JP2525848Y2 - 真空ポンプ - Google Patents
真空ポンプInfo
- Publication number
- JP2525848Y2 JP2525848Y2 JP1990017258U JP1725890U JP2525848Y2 JP 2525848 Y2 JP2525848 Y2 JP 2525848Y2 JP 1990017258 U JP1990017258 U JP 1990017258U JP 1725890 U JP1725890 U JP 1725890U JP 2525848 Y2 JP2525848 Y2 JP 2525848Y2
- Authority
- JP
- Japan
- Prior art keywords
- rotor
- rotor shaft
- bearing
- gas
- protective
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
- F16C32/0406—Magnetic bearings
- F16C32/044—Active magnetic bearings
- F16C32/0442—Active magnetic bearings with devices affected by abnormal, undesired or non-standard conditions such as shock-load, power outage, start-up or touchdown
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C37/00—Cooling of bearings
- F16C37/005—Cooling of bearings of magnetic bearings
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C37/00—Cooling of bearings
- F16C37/007—Cooling of bearings of rolling bearings
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2360/00—Engines or pumps
- F16C2360/44—Centrifugal pumps
- F16C2360/45—Turbo-molecular pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C39/00—Relieving load on bearings
- F16C39/02—Relieving load on bearings using mechanical means
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1990017258U JP2525848Y2 (ja) | 1990-02-22 | 1990-02-22 | 真空ポンプ |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1990017258U JP2525848Y2 (ja) | 1990-02-22 | 1990-02-22 | 真空ポンプ |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH03108899U JPH03108899U (it) | 1991-11-08 |
JP2525848Y2 true JP2525848Y2 (ja) | 1997-02-12 |
Family
ID=31520487
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1990017258U Expired - Fee Related JP2525848Y2 (ja) | 1990-02-22 | 1990-02-22 | 真空ポンプ |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2525848Y2 (it) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100726705B1 (ko) * | 2006-02-01 | 2007-06-13 | 임재엽 | 유동형 보석 반지 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61132797A (ja) * | 1984-11-30 | 1986-06-20 | Shimadzu Corp | タ−ボ分子ポンプの軸受装置 |
JPS6370699A (ja) * | 1986-09-12 | 1988-03-30 | Nec Corp | 水中発音器 |
JPS63129191A (ja) * | 1986-11-17 | 1988-06-01 | Seiko Seiki Co Ltd | タ−ボ分子ポンプ |
JP2536512B2 (ja) * | 1987-03-25 | 1996-09-18 | 株式会社島津製作所 | タ−ボ分子ポンプの磁気軸受装置 |
-
1990
- 1990-02-22 JP JP1990017258U patent/JP2525848Y2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JPH03108899U (it) | 1991-11-08 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5738869B2 (ja) | ターボ分子ポンプ | |
JP6331491B2 (ja) | 真空ポンプ | |
JP3047292B1 (ja) | ターボ分子ポンプ及び真空装置 | |
JP2998441B2 (ja) | ターボ真空ポンプ | |
US6409468B1 (en) | Turbo-molecular pump | |
JP3038432B2 (ja) | 真空ポンプ及び真空装置 | |
JP2006509952A (ja) | 真空ポンプ排出装置 | |
JP2000283085A (ja) | インバーテッドモータ付き真空ポンプ | |
JP2525848Y2 (ja) | 真空ポンプ | |
EP0477924B1 (en) | Turbo vacuum pump | |
JP4935509B2 (ja) | ターボ分子ポンプ | |
JPH0538389U (ja) | 真空ポンプ | |
JP6390098B2 (ja) | 真空ポンプ | |
JP2000161284A (ja) | ターボ真空ポンプ | |
JP4567462B2 (ja) | 真空ポンプ排出システム及び真空ポンプ排出装置の作動方法 | |
JP2001003890A (ja) | 磁気軸受式ターボ分子ポンプ | |
US20060099094A1 (en) | Vacuum pumping arrangement and method of operating same | |
JPH0536093U (ja) | 真空ポンプ | |
KR102669881B1 (ko) | 버퍼 챔버를 갖는 터보 분자 펌프 | |
JP2024071328A (ja) | ホルベックポンプ段の吸引能力が改善された真空ポンプ | |
JP2601803Y2 (ja) | ターボ分子ポンプ | |
JPS6045792A (ja) | タ−ボ分子ポンプ | |
JPH1061663A (ja) | 真空ポンプのロータを支持するための回転組立体 | |
JP2008240571A (ja) | ターボ分子ポンプ | |
JPH0645115U (ja) | ターボ機械用スラスト磁気軸受 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
LAPS | Cancellation because of no payment of annual fees |