JP2549093Y2 - Quartz extension tube - Google Patents

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a semiconductor manufacturing apparatus, and more particularly, to a quartz extension used to cool a wafer after heat treatment or to prevent oxidation of the wafer. It relates to a tube (also called an elephant tube).

2. Description of the Related Art As shown in FIG. 4, a wafer W heat-treated in a reaction chamber 1 is loaded on a port 2 and transferred into a quartz extension tube 3 into which N2 gas is injected.

Then, after cooling the wafer there, the shutter 4 is opened and the port 2 is transported to a clean bench (not shown).

Problems to be Solved by the Invention Since the conventional quartz extension tube 3 supplies gas from one supply port 5, the gas flows in the direction of arrow A1 as shown in FIGS. The flow collides directly with the wall 3a and rolls up in the direction of arrow A2, disturbing the gas flow in the quartz extension tube.

As a result, the reaction product accumulates on the bottom of the quartz extension tube, generating dust that the wafer dislikes. In addition, since there is no gas flow in the inner wall portion of the quartz extension tube, a phenomenon occurs in which air is drawn in from the gap between the tube opening 3b and the shutter 4.

Therefore, the wafer W in the quartz extension tube is oxidized.

When the N2 gas flowing through the reaction chamber flows through the inside of the quartz extension tube 3, the tip of the N2 gas has a semi-elliptical flow shape as shown by the one-dot chain line in FIG. As compared with, the amount of N2 gas is small and the amount of oxygen is large.

Therefore, since the N2 gas concentration in the quartz extension tube becomes non-uniform, the gas discharged outside the tube also becomes non-uniform.

The present invention has been made in view of the above circumstances, and aims at preventing gas flow in a quartz extension tube from being disturbed and attaining uniform gas concentration.

SUMMARY OF THE INVENTION The present invention is directed to a quartz extension tube having a reaction tube connected to one end and a shutter provided at the other end; a plurality of cooling gas supply units spaced axially from the quartz extension tube. Means are provided independently of each other, and the cooling gas supply means is provided on the wall of the quartz extension tube perpendicular to the axis of the tube, and is provided at intervals on the same circumference. The above problem is solved by a quartz extension tube comprising: a plurality of blowout holes; and a ring-shaped gas passage provided on an outer peripheral surface of the quartz extension tube and communicating with the blowout hole. It is something you want to do.

When a cooling gas such as N2 gas is caused to flow through the working gas passage,
Since the gas is blown vertically from each blowout hole toward the axis of the quartz extension tube, this gas is ejected in a shower shape from the wall of the quartz extension tube toward the center, and the gas is discharged from the center portion of the quartz extension tube. Colliding with each other, so that it does not collide directly with the wall.

An embodiment of the present invention will be described with reference to the accompanying drawings, wherein the same reference numerals have the same names and functions.

A plurality of blowout holes 11 are provided at intervals on a wall 10a of a cylindrical quartz extension tube (also referred to as an elephant tube) 10.
Are formed on the same circumference.

The blowout holes 11 have the same diameter,
Are formed perpendicularly to the axis of.

A gas introduction ring 12 is wound around the outer peripheral surface 10a of the quartz extension tube 10 and welded, and a gas passage 13 communicating with the blowout hole 1 is formed.
To form

A plurality of the gas introduction rings 12 are arranged at intervals in the axial direction, and each ring 12 has a gas introduction port.
13 are provided.

Next, the operation of this embodiment will be described. A reaction tube (not shown) is connected to one end of the quartz extension tube 10, a shutter (not shown) is provided at the other end, and the shutter is closed to close the inside of the reaction tube. A wafer port (not shown) is carried into the quartz extension tube 10.

And, an inert gas for cooling from the gas introduction port 13,
For example, when N2 gas is injected into the gas passage 13, the gas blows out from the blowout hole 11 toward the center of the pipe 10 as shown by an arrow A10.

Therefore, the N2 gas is also supplied to the wall 10b side of the tube 10 having a large amount of oxygen, so that the gas concentration in the tube is made uniform.

Further, the N2 gas ejected from each ejection hole 11 is ejected while forming a so-called shower and collides with each other at the central portion of the extension tube, and does not directly collide with the wall portion. Since the curling is also eliminated, the gas flow in the quartz extension tube is not disturbed. After the wafer is sufficiently cooled, the shutter is opened and the boat is transported to a clean bench (not shown).

Note that the flow rate and the flow direction of the gas may be arbitrarily adjusted by changing the shape of the blowout hole 11 and the like.

Effect of the Invention Since the invention is configured as described above, the gas flowing through the gas flow path is supplied from the wall of the quartz extension tube toward the central portion in the form of a shower.

Therefore, the inside of the quartz extension tube has a uniform gas concentration, and the gas can flow uniformly to the opening of the tube, so that non-uniformity of gas flowing out of the tube is reduced.

Further, since the gas is not swirled as in the conventional example, the gas flow in the quartz extension tube is not disturbed. Therefore, the reaction product does not accumulate in the quartz extension tube or the inner wall of the tube has no gas flow, so that air is not entrained from the gap between the tube opening and the shutter.

[Brief description of the drawings]

1 to 3 show an embodiment of the present invention.
FIG. 3 is a sectional view taken along the line II of FIG. 3, and FIG.
FIG. 3 is a perspective view, FIG. 4 and FIG. 5 are views showing a conventional example, FIG. 4 is a transverse sectional view, and FIG. 5 is a longitudinal sectional view of the conventional example. 10 ... quartz extension tube 10a ... outer peripheral surface of quartz extension tube 10b ... wall of quartz extension tube 11 ... blow-out hole 13 ... gas passage

Claims (2)

(57) [Scope of request for utility model registration] 1. A quartz extension tube having a reaction tube connected to one end and a shutter provided at the other end; a plurality of cooling gas supply means arranged independently of each other at an axial interval on the quartz extension tube. The cooling gas supply means is provided on the wall of the quartz extension tube perpendicular to the axis of the tube, and a plurality of blowing holes provided at intervals on the same circumference, A ring-shaped gas passage provided on an outer peripheral surface of the quartz extension tube and communicating with the blowout hole. 2. A quartz extension tube according to claim 1, wherein the plurality of blowout holes have the same diameter.