JP2505476Y2 - 基板収納カセット載置台 - Google Patents

基板収納カセット載置台

Info

Publication number
JP2505476Y2
JP2505476Y2 JP8903490U JP8903490U JP2505476Y2 JP 2505476 Y2 JP2505476 Y2 JP 2505476Y2 JP 8903490 U JP8903490 U JP 8903490U JP 8903490 U JP8903490 U JP 8903490U JP 2505476 Y2 JP2505476 Y2 JP 2505476Y2
Authority
JP
Japan
Prior art keywords
substrate
cassette
storage cassette
substrate storage
transfer arm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP8903490U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0446545U (en:Method
Inventor
健男 岡本
正美 大谷
義光 福冨
昭弘 東
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dainippon Screen Manufacturing Co Ltd
Original Assignee
Dainippon Screen Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dainippon Screen Manufacturing Co Ltd filed Critical Dainippon Screen Manufacturing Co Ltd
Priority to JP8903490U priority Critical patent/JP2505476Y2/ja
Publication of JPH0446545U publication Critical patent/JPH0446545U/ja
Application granted granted Critical
Publication of JP2505476Y2 publication Critical patent/JP2505476Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP8903490U 1990-08-24 1990-08-24 基板収納カセット載置台 Expired - Lifetime JP2505476Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8903490U JP2505476Y2 (ja) 1990-08-24 1990-08-24 基板収納カセット載置台

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8903490U JP2505476Y2 (ja) 1990-08-24 1990-08-24 基板収納カセット載置台

Publications (2)

Publication Number Publication Date
JPH0446545U JPH0446545U (en:Method) 1992-04-21
JP2505476Y2 true JP2505476Y2 (ja) 1996-07-31

Family

ID=31822738

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8903490U Expired - Lifetime JP2505476Y2 (ja) 1990-08-24 1990-08-24 基板収納カセット載置台

Country Status (1)

Country Link
JP (1) JP2505476Y2 (en:Method)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4522622B2 (ja) * 2001-09-14 2010-08-11 株式会社ディスコ 板状物搬出入装置並びに板状物の搬出方法及び搬入方法

Also Published As

Publication number Publication date
JPH0446545U (en:Method) 1992-04-21

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