JP2505060Y2 - イオン源 - Google Patents

イオン源

Info

Publication number
JP2505060Y2
JP2505060Y2 JP1990091346U JP9134690U JP2505060Y2 JP 2505060 Y2 JP2505060 Y2 JP 2505060Y2 JP 1990091346 U JP1990091346 U JP 1990091346U JP 9134690 U JP9134690 U JP 9134690U JP 2505060 Y2 JP2505060 Y2 JP 2505060Y2
Authority
JP
Japan
Prior art keywords
gas
filament
ion source
plasma generation
generation container
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1990091346U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0449447U (enrdf_load_stackoverflow
Inventor
幸平 関根
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissin Electric Co Ltd
Original Assignee
Nissin Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissin Electric Co Ltd filed Critical Nissin Electric Co Ltd
Priority to JP1990091346U priority Critical patent/JP2505060Y2/ja
Publication of JPH0449447U publication Critical patent/JPH0449447U/ja
Application granted granted Critical
Publication of JP2505060Y2 publication Critical patent/JP2505060Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP1990091346U 1990-08-30 1990-08-30 イオン源 Expired - Lifetime JP2505060Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990091346U JP2505060Y2 (ja) 1990-08-30 1990-08-30 イオン源

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990091346U JP2505060Y2 (ja) 1990-08-30 1990-08-30 イオン源

Publications (2)

Publication Number Publication Date
JPH0449447U JPH0449447U (enrdf_load_stackoverflow) 1992-04-27
JP2505060Y2 true JP2505060Y2 (ja) 1996-07-24

Family

ID=31826878

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990091346U Expired - Lifetime JP2505060Y2 (ja) 1990-08-30 1990-08-30 イオン源

Country Status (1)

Country Link
JP (1) JP2505060Y2 (enrdf_load_stackoverflow)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62237652A (ja) * 1986-04-08 1987-10-17 Nec Corp デユオプラズマトロンイオン源
JP2633974B2 (ja) * 1990-04-18 1997-07-23 株式会社日立製作所 試料のイオン化および質量分析のための装置

Also Published As

Publication number Publication date
JPH0449447U (enrdf_load_stackoverflow) 1992-04-27

Similar Documents

Publication Publication Date Title
US6259210B1 (en) Power control apparatus for an ION source having an indirectly heated cathode
KR0148385B1 (ko) 이온 발생장치
JPH0531260B2 (enrdf_load_stackoverflow)
JPS6169185A (ja) 金属蒸気レ−ザ装置
JP2505060Y2 (ja) イオン源
JP2001307650A (ja) イオン源の運転方法およびイオンビーム照射装置
JP2643763B2 (ja) イオン打込み方法
JPH0547338A (ja) イオンビーム中性化装置
JPS61177728A (ja) 低エネルギイオン化粒子照射装置
KR20020036738A (ko) 인듐 이온 빔의 발생방법, 발생장치 및 이온소스
JPH05314940A (ja) イオンビ−ム応用装置のイオン源
JPS6271147A (ja) 蒸発炉付イオン源
JPH051895Y2 (enrdf_load_stackoverflow)
JP2572726B2 (ja) 蒸発炉付イオン源を用いた半導体装置の製造方法
JPH0836983A (ja) イオン源
JP2001510928A (ja) 間接加熱される陰極を有するイオン源の出力制御装置
JPH065100U (ja) イオン源
JP2586836B2 (ja) イオン源装置
JPH0542603Y2 (enrdf_load_stackoverflow)
JPH07320671A (ja) イオン打込み装置のイオン源および固体ソースの加熱方法
JPH05266845A (ja) イオン源
JPH05325871A (ja) イオン注入装置
JPH042031A (ja) イオン源装置
JP3154018B2 (ja) イオン源
JPH0676749A (ja) イオン源