JPH0496850U - - Google Patents

Info

Publication number
JPH0496850U
JPH0496850U JP279791U JP279791U JPH0496850U JP H0496850 U JPH0496850 U JP H0496850U JP 279791 U JP279791 U JP 279791U JP 279791 U JP279791 U JP 279791U JP H0496850 U JPH0496850 U JP H0496850U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP279791U
Other languages
Japanese (ja)
Other versions
JP2527763Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP279791U priority Critical patent/JP2527763Y2/ja
Publication of JPH0496850U publication Critical patent/JPH0496850U/ja
Application granted granted Critical
Publication of JP2527763Y2 publication Critical patent/JP2527763Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP279791U 1991-01-31 1991-01-31 半導体プロセス装置 Expired - Lifetime JP2527763Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP279791U JP2527763Y2 (ja) 1991-01-31 1991-01-31 半導体プロセス装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP279791U JP2527763Y2 (ja) 1991-01-31 1991-01-31 半導体プロセス装置

Publications (2)

Publication Number Publication Date
JPH0496850U true JPH0496850U (enExample) 1992-08-21
JP2527763Y2 JP2527763Y2 (ja) 1997-03-05

Family

ID=31731197

Family Applications (1)

Application Number Title Priority Date Filing Date
JP279791U Expired - Lifetime JP2527763Y2 (ja) 1991-01-31 1991-01-31 半導体プロセス装置

Country Status (1)

Country Link
JP (1) JP2527763Y2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006228848A (ja) * 2005-02-16 2006-08-31 Mitsubishi Electric Corp 半導体製造装置のドア密閉機構

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006228848A (ja) * 2005-02-16 2006-08-31 Mitsubishi Electric Corp 半導体製造装置のドア密閉機構

Also Published As

Publication number Publication date
JP2527763Y2 (ja) 1997-03-05

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term