JP2003092326A5 - - Google Patents

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Publication number
JP2003092326A5
JP2003092326A5 JP2001282266A JP2001282266A JP2003092326A5 JP 2003092326 A5 JP2003092326 A5 JP 2003092326A5 JP 2001282266 A JP2001282266 A JP 2001282266A JP 2001282266 A JP2001282266 A JP 2001282266A JP 2003092326 A5 JP2003092326 A5 JP 2003092326A5
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JP
Japan
Prior art keywords
wafer
chamber
processing
cleaning
drying
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2001282266A
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English (en)
Japanese (ja)
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JP2003092326A (ja
JP3960462B2 (ja
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Priority to JP2001282266A priority Critical patent/JP3960462B2/ja
Priority claimed from JP2001282266A external-priority patent/JP3960462B2/ja
Publication of JP2003092326A publication Critical patent/JP2003092326A/ja
Publication of JP2003092326A5 publication Critical patent/JP2003092326A5/ja
Application granted granted Critical
Publication of JP3960462B2 publication Critical patent/JP3960462B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2001282266A 2001-09-17 2001-09-17 基板処理装置 Expired - Fee Related JP3960462B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001282266A JP3960462B2 (ja) 2001-09-17 2001-09-17 基板処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001282266A JP3960462B2 (ja) 2001-09-17 2001-09-17 基板処理装置

Publications (3)

Publication Number Publication Date
JP2003092326A JP2003092326A (ja) 2003-03-28
JP2003092326A5 true JP2003092326A5 (enExample) 2005-03-17
JP3960462B2 JP3960462B2 (ja) 2007-08-15

Family

ID=19105941

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001282266A Expired - Fee Related JP3960462B2 (ja) 2001-09-17 2001-09-17 基板処理装置

Country Status (1)

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JP (1) JP3960462B2 (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI233147B (en) * 2003-03-31 2005-05-21 Lam Res Corp Chamber and associated methods for wafer processing
JP4418486B2 (ja) * 2007-08-30 2010-02-17 株式会社Ｍｔｋ ウエット処理装置
JP5293459B2 (ja) * 2009-07-01 2013-09-18 東京エレクトロン株式会社 基板処理装置
JP5477131B2 (ja) * 2010-04-08 2014-04-23 東京エレクトロン株式会社 基板処理装置
JP5471740B2 (ja) * 2010-04-08 2014-04-16 東京エレクトロン株式会社 基板処理装置
WO2020218815A1 (ko) * 2019-04-23 2020-10-29 주식회사 제우스 식각장치 및 그 식각방법

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