JP2512050Y2 - 非接触検出装置における観察装置 - Google Patents

非接触検出装置における観察装置

Info

Publication number
JP2512050Y2
JP2512050Y2 JP1986021623U JP2162386U JP2512050Y2 JP 2512050 Y2 JP2512050 Y2 JP 2512050Y2 JP 1986021623 U JP1986021623 U JP 1986021623U JP 2162386 U JP2162386 U JP 2162386U JP 2512050 Y2 JP2512050 Y2 JP 2512050Y2
Authority
JP
Japan
Prior art keywords
optical system
observation
light
detection
contact detection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1986021623U
Other languages
English (en)
Japanese (ja)
Other versions
JPS62134016U (enrdf_load_html_response
Inventor
高男 稲葉
Original Assignee
株式会社 東京精密
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社 東京精密 filed Critical 株式会社 東京精密
Priority to JP1986021623U priority Critical patent/JP2512050Y2/ja
Publication of JPS62134016U publication Critical patent/JPS62134016U/ja
Application granted granted Critical
Publication of JP2512050Y2 publication Critical patent/JP2512050Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP1986021623U 1986-02-18 1986-02-18 非接触検出装置における観察装置 Expired - Lifetime JP2512050Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986021623U JP2512050Y2 (ja) 1986-02-18 1986-02-18 非接触検出装置における観察装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986021623U JP2512050Y2 (ja) 1986-02-18 1986-02-18 非接触検出装置における観察装置

Publications (2)

Publication Number Publication Date
JPS62134016U JPS62134016U (enrdf_load_html_response) 1987-08-24
JP2512050Y2 true JP2512050Y2 (ja) 1996-09-25

Family

ID=30818231

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986021623U Expired - Lifetime JP2512050Y2 (ja) 1986-02-18 1986-02-18 非接触検出装置における観察装置

Country Status (1)

Country Link
JP (1) JP2512050Y2 (enrdf_load_html_response)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07117372B2 (ja) * 1988-01-14 1995-12-18 松下電器産業株式会社 溶接線検出装置
JP4466560B2 (ja) * 2002-10-30 2010-05-26 凸版印刷株式会社 配線パターンの検査装置、検査方法、検出装置および検出方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5767844A (en) * 1980-10-15 1982-04-24 Nippon Kogaku Kk <Nikon> Surface inspecting device
JPS57135306A (en) * 1981-02-16 1982-08-20 Toyo Kogaku Kogyo Kk Measuring method of microsubstance
JPS59100805A (ja) * 1982-12-01 1984-06-11 Canon Inc 物体観察装置
JPS60186705A (ja) * 1984-03-06 1985-09-24 Agency Of Ind Science & Technol 光学式粗さ計

Also Published As

Publication number Publication date
JPS62134016U (enrdf_load_html_response) 1987-08-24

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