JP2527763Y2 - 半導体プロセス装置 - Google Patents

半導体プロセス装置

Info

Publication number
JP2527763Y2
JP2527763Y2 JP279791U JP279791U JP2527763Y2 JP 2527763 Y2 JP2527763 Y2 JP 2527763Y2 JP 279791 U JP279791 U JP 279791U JP 279791 U JP279791 U JP 279791U JP 2527763 Y2 JP2527763 Y2 JP 2527763Y2
Authority
JP
Japan
Prior art keywords
opening
wafer
chamber
wafer transfer
closing lid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP279791U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0496850U (enExample
Inventor
淳一 佐藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Priority to JP279791U priority Critical patent/JP2527763Y2/ja
Publication of JPH0496850U publication Critical patent/JPH0496850U/ja
Application granted granted Critical
Publication of JP2527763Y2 publication Critical patent/JP2527763Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP279791U 1991-01-31 1991-01-31 半導体プロセス装置 Expired - Lifetime JP2527763Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP279791U JP2527763Y2 (ja) 1991-01-31 1991-01-31 半導体プロセス装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP279791U JP2527763Y2 (ja) 1991-01-31 1991-01-31 半導体プロセス装置

Publications (2)

Publication Number Publication Date
JPH0496850U JPH0496850U (enExample) 1992-08-21
JP2527763Y2 true JP2527763Y2 (ja) 1997-03-05

Family

ID=31731197

Family Applications (1)

Application Number Title Priority Date Filing Date
JP279791U Expired - Lifetime JP2527763Y2 (ja) 1991-01-31 1991-01-31 半導体プロセス装置

Country Status (1)

Country Link
JP (1) JP2527763Y2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4503460B2 (ja) * 2005-02-16 2010-07-14 三菱電機株式会社 半導体製造装置のドア密閉機構

Also Published As

Publication number Publication date
JPH0496850U (enExample) 1992-08-21

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term