JP2524708Y2 - ポジションセンサ - Google Patents
ポジションセンサInfo
- Publication number
- JP2524708Y2 JP2524708Y2 JP1990124997U JP12499790U JP2524708Y2 JP 2524708 Y2 JP2524708 Y2 JP 2524708Y2 JP 1990124997 U JP1990124997 U JP 1990124997U JP 12499790 U JP12499790 U JP 12499790U JP 2524708 Y2 JP2524708 Y2 JP 2524708Y2
- Authority
- JP
- Japan
- Prior art keywords
- diffusion layer
- conductivity type
- type diffusion
- signal detection
- position sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000009792 diffusion process Methods 0.000 claims description 39
- 239000000758 substrate Substances 0.000 claims description 19
- 238000001514 detection method Methods 0.000 claims description 16
- 239000004065 semiconductor Substances 0.000 claims description 15
- 239000012535 impurity Substances 0.000 description 7
- 229910004298 SiO 2 Inorganic materials 0.000 description 5
- 229910052796 boron Inorganic materials 0.000 description 5
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 230000007547 defect Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- -1 boron ions Chemical class 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000002513 implantation Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910001415 sodium ion Inorganic materials 0.000 description 1
Landscapes
- Photo Coupler, Interrupter, Optical-To-Optical Conversion Devices (AREA)
- Pressure Sensors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990124997U JP2524708Y2 (ja) | 1990-11-26 | 1990-11-26 | ポジションセンサ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990124997U JP2524708Y2 (ja) | 1990-11-26 | 1990-11-26 | ポジションセンサ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0480071U JPH0480071U (enrdf_load_stackoverflow) | 1992-07-13 |
| JP2524708Y2 true JP2524708Y2 (ja) | 1997-02-05 |
Family
ID=31872622
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1990124997U Expired - Fee Related JP2524708Y2 (ja) | 1990-11-26 | 1990-11-26 | ポジションセンサ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2524708Y2 (enrdf_load_stackoverflow) |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5917288A (ja) * | 1982-07-20 | 1984-01-28 | Hamamatsu Tv Kk | 入射位置検出用半導体装置 |
| JPS59127883A (ja) * | 1983-01-12 | 1984-07-23 | Matsushita Electronics Corp | 感光半導体装置 |
-
1990
- 1990-11-26 JP JP1990124997U patent/JP2524708Y2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0480071U (enrdf_load_stackoverflow) | 1992-07-13 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |