FR3112177B1 - Ligne de vide et procédé de contrôle d’une ligne de vide - Google Patents

Ligne de vide et procédé de contrôle d’une ligne de vide Download PDF

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Publication number
FR3112177B1
FR3112177B1 FR2007251A FR2007251A FR3112177B1 FR 3112177 B1 FR3112177 B1 FR 3112177B1 FR 2007251 A FR2007251 A FR 2007251A FR 2007251 A FR2007251 A FR 2007251A FR 3112177 B1 FR3112177 B1 FR 3112177B1
Authority
FR
France
Prior art keywords
vacuum line
controlling
mode
injecting
dilution gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR2007251A
Other languages
English (en)
Other versions
FR3112177A1 (fr
Inventor
Pascal Moine
Thierry Neel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum SAS
Original Assignee
Pfeiffer Vacuum SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum SAS filed Critical Pfeiffer Vacuum SAS
Priority to FR2007251A priority Critical patent/FR3112177B1/fr
Priority to TW110121648A priority patent/TW202219389A/zh
Priority to JP2023501032A priority patent/JP2023532775A/ja
Priority to KR1020237004670A priority patent/KR20230034409A/ko
Priority to CN202180044762.XA priority patent/CN115803527A/zh
Priority to US18/004,252 priority patent/US20230294053A1/en
Priority to DE112021003709.9T priority patent/DE112021003709T5/de
Priority to PCT/EP2021/067177 priority patent/WO2022008249A1/fr
Publication of FR3112177A1 publication Critical patent/FR3112177A1/fr
Application granted granted Critical
Publication of FR3112177B1 publication Critical patent/FR3112177B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
    • B01F35/20—Measuring; Control or regulation
    • B01F35/22—Control or regulation
    • B01F35/221—Control or regulation of operational parameters, e.g. level of material in the mixer, temperature or pressure
    • B01F35/2211—Amount of delivered fluid during a period
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/14—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by absorption
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
    • B01F23/10—Mixing gases with gases
    • B01F23/19—Mixing systems, i.e. flow charts or diagrams; Arrangements, e.g. comprising controlling means
    • B01F23/191—Mixing systems, i.e. flow charts or diagrams; Arrangements, e.g. comprising controlling means characterised by the construction of the controlling means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F25/00—Flow mixers; Mixers for falling materials, e.g. solid particles
    • B01F25/30—Injector mixers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
    • B01F35/20—Measuring; Control or regulation
    • B01F35/21—Measuring
    • B01F35/211—Measuring of the operational parameters
    • B01F35/2113—Pressure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/005—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of dissimilar working principle
    • F04C23/006—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of dissimilar working principle having complementary function
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0007—Injection of a fluid in the working chamber for sealing, cooling and lubricating
    • F04C29/0014—Injection of a fluid in the working chamber for sealing, cooling and lubricating with control systems for the injection of the fluid
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0092—Removing solid or liquid contaminants from the gas under pumping, e.g. by filtering or deposition; Purging; Scrubbing; Cleaning
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F2215/00—Auxiliary or complementary information in relation with mixing
    • B01F2215/04—Technical information in relation with mixing
    • B01F2215/0413—Numerical information
    • B01F2215/0436—Operational information
    • B01F2215/0468—Numerical pressure values
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/30—Use in a chemical vapor deposition [CVD] process or in a similar process
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/80—Other components
    • F04C2240/81—Sensor, e.g. electronic sensor for control or monitoring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/18—Pressure
    • F04C2270/185—Controlled or regulated
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2280/00—Arrangements for preventing or removing deposits or corrosion
    • F04C2280/02—Preventing solid deposits in pumps, e.g. in vacuum pumps with chemical vapour deposition [CVD] processes

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • General Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Incineration Of Waste (AREA)
  • Treating Waste Gases (AREA)
  • Jet Pumps And Other Pumps (AREA)
  • Chemical Vapour Deposition (AREA)
  • Waste-Gas Treatment And Other Accessory Devices For Furnaces (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)

Abstract

Ligne de vide (4) et procédé de contrôle d’une ligne de vide (4) dans lequel on contrôle un dispositif de pompage auxiliaire (13) et un dispositif d’injection d’un gaz de dilution (15) selon un premier mode de fonctionnement dans lequel la pression régnant dans la canalisation de refoulement (7) est maintenue inférieure ou égale à 20000Pa ou selon un deuxième mode de fonctionnement dans lequel la pression régnant dans la canalisation de refoulement (7) est supérieure à 20000Pa, et on commande l’injection d’un gaz de dilution dans la canalisation de refoulement (7) ou dans le dispositif de pompage (5) au moyen du dispositif d’injection d’un gaz de dilution (15) dans le deuxième mode de fonctionnement. Figure d’abrégé : Figure 1
FR2007251A 2020-07-09 2020-07-09 Ligne de vide et procédé de contrôle d’une ligne de vide Active FR3112177B1 (fr)

Priority Applications (8)

Application Number Priority Date Filing Date Title
FR2007251A FR3112177B1 (fr) 2020-07-09 2020-07-09 Ligne de vide et procédé de contrôle d’une ligne de vide
TW110121648A TW202219389A (zh) 2020-07-09 2021-06-15 真空管線及控制真空管線的方法
KR1020237004670A KR20230034409A (ko) 2020-07-09 2021-06-23 진공 라인 및 진공 라인을 제어하는 방법
CN202180044762.XA CN115803527A (zh) 2020-07-09 2021-06-23 真空管线和用于控制真空管线的方法
JP2023501032A JP2023532775A (ja) 2020-07-09 2021-06-23 真空ラインおよび真空ラインの制御方法
US18/004,252 US20230294053A1 (en) 2020-07-09 2021-06-23 Vacuum line and method for controlling a vacuum line
DE112021003709.9T DE112021003709T5 (de) 2020-07-09 2021-06-23 Vakuumleitung und Verfahren zum Steuern einer Vakuumleitung
PCT/EP2021/067177 WO2022008249A1 (fr) 2020-07-09 2021-06-23 Ligne de vide et procédé de commande de ligne de vide

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR2007251A FR3112177B1 (fr) 2020-07-09 2020-07-09 Ligne de vide et procédé de contrôle d’une ligne de vide
FR2007251 2020-07-09

Publications (2)

Publication Number Publication Date
FR3112177A1 FR3112177A1 (fr) 2022-01-07
FR3112177B1 true FR3112177B1 (fr) 2022-07-08

Family

ID=74045487

Family Applications (1)

Application Number Title Priority Date Filing Date
FR2007251A Active FR3112177B1 (fr) 2020-07-09 2020-07-09 Ligne de vide et procédé de contrôle d’une ligne de vide

Country Status (8)

Country Link
US (1) US20230294053A1 (fr)
JP (1) JP2023532775A (fr)
KR (1) KR20230034409A (fr)
CN (1) CN115803527A (fr)
DE (1) DE112021003709T5 (fr)
FR (1) FR3112177B1 (fr)
TW (1) TW202219389A (fr)
WO (1) WO2022008249A1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3129851A1 (fr) * 2021-12-08 2023-06-09 Pfeiffer Vacuum Ligne de vide et installation comportant la ligne de vide

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2878913B1 (fr) * 2004-12-03 2007-01-19 Cit Alcatel Controle des pressions partielles de gaz pour optimisation de procede
GB0523947D0 (en) * 2005-11-24 2006-01-04 Boc Group Plc Microwave plasma system
GB0525517D0 (en) * 2005-12-15 2006-01-25 Boc Group Plc Apparatus for detecting a flammable atmosphere
US20150068399A1 (en) * 2011-12-14 2015-03-12 Heiner Kösters Device and Method for Evacuating a Chamber and Purifying the Gas Extracted From Said Chamber
GB2533933A (en) * 2015-01-06 2016-07-13 Edwards Ltd Improvements in or relating to vacuum pumping arrangements

Also Published As

Publication number Publication date
FR3112177A1 (fr) 2022-01-07
JP2023532775A (ja) 2023-07-31
WO2022008249A1 (fr) 2022-01-13
TW202219389A (zh) 2022-05-16
CN115803527A (zh) 2023-03-14
KR20230034409A (ko) 2023-03-09
US20230294053A1 (en) 2023-09-21
DE112021003709T5 (de) 2023-08-10

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