JP2526738Y2 - ダイシング機の洗浄装置 - Google Patents

ダイシング機の洗浄装置

Info

Publication number
JP2526738Y2
JP2526738Y2 JP1990067474U JP6747490U JP2526738Y2 JP 2526738 Y2 JP2526738 Y2 JP 2526738Y2 JP 1990067474 U JP1990067474 U JP 1990067474U JP 6747490 U JP6747490 U JP 6747490U JP 2526738 Y2 JP2526738 Y2 JP 2526738Y2
Authority
JP
Japan
Prior art keywords
cutting
nozzle
dicing machine
flange
outer peripheral
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1990067474U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0426708U (enrdf_load_stackoverflow
Inventor
宏 大房
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Seimitsu Co Ltd
Original Assignee
Tokyo Seimitsu Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Seimitsu Co Ltd filed Critical Tokyo Seimitsu Co Ltd
Priority to JP1990067474U priority Critical patent/JP2526738Y2/ja
Publication of JPH0426708U publication Critical patent/JPH0426708U/ja
Application granted granted Critical
Publication of JP2526738Y2 publication Critical patent/JP2526738Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Processing Of Stones Or Stones Resemblance Materials (AREA)
JP1990067474U 1990-06-26 1990-06-26 ダイシング機の洗浄装置 Expired - Lifetime JP2526738Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990067474U JP2526738Y2 (ja) 1990-06-26 1990-06-26 ダイシング機の洗浄装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990067474U JP2526738Y2 (ja) 1990-06-26 1990-06-26 ダイシング機の洗浄装置

Publications (2)

Publication Number Publication Date
JPH0426708U JPH0426708U (enrdf_load_stackoverflow) 1992-03-03
JP2526738Y2 true JP2526738Y2 (ja) 1997-02-19

Family

ID=31601080

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990067474U Expired - Lifetime JP2526738Y2 (ja) 1990-06-26 1990-06-26 ダイシング機の洗浄装置

Country Status (1)

Country Link
JP (1) JP2526738Y2 (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002217135A (ja) * 2001-01-19 2002-08-02 Disco Abrasive Syst Ltd 切削装置
JP6298724B2 (ja) * 2014-06-13 2018-03-20 株式会社ディスコ 切削装置
JP2019181584A (ja) * 2018-04-03 2019-10-24 株式会社ディスコ 加工装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61148004A (ja) * 1985-11-27 1986-07-05 株式会社日立製作所 ダイシング装置
JPS6480506A (en) * 1987-09-24 1989-03-27 Hitachi Ltd Dicer
JPH01210314A (ja) * 1988-02-18 1989-08-23 Nec Corp 半導体ウェハーの切断方法

Also Published As

Publication number Publication date
JPH0426708U (enrdf_load_stackoverflow) 1992-03-03

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