JP2017222003A - スピンドルユニット - Google Patents
スピンドルユニット Download PDFInfo
- Publication number
- JP2017222003A JP2017222003A JP2016119497A JP2016119497A JP2017222003A JP 2017222003 A JP2017222003 A JP 2017222003A JP 2016119497 A JP2016119497 A JP 2016119497A JP 2016119497 A JP2016119497 A JP 2016119497A JP 2017222003 A JP2017222003 A JP 2017222003A
- Authority
- JP
- Japan
- Prior art keywords
- spindle
- cover
- spindle shaft
- casing
- grinding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000227 grinding Methods 0.000 abstract description 63
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 17
- 239000000463 material Substances 0.000 description 11
- 238000003754 machining Methods 0.000 description 9
- 239000002699 waste material Substances 0.000 description 9
- 238000000034 method Methods 0.000 description 4
- 238000011109 contamination Methods 0.000 description 3
- 238000001816 cooling Methods 0.000 description 3
- 239000000498 cooling water Substances 0.000 description 3
- 230000002093 peripheral effect Effects 0.000 description 3
- 238000005498 polishing Methods 0.000 description 3
- 235000012431 wafers Nutrition 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 239000012780 transparent material Substances 0.000 description 2
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 239000006061 abrasive grain Substances 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 230000007261 regionalization Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 238000007790 scraping Methods 0.000 description 1
- 230000011218 segmentation Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Images
Landscapes
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
Abstract
Description
42 スピンドルユニット
43 ケーシング
44 スピンドル軸
45 マウント
46 研削ホイール(加工具)
60 スピンドルカバー
Claims (1)
- 先端に加工具を装着するマウントを連結するスピンドル軸と、該スピンドル軸を囲繞して該スピンドル軸に向かってエアを噴射させ支持するエアベアリングを形成するケーシングと、を備えるスピンドルユニットであって、
該ケーシングの下端と該マウントの上面との間となる該スピンドル軸の外側面に隙間を備えて該スピンドル軸を囲繞する2つ割りのカバーを備えるスピンドルユニット。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016119497A JP6736367B2 (ja) | 2016-06-16 | 2016-06-16 | スピンドルユニット |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016119497A JP6736367B2 (ja) | 2016-06-16 | 2016-06-16 | スピンドルユニット |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2017222003A true JP2017222003A (ja) | 2017-12-21 |
JP6736367B2 JP6736367B2 (ja) | 2020-08-05 |
Family
ID=60686197
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2016119497A Active JP6736367B2 (ja) | 2016-06-16 | 2016-06-16 | スピンドルユニット |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP6736367B2 (ja) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2020015157A (ja) * | 2018-07-27 | 2020-01-30 | 東京エレクトロン株式会社 | 加工装置 |
KR20200140731A (ko) | 2019-06-06 | 2020-12-16 | 도쿄엘렉트론가부시키가이샤 | 기판 가공 장치 |
CN112338706A (zh) * | 2019-08-06 | 2021-02-09 | 株式会社迪思科 | 主轴单元 |
KR20230010581A (ko) | 2021-07-12 | 2023-01-19 | 가부시기가이샤 디스코 | 스핀들 유닛 |
DE102023203308A1 (de) | 2022-04-19 | 2023-10-19 | Disco Corporation | Spindeleinheit |
KR20230165118A (ko) | 2022-05-26 | 2023-12-05 | 가부시기가이샤 디스코 | 스핀들 유닛 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5125190A (en) * | 1990-05-16 | 1992-06-30 | Buser John P | Dust collector and shield for rotary grinder |
JP2000074066A (ja) * | 1998-08-26 | 2000-03-07 | Disco Abrasive Syst Ltd | 回転体支持装置 |
JP2006075934A (ja) * | 2004-09-09 | 2006-03-23 | Toyoda Mach Works Ltd | 研削盤における砥石軸のカバー構造 |
JP2011101939A (ja) * | 2009-11-12 | 2011-05-26 | Disco Abrasive Syst Ltd | 研削装置 |
JP2016087733A (ja) * | 2014-11-04 | 2016-05-23 | 大久保精工株式会社 | カバー機構及びスピンドルユニット |
-
2016
- 2016-06-16 JP JP2016119497A patent/JP6736367B2/ja active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5125190A (en) * | 1990-05-16 | 1992-06-30 | Buser John P | Dust collector and shield for rotary grinder |
JP2000074066A (ja) * | 1998-08-26 | 2000-03-07 | Disco Abrasive Syst Ltd | 回転体支持装置 |
JP2006075934A (ja) * | 2004-09-09 | 2006-03-23 | Toyoda Mach Works Ltd | 研削盤における砥石軸のカバー構造 |
JP2011101939A (ja) * | 2009-11-12 | 2011-05-26 | Disco Abrasive Syst Ltd | 研削装置 |
JP2016087733A (ja) * | 2014-11-04 | 2016-05-23 | 大久保精工株式会社 | カバー機構及びスピンドルユニット |
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2020015157A (ja) * | 2018-07-27 | 2020-01-30 | 東京エレクトロン株式会社 | 加工装置 |
KR20200140731A (ko) | 2019-06-06 | 2020-12-16 | 도쿄엘렉트론가부시키가이샤 | 기판 가공 장치 |
CN112338706A (zh) * | 2019-08-06 | 2021-02-09 | 株式会社迪思科 | 主轴单元 |
KR20210018081A (ko) | 2019-08-06 | 2021-02-17 | 가부시기가이샤 디스코 | 스핀들 유닛 |
US11673219B2 (en) | 2019-08-06 | 2023-06-13 | Disco Corporation | Spindle unit |
CN112338706B (zh) * | 2019-08-06 | 2024-03-12 | 株式会社迪思科 | 主轴单元 |
KR20230010581A (ko) | 2021-07-12 | 2023-01-19 | 가부시기가이샤 디스코 | 스핀들 유닛 |
DE102023203308A1 (de) | 2022-04-19 | 2023-10-19 | Disco Corporation | Spindeleinheit |
KR20230149231A (ko) | 2022-04-19 | 2023-10-26 | 가부시기가이샤 디스코 | 스핀들 유닛 |
KR20230165118A (ko) | 2022-05-26 | 2023-12-05 | 가부시기가이샤 디스코 | 스핀들 유닛 |
Also Published As
Publication number | Publication date |
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JP6736367B2 (ja) | 2020-08-05 |
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