JP2516877Y2 - 基板搬送装置 - Google Patents

基板搬送装置

Info

Publication number
JP2516877Y2
JP2516877Y2 JP10719290U JP10719290U JP2516877Y2 JP 2516877 Y2 JP2516877 Y2 JP 2516877Y2 JP 10719290 U JP10719290 U JP 10719290U JP 10719290 U JP10719290 U JP 10719290U JP 2516877 Y2 JP2516877 Y2 JP 2516877Y2
Authority
JP
Japan
Prior art keywords
substrate
arms
arm
partition plate
standby position
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP10719290U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0463643U (enExample
Inventor
寛 小林
雅美 西田
信敏 大神
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dainippon Screen Manufacturing Co Ltd
Original Assignee
Dainippon Screen Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dainippon Screen Manufacturing Co Ltd filed Critical Dainippon Screen Manufacturing Co Ltd
Priority to JP10719290U priority Critical patent/JP2516877Y2/ja
Publication of JPH0463643U publication Critical patent/JPH0463643U/ja
Application granted granted Critical
Publication of JP2516877Y2 publication Critical patent/JP2516877Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP10719290U 1990-10-12 1990-10-12 基板搬送装置 Expired - Lifetime JP2516877Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10719290U JP2516877Y2 (ja) 1990-10-12 1990-10-12 基板搬送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10719290U JP2516877Y2 (ja) 1990-10-12 1990-10-12 基板搬送装置

Publications (2)

Publication Number Publication Date
JPH0463643U JPH0463643U (enExample) 1992-05-29
JP2516877Y2 true JP2516877Y2 (ja) 1996-11-13

Family

ID=31853594

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10719290U Expired - Lifetime JP2516877Y2 (ja) 1990-10-12 1990-10-12 基板搬送装置

Country Status (1)

Country Link
JP (1) JP2516877Y2 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3484067B2 (ja) * 1998-02-20 2004-01-06 平田機工株式会社 ロボット装置
US7656506B2 (en) 2004-12-23 2010-02-02 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method utilizing a substrate handler
US7538857B2 (en) 2004-12-23 2009-05-26 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method utilizing a substrate handler
JP4694436B2 (ja) * 2006-07-28 2011-06-08 株式会社ダイヘン 搬送ロボット
JP5854741B2 (ja) * 2011-10-04 2016-02-09 株式会社アルバック 基板処理装置

Also Published As

Publication number Publication date
JPH0463643U (enExample) 1992-05-29

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