JP2500421Y2 - 低圧化学気相生成装置 - Google Patents

低圧化学気相生成装置

Info

Publication number
JP2500421Y2
JP2500421Y2 JP13523789U JP13523789U JP2500421Y2 JP 2500421 Y2 JP2500421 Y2 JP 2500421Y2 JP 13523789 U JP13523789 U JP 13523789U JP 13523789 U JP13523789 U JP 13523789U JP 2500421 Y2 JP2500421 Y2 JP 2500421Y2
Authority
JP
Japan
Prior art keywords
reaction tube
reaction
quartz
gas
chemical vapor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP13523789U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0373429U (sv
Inventor
誠 古野
幹夫 小泉
Original Assignee
国際電気株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 国際電気株式会社 filed Critical 国際電気株式会社
Priority to JP13523789U priority Critical patent/JP2500421Y2/ja
Publication of JPH0373429U publication Critical patent/JPH0373429U/ja
Application granted granted Critical
Publication of JP2500421Y2 publication Critical patent/JP2500421Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Chemical Vapour Deposition (AREA)
JP13523789U 1989-11-20 1989-11-20 低圧化学気相生成装置 Expired - Lifetime JP2500421Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13523789U JP2500421Y2 (ja) 1989-11-20 1989-11-20 低圧化学気相生成装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13523789U JP2500421Y2 (ja) 1989-11-20 1989-11-20 低圧化学気相生成装置

Publications (2)

Publication Number Publication Date
JPH0373429U JPH0373429U (sv) 1991-07-24
JP2500421Y2 true JP2500421Y2 (ja) 1996-06-05

Family

ID=31682517

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13523789U Expired - Lifetime JP2500421Y2 (ja) 1989-11-20 1989-11-20 低圧化学気相生成装置

Country Status (1)

Country Link
JP (1) JP2500421Y2 (sv)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4593814B2 (ja) * 2001-03-19 2010-12-08 東京エレクトロン株式会社 縦型熱処理装置

Also Published As

Publication number Publication date
JPH0373429U (sv) 1991-07-24

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