JP2513375Y2 - 高粘度処理液による基板処理装置における処理液循環装置 - Google Patents

高粘度処理液による基板処理装置における処理液循環装置

Info

Publication number
JP2513375Y2
JP2513375Y2 JP1989026692U JP2669289U JP2513375Y2 JP 2513375 Y2 JP2513375 Y2 JP 2513375Y2 JP 1989026692 U JP1989026692 U JP 1989026692U JP 2669289 U JP2669289 U JP 2669289U JP 2513375 Y2 JP2513375 Y2 JP 2513375Y2
Authority
JP
Japan
Prior art keywords
filter
processing liquid
liquid
flow path
treatment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1989026692U
Other languages
English (en)
Japanese (ja)
Other versions
JPH02112303U (enExample
Inventor
敏朗 廣江
敏行 大崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dainippon Screen Manufacturing Co Ltd
Original Assignee
Dainippon Screen Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dainippon Screen Manufacturing Co Ltd filed Critical Dainippon Screen Manufacturing Co Ltd
Priority to JP1989026692U priority Critical patent/JP2513375Y2/ja
Publication of JPH02112303U publication Critical patent/JPH02112303U/ja
Application granted granted Critical
Publication of JP2513375Y2 publication Critical patent/JP2513375Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1989026692U 1988-10-28 1989-03-10 高粘度処理液による基板処理装置における処理液循環装置 Expired - Lifetime JP2513375Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989026692U JP2513375Y2 (ja) 1988-10-28 1989-03-10 高粘度処理液による基板処理装置における処理液循環装置

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP63-270761 1988-10-28
JP27076188 1988-10-28
JP1989026692U JP2513375Y2 (ja) 1988-10-28 1989-03-10 高粘度処理液による基板処理装置における処理液循環装置

Publications (2)

Publication Number Publication Date
JPH02112303U JPH02112303U (enExample) 1990-09-07
JP2513375Y2 true JP2513375Y2 (ja) 1996-10-02

Family

ID=31497357

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989026692U Expired - Lifetime JP2513375Y2 (ja) 1988-10-28 1989-03-10 高粘度処理液による基板処理装置における処理液循環装置

Country Status (1)

Country Link
JP (1) JP2513375Y2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0812854B2 (ja) * 1993-01-22 1996-02-07 日本電気株式会社 ウェットエッチング装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4879357A (enExample) * 1972-01-27 1973-10-24
JPS5347421U (enExample) * 1976-09-27 1978-04-21
JPS5676013U (enExample) * 1979-11-16 1981-06-20

Also Published As

Publication number Publication date
JPH02112303U (enExample) 1990-09-07

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