JP2509076Y2 - 露光装置 - Google Patents

露光装置

Info

Publication number
JP2509076Y2
JP2509076Y2 JP1988135624U JP13562488U JP2509076Y2 JP 2509076 Y2 JP2509076 Y2 JP 2509076Y2 JP 1988135624 U JP1988135624 U JP 1988135624U JP 13562488 U JP13562488 U JP 13562488U JP 2509076 Y2 JP2509076 Y2 JP 2509076Y2
Authority
JP
Japan
Prior art keywords
slit
light source
axis direction
axis
electron beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1988135624U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0258227U (enExample
Inventor
文夫 阿部
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP1988135624U priority Critical patent/JP2509076Y2/ja
Publication of JPH0258227U publication Critical patent/JPH0258227U/ja
Application granted granted Critical
Publication of JP2509076Y2 publication Critical patent/JP2509076Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Projection-Type Copiers In General (AREA)
  • Optical Systems Of Projection Type Copiers (AREA)
  • Formation Of Various Coating Films On Cathode Ray Tubes And Lamps (AREA)
JP1988135624U 1988-10-18 1988-10-18 露光装置 Expired - Lifetime JP2509076Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988135624U JP2509076Y2 (ja) 1988-10-18 1988-10-18 露光装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988135624U JP2509076Y2 (ja) 1988-10-18 1988-10-18 露光装置

Publications (2)

Publication Number Publication Date
JPH0258227U JPH0258227U (enExample) 1990-04-26
JP2509076Y2 true JP2509076Y2 (ja) 1996-08-28

Family

ID=31395418

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988135624U Expired - Lifetime JP2509076Y2 (ja) 1988-10-18 1988-10-18 露光装置

Country Status (1)

Country Link
JP (1) JP2509076Y2 (enExample)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62281230A (ja) * 1986-05-29 1987-12-07 Nec Corp カラ−受像管螢光面の露光装置

Also Published As

Publication number Publication date
JPH0258227U (enExample) 1990-04-26

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