JP2533708Y2 - 処理チューブの開閉装置 - Google Patents

処理チューブの開閉装置

Info

Publication number
JP2533708Y2
JP2533708Y2 JP1987181406U JP18140687U JP2533708Y2 JP 2533708 Y2 JP2533708 Y2 JP 2533708Y2 JP 1987181406 U JP1987181406 U JP 1987181406U JP 18140687 U JP18140687 U JP 18140687U JP 2533708 Y2 JP2533708 Y2 JP 2533708Y2
Authority
JP
Japan
Prior art keywords
processing tube
cap
opening
arm
wafer boat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987181406U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0186231U (en, 2012
Inventor
修二 関
Original Assignee
東京エレクトロン東北 株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 東京エレクトロン東北 株式会社 filed Critical 東京エレクトロン東北 株式会社
Priority to JP1987181406U priority Critical patent/JP2533708Y2/ja
Publication of JPH0186231U publication Critical patent/JPH0186231U/ja
Application granted granted Critical
Publication of JP2533708Y2 publication Critical patent/JP2533708Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1987181406U 1987-11-28 1987-11-28 処理チューブの開閉装置 Expired - Lifetime JP2533708Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987181406U JP2533708Y2 (ja) 1987-11-28 1987-11-28 処理チューブの開閉装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987181406U JP2533708Y2 (ja) 1987-11-28 1987-11-28 処理チューブの開閉装置

Publications (2)

Publication Number Publication Date
JPH0186231U JPH0186231U (en, 2012) 1989-06-07
JP2533708Y2 true JP2533708Y2 (ja) 1997-04-23

Family

ID=31472890

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987181406U Expired - Lifetime JP2533708Y2 (ja) 1987-11-28 1987-11-28 処理チューブの開閉装置

Country Status (1)

Country Link
JP (1) JP2533708Y2 (en, 2012)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7386045B2 (ja) * 2019-10-31 2023-11-24 株式会社ジェイテクトサーモシステム 熱処理装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4911137U (en, 2012) * 1972-05-09 1974-01-30
JPS54141257U (en, 2012) * 1978-03-27 1979-10-01
JPS5917970B2 (ja) * 1978-07-28 1984-04-24 三菱電機株式会社 熱処理装置

Also Published As

Publication number Publication date
JPH0186231U (en, 2012) 1989-06-07

Similar Documents

Publication Publication Date Title
US5374147A (en) Transfer device for transferring a substrate
CN101253616B (zh) 工件传送装置
JP2000040728A (ja) ウェハ搬送機構
JPH0224907B2 (en, 2012)
KR20030022035A (ko) 판형상체의 위치결정 반송 방법 및 장치
JPH0533529B2 (en, 2012)
EP1014425B1 (en) Mechanism and method for supporting substrate to be coated with film
JP2533708Y2 (ja) 処理チューブの開閉装置
JP2002264065A (ja) ウエハ搬送ロボット
JP2835983B2 (ja) ボンデイングヘツド
JP2928196B2 (ja) ウエハ搬送アーム
KR102788615B1 (ko) 슬래브 형태의 기판을 위한 엔드 이펙터
US4941800A (en) Transfer apparatus for plate-like member
JPS5833828A (ja) 半導体表面処理装置
JP4575792B2 (ja) 基板保持装置
JPH08139154A (ja) ウェハハンドリング方法及び装置
JPS63245933A (ja) 半導体ウエハの搬送方法
JPH041016Y2 (en, 2012)
JPH09159368A (ja) 連続熱処理炉
JPH07112882B2 (ja) 搬送装置
JPH08125003A (ja) 挟込み式基板搬送アーム
JPS62268137A (ja) ウエハキヤリア移載装置
JP2000326404A (ja) フィルム着脱装置
JPS59182046A (ja) 真空中における搬送装置
JPH11185685A (ja) 真空チャンバーのゲートバルブ