JP2025092973A5 - - Google Patents

Info

Publication number
JP2025092973A5
JP2025092973A5 JP2023208425A JP2023208425A JP2025092973A5 JP 2025092973 A5 JP2025092973 A5 JP 2025092973A5 JP 2023208425 A JP2023208425 A JP 2023208425A JP 2023208425 A JP2023208425 A JP 2023208425A JP 2025092973 A5 JP2025092973 A5 JP 2025092973A5
Authority
JP
Japan
Prior art keywords
exhaust gas
gas treatment
inner cylinder
treatment apparatus
liquid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2023208425A
Other languages
English (en)
Japanese (ja)
Other versions
JP2025092973A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2023208425A priority Critical patent/JP2025092973A/ja
Priority claimed from JP2023208425A external-priority patent/JP2025092973A/ja
Priority to TW113147266A priority patent/TW202528034A/zh
Priority to KR1020240179504A priority patent/KR20250089439A/ko
Priority to EP24217680.8A priority patent/EP4570359A1/en
Priority to US18/973,341 priority patent/US20250186929A1/en
Priority to CN202411796566.XA priority patent/CN120132581A/zh
Publication of JP2025092973A publication Critical patent/JP2025092973A/ja
Publication of JP2025092973A5 publication Critical patent/JP2025092973A5/ja
Pending legal-status Critical Current

Links

JP2023208425A 2023-12-11 2023-12-11 排ガス処理装置 Pending JP2025092973A (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2023208425A JP2025092973A (ja) 2023-12-11 2023-12-11 排ガス処理装置
TW113147266A TW202528034A (zh) 2023-12-11 2024-12-05 排氣處理裝置
KR1020240179504A KR20250089439A (ko) 2023-12-11 2024-12-05 배기 가스 처리 장치
EP24217680.8A EP4570359A1 (en) 2023-12-11 2024-12-05 Exhaust gas treatment apparatus
US18/973,341 US20250186929A1 (en) 2023-12-11 2024-12-09 Exahust gas treatment apparatus
CN202411796566.XA CN120132581A (zh) 2023-12-11 2024-12-09 废气处理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2023208425A JP2025092973A (ja) 2023-12-11 2023-12-11 排ガス処理装置

Publications (2)

Publication Number Publication Date
JP2025092973A JP2025092973A (ja) 2025-06-23
JP2025092973A5 true JP2025092973A5 (https=) 2026-04-03

Family

ID=94432683

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023208425A Pending JP2025092973A (ja) 2023-12-11 2023-12-11 排ガス処理装置

Country Status (6)

Country Link
US (1) US20250186929A1 (https=)
EP (1) EP4570359A1 (https=)
JP (1) JP2025092973A (https=)
KR (1) KR20250089439A (https=)
CN (1) CN120132581A (https=)
TW (1) TW202528034A (https=)

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1998029178A1 (en) * 1996-12-31 1998-07-09 Atmi Ecosys Corporation Inlet structures for introducing a particulate solids-containing and/or solids-forming gas stream to a gas processing system
US6759018B1 (en) * 1997-05-16 2004-07-06 Advanced Technology Materials, Inc. Method for point-of-use treatment of effluent gas streams
JP4937886B2 (ja) 2006-12-05 2012-05-23 株式会社荏原製作所 燃焼式排ガス処理装置
TWI398293B (zh) * 2010-11-08 2013-06-11 東服企業股份有限公司 Cyclone Oxygen Combustion Unit for Treatment of Emissions from Semiconductor Processes
JP6659461B2 (ja) 2016-05-23 2020-03-04 株式会社荏原製作所 排ガス処理装置
GB2561191B (en) * 2017-04-04 2020-08-26 Edwards Ltd Apparatus for treating gases and a method of reducing deposition on a surface in such apparatus

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