JP2511314Y2 - 露光光路形成装置 - Google Patents
露光光路形成装置Info
- Publication number
- JP2511314Y2 JP2511314Y2 JP1989095160U JP9516089U JP2511314Y2 JP 2511314 Y2 JP2511314 Y2 JP 2511314Y2 JP 1989095160 U JP1989095160 U JP 1989095160U JP 9516089 U JP9516089 U JP 9516089U JP 2511314 Y2 JP2511314 Y2 JP 2511314Y2
- Authority
- JP
- Japan
- Prior art keywords
- mirror
- optical path
- mirrors
- pair
- angle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000003287 optical effect Effects 0.000 title claims description 48
- 239000011521 glass Substances 0.000 description 5
- 238000000034 method Methods 0.000 description 4
- 230000036544 posture Effects 0.000 description 3
- 230000004907 flux Effects 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
Landscapes
- Exposure Or Original Feeding In Electrophotography (AREA)
- Optical Systems Of Projection Type Copiers (AREA)
- Light Sources And Details Of Projection-Printing Devices (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1989095160U JP2511314Y2 (ja) | 1989-08-11 | 1989-08-11 | 露光光路形成装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1989095160U JP2511314Y2 (ja) | 1989-08-11 | 1989-08-11 | 露光光路形成装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0335536U JPH0335536U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1991-04-08 |
JP2511314Y2 true JP2511314Y2 (ja) | 1996-09-25 |
Family
ID=31644440
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1989095160U Expired - Lifetime JP2511314Y2 (ja) | 1989-08-11 | 1989-08-11 | 露光光路形成装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2511314Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6097335A (ja) * | 1983-11-01 | 1985-05-31 | Matsushita Electric Ind Co Ltd | 光学装置 |
-
1989
- 1989-08-11 JP JP1989095160U patent/JP2511314Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH0335536U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1991-04-08 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
EXPY | Cancellation because of completion of term |