Y2 (ja) 賦活炉
JPH0783002B2 (ja) 半導体熱処理装置
JP2563497B2 (ja) 半導体装置の製造装置