JP2500830Y2 - 集積回路検査装置 - Google Patents

集積回路検査装置

Info

Publication number
JP2500830Y2
JP2500830Y2 JP1990007628U JP762890U JP2500830Y2 JP 2500830 Y2 JP2500830 Y2 JP 2500830Y2 JP 1990007628 U JP1990007628 U JP 1990007628U JP 762890 U JP762890 U JP 762890U JP 2500830 Y2 JP2500830 Y2 JP 2500830Y2
Authority
JP
Japan
Prior art keywords
end portions
end portion
contact
plates
contact element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1990007628U
Other languages
English (en)
Japanese (ja)
Other versions
JPH02111081U (enExample
Inventor
ボネリ リカルド
プローン グンター
Original Assignee
ミネソタ マイニング アンド マニユフアクチユアリング カンパニー
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ミネソタ マイニング アンド マニユフアクチユアリング カンパニー filed Critical ミネソタ マイニング アンド マニユフアクチユアリング カンパニー
Publication of JPH02111081U publication Critical patent/JPH02111081U/ja
Application granted granted Critical
Publication of JP2500830Y2 publication Critical patent/JP2500830Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07357—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with flexible bodies, e.g. buckling beams

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Connecting Device With Holders (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
JP1990007628U 1989-02-02 1990-01-31 集積回路検査装置 Expired - Lifetime JP2500830Y2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE3903060A DE3903060A1 (de) 1989-02-02 1989-02-02 Vorrichtung zum pruefen von integrierten schaltungsanordnungen
DE3903060.1 1989-02-02

Publications (2)

Publication Number Publication Date
JPH02111081U JPH02111081U (enExample) 1990-09-05
JP2500830Y2 true JP2500830Y2 (ja) 1996-06-12

Family

ID=6373279

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990007628U Expired - Lifetime JP2500830Y2 (ja) 1989-02-02 1990-01-31 集積回路検査装置

Country Status (3)

Country Link
US (1) US5055777A (enExample)
JP (1) JP2500830Y2 (enExample)
DE (1) DE3903060A1 (enExample)

Families Citing this family (40)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5247250A (en) * 1992-03-27 1993-09-21 Minnesota Mining And Manufacturing Company Integrated circuit test socket
JPH0677467B2 (ja) * 1992-12-25 1994-09-28 山一電機株式会社 Ｉｃソケット
US5489854A (en) * 1993-04-01 1996-02-06 Analog Devices, Inc. IC chip test socket with double-ended spring biased contacts
US20020053734A1 (en) 1993-11-16 2002-05-09 Formfactor, Inc. Probe card assembly and kit, and methods of making same
US7073254B2 (en) 1993-11-16 2006-07-11 Formfactor, Inc. Method for mounting a plurality of spring contact elements
US5772451A (en) * 1993-11-16 1998-06-30 Form Factor, Inc. Sockets for electronic components and methods of connecting to electronic components
GB2291544B (en) * 1994-07-12 1996-10-02 Everett Charles Tech Electrical connectors
US6229320B1 (en) * 1994-11-18 2001-05-08 Fujitsu Limited IC socket, a test method using the same and an IC socket mounting mechanism
US20020004320A1 (en) * 1995-05-26 2002-01-10 David V. Pedersen Attaratus for socketably receiving interconnection elements of an electronic component
US5597317A (en) * 1995-08-11 1997-01-28 W. L. Gore & Associates, Inc. Surface mating electrical connector
US5729149A (en) * 1995-09-29 1998-03-17 Motorola, Inc. Apparatus for holding a testing substrate in a semiconductor wafer tester and method for using the same
US5791914A (en) * 1995-11-21 1998-08-11 Loranger International Corporation Electrical socket with floating guide plate
KR100212169B1 (ko) * 1996-02-13 1999-08-02 오쿠보 마사오 프로브, 프로브의 제조, 그리고 프로브를 사용한 수직동작형 프로브 카드 어셈블리
US8033838B2 (en) 1996-02-21 2011-10-11 Formfactor, Inc. Microelectronic contact structure
US5939892A (en) * 1996-04-12 1999-08-17 Methode Electronics, Inc. Circuit board testing fixture
US5788524A (en) * 1996-07-22 1998-08-04 Itt Manufacturing Enterprises Inc. Test clip with standard interface
JPH10227830A (ja) * 1996-07-31 1998-08-25 Ando Electric Co Ltd Ｉｃテスタ用テストボード
JP3302576B2 (ja) * 1996-09-30 2002-07-15 アジレント・テクノロジー株式会社 コネクタ付きプローブカード及びｄｕｔ接続装置
US5764072A (en) * 1996-12-20 1998-06-09 Probe Technology Dual contact probe assembly for testing integrated circuits
US5831160A (en) * 1997-05-22 1998-11-03 Hewlett-Packard Company Test fixture clamping system
US5952843A (en) * 1998-03-24 1999-09-14 Vinh; Nguyen T. Variable contact pressure probe
US6160410A (en) * 1998-03-24 2000-12-12 Cypress Semiconductor Corporation Apparatus, method and kit for adjusting integrated circuit lead deflection upon a test socket conductor
US6359452B1 (en) * 1998-07-22 2002-03-19 Nortel Networks Limited Method and apparatus for testing an electronic assembly
US6644982B1 (en) 1998-12-04 2003-11-11 Formfactor, Inc. Method and apparatus for the transport and tracking of an electronic component
JP2001228192A (ja) * 2000-02-18 2001-08-24 Oht Inc 検査装置及び検査装置の保持具
JP2001326046A (ja) * 2000-05-17 2001-11-22 Enplas Corp コンタクトピン集合体、コンタクトピン組立体及び電気部品用ソケット
US7254889B1 (en) * 2000-09-08 2007-08-14 Gabe Cherian Interconnection devices
US6570398B2 (en) * 2001-09-24 2003-05-27 Texas Instruments Incorporated Socket apparatus particularly adapted for LGA type semiconductor devices
JP4365066B2 (ja) * 2002-04-11 2009-11-18 株式会社エンプラス 電気部品用ソケット
US7262615B2 (en) * 2005-10-31 2007-08-28 Freescale Semiconductor, Inc. Method and apparatus for testing a semiconductor structure having top-side and bottom-side connections
DE102006054735A1 (de) * 2005-12-05 2007-06-06 Feinmetall Gmbh Elektrische Kontakteinrichtung und elektrische Prüfvorrichtung für die Prüfung eines elektrischen Prüflings
US7491096B1 (en) * 2007-07-31 2009-02-17 Phoenix Contact Development & Manufacturing Inc. Modular terminal block
CN101458970A (zh) * 2007-12-14 2009-06-17 鸿富锦精密工业（深圳）有限公司 电路板测试夹具
EP2110673A1 (en) * 2008-04-17 2009-10-21 Technoprobe S.p.A Testing head having vertical probes provided with stopping means to avoid their upward and downward escape from respective guide holes
US20120139574A1 (en) * 2010-12-06 2012-06-07 International Business Machines Corporation Vertical probe tip rotational scrub and method
EP3268752A1 (en) 2015-03-13 2018-01-17 Technoprobe S.p.A Testing head with vertical probes having an improved sliding movement within respective guide holes and correct holding of the probes within the testing head under different operative conditions
JP2018179721A (ja) * 2017-04-12 2018-11-15 株式会社日本マイクロニクス 電気的接続装置
JP6989754B2 (ja) * 2017-05-02 2022-01-12 山一電機株式会社 コンタクト端子、コンタクトピンモジュール、および、それを備える半導体装置用ソケット
DE102018111216B3 (de) * 2018-05-09 2019-10-17 Semikron Elektronik Gmbh & Co. Kg Schaltungsanordnung zur Strommessung in einer Leistungshalbleitergruppe und Leistungshalbleiterbaugruppe hiermit
TWI831307B (zh) * 2022-07-26 2024-02-01 思達科技股份有限公司 導板結構及探針陣列

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55114962A (en) * 1979-02-28 1980-09-04 Ricoh Co Ltd Surface potentiometer
DE3343274A1 (de) * 1983-11-30 1985-06-05 Feinmetall Gmbh, 7033 Herrenberg Kontaktiervorrichtung
ATE92191T1 (de) * 1987-03-31 1993-08-15 Siemens Ag Vorrichtung fuer die elektrische funktionspruefung von verdrahtungsfeldern, insbesondere von leiterplatten.

Also Published As

Publication number Publication date
DE3903060A1 (de) 1990-08-09
JPH02111081U (enExample) 1990-09-05
US5055777A (en) 1991-10-08

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