JP2524971Y2 - 絵柄面積率測定装置 - Google Patents
絵柄面積率測定装置Info
- Publication number
- JP2524971Y2 JP2524971Y2 JP1989060402U JP6040289U JP2524971Y2 JP 2524971 Y2 JP2524971 Y2 JP 2524971Y2 JP 1989060402 U JP1989060402 U JP 1989060402U JP 6040289 U JP6040289 U JP 6040289U JP 2524971 Y2 JP2524971 Y2 JP 2524971Y2
- Authority
- JP
- Japan
- Prior art keywords
- value
- converter
- measured
- output voltage
- area ratio
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000006243 chemical reaction Methods 0.000 claims description 22
- 238000005259 measurement Methods 0.000 claims description 17
- 230000004044 response Effects 0.000 claims description 2
- 230000003321 amplification Effects 0.000 claims 3
- 238000003199 nucleic acid amplification method Methods 0.000 claims 3
- 230000005855 radiation Effects 0.000 abstract 1
- 238000009792 diffusion process Methods 0.000 description 11
- 229910052736 halogen Inorganic materials 0.000 description 10
- 150000002367 halogens Chemical class 0.000 description 10
- 238000010586 diagram Methods 0.000 description 4
- 238000001459 lithography Methods 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000001235 sensitizing effect Effects 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/28—Measuring arrangements characterised by the use of optical techniques for measuring areas
- G01B11/285—Measuring arrangements characterised by the use of optical techniques for measuring areas using photoelectric detection means
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
- Inking, Control Or Cleaning Of Printing Machines (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1989060402U JP2524971Y2 (ja) | 1989-05-26 | 1989-05-26 | 絵柄面積率測定装置 |
US07/528,766 US5096299A (en) | 1989-05-26 | 1990-05-24 | Pattern area ratio measuring apparatus |
DE90110015T DE69003869T2 (de) | 1989-05-26 | 1990-05-26 | Gerät zur Messung des Flächenverhältnisses eines Musters auf einer zu bedruckenden Oberfläche. |
EP90110015A EP0399562B1 (en) | 1989-05-26 | 1990-05-26 | Pattern area ratio measuring apparatus |
AT90110015T ATE95918T1 (de) | 1989-05-26 | 1990-05-26 | Geraet zur messung des flaechenverhaeltnisses eines musters auf einer zu bedruckenden oberflaeche. |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1989060402U JP2524971Y2 (ja) | 1989-05-26 | 1989-05-26 | 絵柄面積率測定装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH02150505U JPH02150505U (en, 2012) | 1990-12-26 |
JP2524971Y2 true JP2524971Y2 (ja) | 1997-02-05 |
Family
ID=13141140
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1989060402U Expired - Lifetime JP2524971Y2 (ja) | 1989-05-26 | 1989-05-26 | 絵柄面積率測定装置 |
Country Status (5)
Country | Link |
---|---|
US (1) | US5096299A (en, 2012) |
EP (1) | EP0399562B1 (en, 2012) |
JP (1) | JP2524971Y2 (en, 2012) |
AT (1) | ATE95918T1 (en, 2012) |
DE (1) | DE69003869T2 (en, 2012) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5357335A (en) * | 1993-03-31 | 1994-10-18 | Minnesota Mining And Manufacturing Company | Optical detection device for screening magnetic tape |
ES2323206B1 (es) * | 2006-10-16 | 2010-04-21 | Universidad De Cordoba | Procedimiento de calibracion absoluta en intensidad de un dispositivo optico. |
TWI393854B (zh) * | 2008-09-01 | 2013-04-21 | Univ Ishou | The method of the optical system to measure the actual contact area of the |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2720812A (en) * | 1952-09-30 | 1955-10-18 | Middleton William Edga Knowles | Instrument for measuring distinctness of image gloss |
US3609044A (en) * | 1969-07-01 | 1971-09-28 | Eastman Kodak Co | Apparatus for selectively inspecting a web surface and a coating on the surface |
US3792268A (en) * | 1972-01-06 | 1974-02-12 | Ibm | Document scanner having optical diffusion means |
US3891797A (en) * | 1973-12-26 | 1975-06-24 | Mc Donnell Douglas Corp | Plating area measuring system |
US4406545A (en) * | 1981-05-07 | 1983-09-27 | Western Electric Company, Inc. | Methods of and apparatus for measuring surface areas |
US4512662A (en) * | 1981-07-06 | 1985-04-23 | Tobias Philip E | Plate scanner for printing plates |
DE3309443A1 (de) * | 1982-05-29 | 1983-12-08 | Heidelberger Druckmaschinen Ag, 6900 Heidelberg | Verfahren zur ermittlung der flaechendeckung einer druckvorlage oder druckplatte fuer druckmaschinen |
JPS59160709A (ja) * | 1983-03-03 | 1984-09-11 | Komori Printing Mach Co Ltd | 印刷版の絵柄面積測定方法 |
JPS60238834A (ja) * | 1984-05-11 | 1985-11-27 | Asahi Shinbunsha:Kk | 画線比率測定装置 |
JPS63221207A (ja) * | 1987-03-10 | 1988-09-14 | Ricoh Co Ltd | 干渉測定装置における光電変換方法 |
-
1989
- 1989-05-26 JP JP1989060402U patent/JP2524971Y2/ja not_active Expired - Lifetime
-
1990
- 1990-05-24 US US07/528,766 patent/US5096299A/en not_active Expired - Lifetime
- 1990-05-26 AT AT90110015T patent/ATE95918T1/de not_active IP Right Cessation
- 1990-05-26 DE DE90110015T patent/DE69003869T2/de not_active Expired - Fee Related
- 1990-05-26 EP EP90110015A patent/EP0399562B1/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0399562A3 (en) | 1991-05-29 |
ATE95918T1 (de) | 1993-10-15 |
DE69003869T2 (de) | 1994-05-05 |
DE69003869D1 (de) | 1993-11-18 |
US5096299A (en) | 1992-03-17 |
EP0399562B1 (en) | 1993-10-13 |
JPH02150505U (en, 2012) | 1990-12-26 |
EP0399562A2 (en) | 1990-11-28 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPH0650817A (ja) | 試料の光学特性測定装置 | |
JP2729058B2 (ja) | 半導体装置の露光装置 | |
JP2524971Y2 (ja) | 絵柄面積率測定装置 | |
JPH07220989A (ja) | 露光装置及びこれを用いたデバイス製造方法 | |
JPS5983165A (ja) | 照明光源装置 | |
JP3036081B2 (ja) | 電子線描画装置及び方法、及びその試料面高さ測定装置 | |
JPH08162397A (ja) | 投影露光装置及びそれを用いた半導体デバイスの製造方法 | |
CN100408978C (zh) | 用于调节位置测量仪的光源的方法和装置 | |
JPH10227632A (ja) | 対象物の距離測定用光学装置および光学測定装置から対象物への距離測定方法 | |
JPH0418454B2 (en, 2012) | ||
JPH0652699B2 (ja) | 露光装置 | |
JPS6015626A (ja) | オ−トストロボ装置 | |
JPH0416424Y2 (en, 2012) | ||
JP2566453B2 (ja) | 絵柄面積率測定装置 | |
JPH01187924A (ja) | 露光装置 | |
JPH02266755A (ja) | 画像読取装置 | |
JPH036011A (ja) | 半導体装置製造用ウェーハ露光装置 | |
JPH082998Y2 (ja) | レーザ光露光装置の露光位置算出装置 | |
JP2580678B2 (ja) | 光量検出装置 | |
JP2965078B2 (ja) | 反射光量測定装置 | |
JPH0421109Y2 (en, 2012) | ||
JPH0511561Y2 (en, 2012) | ||
JPS6384025A (ja) | 縮小投影露光装置 | |
JPH10284386A (ja) | 露光装置及び照度分布計測方法 | |
JPS60186828A (ja) | 複写機の露光ランプ制御装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
EXPY | Cancellation because of completion of term |