JP6138144B2 - チャンバを空にして該チャンバから取り出されたガスを浄化するための装置及び方法 - Google Patents
チャンバを空にして該チャンバから取り出されたガスを浄化するための装置及び方法 Download PDFInfo
- Publication number
- JP6138144B2 JP6138144B2 JP2014546495A JP2014546495A JP6138144B2 JP 6138144 B2 JP6138144 B2 JP 6138144B2 JP 2014546495 A JP2014546495 A JP 2014546495A JP 2014546495 A JP2014546495 A JP 2014546495A JP 6138144 B2 JP6138144 B2 JP 6138144B2
- Authority
- JP
- Japan
- Prior art keywords
- vacuum pump
- working fluid
- gas
- pressure
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000000034 method Methods 0.000 title claims description 22
- 239000007789 gas Substances 0.000 title description 50
- 239000012530 fluid Substances 0.000 claims description 65
- 230000006835 compression Effects 0.000 claims description 21
- 238000007906 compression Methods 0.000 claims description 21
- 239000007788 liquid Substances 0.000 claims description 20
- 238000004140 cleaning Methods 0.000 claims description 11
- 238000002485 combustion reaction Methods 0.000 claims description 9
- 239000000126 substance Substances 0.000 claims description 8
- 239000002904 solvent Substances 0.000 claims description 4
- 239000000463 material Substances 0.000 description 9
- 238000005229 chemical vapour deposition Methods 0.000 description 7
- 230000002378 acidificating effect Effects 0.000 description 6
- 238000009833 condensation Methods 0.000 description 4
- 230000005494 condensation Effects 0.000 description 4
- 238000000576 coating method Methods 0.000 description 3
- 238000005137 deposition process Methods 0.000 description 3
- 238000000746 purification Methods 0.000 description 3
- 238000007789 sealing Methods 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- NLXLAEXVIDQMFP-UHFFFAOYSA-N Ammonia chloride Chemical compound [NH4+].[Cl-] NLXLAEXVIDQMFP-UHFFFAOYSA-N 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 2
- 239000012670 alkaline solution Substances 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- 239000011343 solid material Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 238000009825 accumulation Methods 0.000 description 1
- 239000003929 acidic solution Substances 0.000 description 1
- 235000019270 ammonium chloride Nutrition 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 238000007084 catalytic combustion reaction Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000006837 decompression Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000013067 intermediate product Substances 0.000 description 1
- 150000002736 metal compounds Chemical class 0.000 description 1
- 239000003345 natural gas Substances 0.000 description 1
- 239000012071 phase Substances 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 230000002000 scavenging effect Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000007790 solid phase Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 231100000331 toxic Toxicity 0.000 description 1
- 230000002588 toxic effect Effects 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 238000005019 vapor deposition process Methods 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C19/00—Rotary-piston pumps with fluid ring or the like, specially adapted for elastic fluids
- F04C19/004—Details concerning the operating liquid, e.g. nature, separation, cooling, cleaning, control of the supply
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D47/00—Separating dispersed particles from gases, air or vapours by liquid as separating agent
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
- F04C23/005—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of dissimilar working principle
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
- F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
- F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
- F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2220/00—Application
- F04C2220/10—Vacuum
- F04C2220/12—Dry running
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2240/00—Components
- F04C2240/80—Other components
- F04C2240/81—Sensor, e.g. electronic sensor for control or monitoring
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2280/00—Arrangements for preventing or removing deposits or corrosion
- F04C2280/02—Preventing solid deposits in pumps, e.g. in vacuum pumps with chemical vapour deposition [CVD] processes
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Treating Waste Gases (AREA)
- Degasification And Air Bubble Elimination (AREA)
- Gas Separation By Absorption (AREA)
- Chemical Vapour Deposition (AREA)
- Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
Description
Claims (14)
- チャンバ(14)を空にして、該チャンバ(14)から取り出されたガスを、混入した異物から浄化するための、以下の特徴を有する装置にして、
a.乾燥圧縮真空ポンプ(15)であって、その入口(17)は、空にされるべきチャンバ(14)に接続されており、その出口(18)における状態が変動するにもかかわらず、その入口圧力を一定に保つのに適している乾燥圧縮真空ポンプ(15)と、
b.乾燥圧縮真空ポンプ(15)の上記出口(18)に接続されている中間ライン(19)と、
c.液体リング真空ポンプ(20)であって、その入口は、上記中間ライン(19)に接続されている液体リング真空ポンプ(20)と、を有しており、
上記乾燥圧縮真空ポンプ(15)の上記出口(18)及び/又は上記中間ライン(19)に、洗浄ガスを供給するための開口(22)が備えられており、
上記開口は、上記乾燥圧縮真空ポンプ(15)のハウジングとシャフトとの間に存在するギャップであることを特徴とする、装置。 - 上記乾燥圧縮真空ポンプ(15)は、上記入口(17)の側において、1mbarと40mbarの間の圧力を発生するように構成されていることを特徴とする、請求項1記載の装置。
- 上記乾燥圧縮真空ポンプ(15)は、上記入口(17)の側において、2mbarと30mbarの間の圧力を発生するように構成されていることを特徴とする、請求項1記載の装置。
- 上記乾燥圧縮真空ポンプ(15)は、上記入口(17)の側において、5mbarと20mbarの間の圧力を発生するように構成されていることを特徴とする、請求項1記載の装置。
- 上記乾燥圧縮真空ポンプ(15)は、上記中間ライン(19)において、80mbarと300mbarの間の圧力を発生するように構成されていることを特徴とする、請求項1〜4のいずれか一つに記載の装置。
- 上記乾燥圧縮真空ポンプ(15)は、上記中間ライン(19)において、100mbarと150mbarの間の圧力を発生するように構成されていることを特徴とする、請求項1〜4のいずれか一つに記載の装置。
- 上記液体リング真空ポンプ(20)は、作動流体用の入口(23)と出口(24)であって、ポンプ(20)の作動中に作動流体の流入と流出とを許容する入口(23)と出口(24)とを備えていることを特徴とする、請求項1〜6のいずれか一つに記載の装置。
- 上記作動流体の伝導率を測定するためのセンサ(28)が備えられていることを特徴とする、請求項1〜7のいずれか一つに記載の装置。
- 上記作動流体における異物の濃度の関数として、作動流体の流入と流出とを調整する制御装置(30)が備えられていることを特徴とする、請求項7又は8記載の装置。
- 上記液体リング真空ポンプ(20)の作動流体は、上記ガスに含まれる異物と適合する溶媒を含有していることを特徴とする、請求項1〜9のいずれか一つに記載の装置。
- 作動流体のpH値を測定するためのpHセンサ(29)が備えられていることを特徴とする、請求項1〜10のいずれか一つに記載の装置。
- 上記pHセンサからの測定値の関数として、作動流体の上記pH値を調整するように構成されている制御装置(30)が備えられていることを特徴とする、請求項11記載の装置。
- 上記中間ライン(19)には、燃焼装置(34)が配置されていることを特徴とする、請求項1〜12のいずれか一つに記載の装置。
- チャンバ(14)を空にして、該チャンバ(14)から取り出されたガスを、混入した異物から浄化するための、以下のステップを有する方法にして、
a.ガスをチャンバ(14)から抜き取るステップと、
b.その圧力を大気圧より低い値まで高めるステップであって、たとえ、その出口圧力が変動したとしても、その入口圧力を一定に維持するのに適しているポンプ(15)を用いる、ステップと、
c.上記乾燥圧縮真空ポンプ(15)の上記出口(18)で、及び/又は、上記乾燥圧縮真空ポンプ(15)と上記液体リング真空ポンプ(20)との間の中間ライン(19)で、洗浄ガスを供給するステップであって、該洗浄ガスが、上記乾燥圧縮真空ポンプ(15)のハウジングとシャフトとの間に存在するギャップを通して供給される、ステップと、
d.大気圧でガスを出力する液体リング真空ポンプ(20)に更に上記ガスを案内するステップと、を有する方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP11193573 | 2011-12-14 | ||
EP11193573.0 | 2011-12-14 | ||
PCT/EP2012/075262 WO2013087713A2 (de) | 2011-12-14 | 2012-12-12 | Vorrichtung und verfahren zum evakuieren eines raums und zum reinigen des aus dem raum abgesaugten gases |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2015500944A JP2015500944A (ja) | 2015-01-08 |
JP2015500944A5 JP2015500944A5 (ja) | 2015-11-26 |
JP6138144B2 true JP6138144B2 (ja) | 2017-05-31 |
Family
ID=47326206
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2014546495A Active JP6138144B2 (ja) | 2011-12-14 | 2012-12-12 | チャンバを空にして該チャンバから取り出されたガスを浄化するための装置及び方法 |
Country Status (6)
Country | Link |
---|---|
US (2) | US20150068399A1 (ja) |
EP (1) | EP2791508B1 (ja) |
JP (1) | JP6138144B2 (ja) |
KR (1) | KR101935336B1 (ja) |
CN (1) | CN104066989B (ja) |
WO (1) | WO2013087713A2 (ja) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2540582A (en) * | 2015-07-22 | 2017-01-25 | Edwards Ltd | Apparatus for evacuating a corrosive effluent gas stream from a processing chamber |
CN108344221B (zh) * | 2017-12-22 | 2024-05-28 | 佛山精迅能冷链科技有限公司 | 一种可调控压力的真空预冷机 |
FR3112086B1 (fr) * | 2020-07-09 | 2022-07-08 | Pfeiffer Vacuum | Dispositif de traitement des gaz et ligne de vide |
FR3112177B1 (fr) * | 2020-07-09 | 2022-07-08 | Pfeiffer Vacuum | Ligne de vide et procédé de contrôle d’une ligne de vide |
FR3129851A1 (fr) * | 2021-12-08 | 2023-06-09 | Pfeiffer Vacuum | Ligne de vide et installation comportant la ligne de vide |
WO2023160793A1 (en) * | 2022-02-24 | 2023-08-31 | Ihi Bernex Ag | Chemical vapor deposition apparatus |
Family Cites Families (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR1129872A (fr) * | 1954-08-21 | 1957-01-28 | Heraeus Gmbh W C | Pompe mécanique à vide poussé du type roots |
US3922110A (en) * | 1974-01-28 | 1975-11-25 | Henry Huse | Multi-stage vacuum pump |
DE2430314C3 (de) * | 1974-06-24 | 1982-11-25 | Siemens AG, 1000 Berlin und 8000 München | Flüssigkeitsring-Vakuumpumpe mit vorgeschaltetem Verdichter |
US3956072A (en) | 1975-08-21 | 1976-05-11 | Atlantic Fluidics, Inc. | Vapor distillation apparatus with two disparate compressors |
DE3425616A1 (de) * | 1984-07-12 | 1986-01-23 | Loewe Pumpenfabrik GmbH, 2120 Lüneburg | Anordnung zur minimierung des kuehlfluessigkeitsverbrauches insbes. bei fluessigkeitsring-vakuumpumpen o.dgl. |
US4699570A (en) * | 1986-03-07 | 1987-10-13 | Itt Industries, Inc | Vacuum pump system |
DE8807065U1 (ja) * | 1988-05-30 | 1989-09-28 | Siemens Ag, 1000 Berlin Und 8000 Muenchen, De | |
JPH0726623B2 (ja) * | 1990-03-28 | 1995-03-29 | 日本碍子株式会社 | 真空ユニット |
US5326383A (en) | 1990-04-10 | 1994-07-05 | Spoutvac Manufacturing Pty Ltd | Suction cleaning systems |
JP2527137Y2 (ja) | 1991-11-22 | 1997-02-26 | 株式会社トーツー創研 | 電話機用キャビネット |
DE4208151C2 (de) * | 1992-03-13 | 1994-03-17 | Hench Automatik App Masch | Verfahren zur Verringerung der Betriebsmittelverschmutzung bei Vakuumpumpen bei der Reinigung von Abgasen, insbesondere aus Vakuumpyrolyseanlagen |
DE4234169A1 (de) | 1992-10-12 | 1994-04-14 | Leybold Ag | Verfahren zum Betrieb einer trockenverdichteten Vakuumpumpe sowie für dieses Betriebsverfahren geeignete Vakuumpumpe |
JP3941147B2 (ja) * | 1997-02-27 | 2007-07-04 | 富士通株式会社 | 真空排気装置及びそのメンテナンス方法 |
JP2001207984A (ja) | 1999-11-17 | 2001-08-03 | Teijin Seiki Co Ltd | 真空排気装置 |
DE10048439C2 (de) * | 2000-09-29 | 2002-09-19 | Siemens Ag | Dampfturbinenanlage und Verfahren zum Betreiben einer Dampfturbinenanlage |
FR2822200B1 (fr) * | 2001-03-19 | 2003-09-26 | Cit Alcatel | Systeme de pompage pour gaz a faible conductivite thermique |
US6558131B1 (en) * | 2001-06-29 | 2003-05-06 | nash-elmo industries, l.l.c. | Liquid ring pumps with automatic control of seal liquid injection |
WO2003023229A1 (fr) * | 2001-09-06 | 2003-03-20 | Ulvac, Inc. | Systeme de pompe a vide et procede de fonctionnement d'un systeme de pompe a vide |
DE10214331A1 (de) * | 2002-03-28 | 2003-10-23 | Nash Elmo Ind Gmbh | Pumpeinrichtung, Verfahren zum Betreiben einer Pumpeinrichtung und dessen Verwendung bei einer Dampfturbinenanlage |
WO2004043566A2 (en) * | 2002-11-13 | 2004-05-27 | Deka Products Limited Partnership | Distillation with vapour pressurization |
GB2407132A (en) * | 2003-10-14 | 2005-04-20 | Boc Group Plc | Multiple vacuum pump system with additional pump for exhaust flow |
GB0505852D0 (en) * | 2005-03-22 | 2005-04-27 | Boc Group Plc | Method of treating a gas stream |
JP2008088879A (ja) * | 2006-09-29 | 2008-04-17 | Anest Iwata Corp | 真空排気装置 |
CN201193610Y (zh) * | 2008-04-29 | 2009-02-11 | 无锡市四方真空设备有限公司 | 闭式循环罗茨泵水环泵真空机组 |
WO2010019079A1 (en) * | 2008-08-11 | 2010-02-18 | Metso Power Ab | Method and system for treatment of malodorous gases emanating from a pulp mill |
-
2012
- 2012-12-12 CN CN201280061800.3A patent/CN104066989B/zh active Active
- 2012-12-12 KR KR1020147018745A patent/KR101935336B1/ko active IP Right Grant
- 2012-12-12 JP JP2014546495A patent/JP6138144B2/ja active Active
- 2012-12-12 US US14/364,802 patent/US20150068399A1/en not_active Abandoned
- 2012-12-12 EP EP12798777.4A patent/EP2791508B1/de active Active
- 2012-12-12 WO PCT/EP2012/075262 patent/WO2013087713A2/de active Application Filing
-
2020
- 2020-09-09 US US17/015,590 patent/US11802562B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
US20150068399A1 (en) | 2015-03-12 |
US20200408211A1 (en) | 2020-12-31 |
WO2013087713A3 (de) | 2013-12-27 |
EP2791508A2 (de) | 2014-10-22 |
KR20140107397A (ko) | 2014-09-04 |
KR101935336B1 (ko) | 2019-01-04 |
CN104066989A (zh) | 2014-09-24 |
US11802562B2 (en) | 2023-10-31 |
WO2013087713A2 (de) | 2013-06-20 |
EP2791508B1 (de) | 2019-03-06 |
CN104066989B (zh) | 2017-03-01 |
JP2015500944A (ja) | 2015-01-08 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US11802562B2 (en) | Device and method for evacuating a chamber and purifying the gas extracted from said chamber | |
US8480861B2 (en) | Method of treating gas | |
TWI388729B (zh) | 用於真空泵浦之前級預處理 | |
KR100821263B1 (ko) | 수분리 냉각 장치를 구비한 플라즈마 스크러버 시스템 및이를 이용한 유해가스 처리방법 | |
US20180166306A1 (en) | Quartz crystal microbalance utilization for foreline solids formation quantification | |
TWI362298B (en) | Pump cleaning | |
US20100024654A1 (en) | Trap device | |
US8834824B2 (en) | Method of treating a gas stream | |
KR20140064867A (ko) | 가스 스트림을 처리하기 위한 장치 | |
KR20150094536A (ko) | 습식세정기능을 가지는 수봉식 진공펌프 | |
JP2007021447A (ja) | ガス使用設備および排ガスの切り分け方法 | |
JP3617575B2 (ja) | 真空排気システム | |
US20110020142A1 (en) | Method of pumping gas | |
JP4583880B2 (ja) | 排ガスの処理方法および処理装置 | |
WO2017068609A1 (ja) | 排ガス処理装置 | |
EP3579964B1 (fr) | Dispositif pour la production et le traitement de flux gazeux a travers un volume de liquide regule automatiquement | |
KR20010051559A (ko) | 트랩장치 | |
CN202387305U (zh) | 尾气处理器循环水系统 | |
JP2010142677A (ja) | 半導体製造装置の排ガス処理システム |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
RD04 | Notification of resignation of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7424 Effective date: 20150630 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20151001 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20151001 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20160722 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20160802 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20161028 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20161214 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20170404 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20170425 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6138144 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |