JP2512050Y2 - 非接触検出装置における観察装置 - Google Patents
非接触検出装置における観察装置Info
- Publication number
- JP2512050Y2 JP2512050Y2 JP1986021623U JP2162386U JP2512050Y2 JP 2512050 Y2 JP2512050 Y2 JP 2512050Y2 JP 1986021623 U JP1986021623 U JP 1986021623U JP 2162386 U JP2162386 U JP 2162386U JP 2512050 Y2 JP2512050 Y2 JP 2512050Y2
- Authority
- JP
- Japan
- Prior art keywords
- optical system
- observation
- light
- detection
- contact detection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000001514 detection method Methods 0.000 title claims description 20
- 230000003287 optical effect Effects 0.000 claims description 37
- 238000005259 measurement Methods 0.000 claims description 23
- 238000006073 displacement reaction Methods 0.000 claims description 3
- 238000000034 method Methods 0.000 description 6
- 201000009310 astigmatism Diseases 0.000 description 4
- 238000003708 edge detection Methods 0.000 description 4
- 230000010287 polarization Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 230000004907 flux Effects 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1986021623U JP2512050Y2 (ja) | 1986-02-18 | 1986-02-18 | 非接触検出装置における観察装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1986021623U JP2512050Y2 (ja) | 1986-02-18 | 1986-02-18 | 非接触検出装置における観察装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS62134016U JPS62134016U (enrdf_load_html_response) | 1987-08-24 |
JP2512050Y2 true JP2512050Y2 (ja) | 1996-09-25 |
Family
ID=30818231
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1986021623U Expired - Lifetime JP2512050Y2 (ja) | 1986-02-18 | 1986-02-18 | 非接触検出装置における観察装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2512050Y2 (enrdf_load_html_response) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07117372B2 (ja) * | 1988-01-14 | 1995-12-18 | 松下電器産業株式会社 | 溶接線検出装置 |
JP4466560B2 (ja) * | 2002-10-30 | 2010-05-26 | 凸版印刷株式会社 | 配線パターンの検査装置、検査方法、検出装置および検出方法 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5767844A (en) * | 1980-10-15 | 1982-04-24 | Nippon Kogaku Kk <Nikon> | Surface inspecting device |
JPS57135306A (en) * | 1981-02-16 | 1982-08-20 | Toyo Kogaku Kogyo Kk | Measuring method of microsubstance |
JPS59100805A (ja) * | 1982-12-01 | 1984-06-11 | Canon Inc | 物体観察装置 |
JPS60186705A (ja) * | 1984-03-06 | 1985-09-24 | Agency Of Ind Science & Technol | 光学式粗さ計 |
-
1986
- 1986-02-18 JP JP1986021623U patent/JP2512050Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPS62134016U (enrdf_load_html_response) | 1987-08-24 |
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