JP2025092973A - 排ガス処理装置 - Google Patents

排ガス処理装置 Download PDF

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Publication number
JP2025092973A
JP2025092973A JP2023208425A JP2023208425A JP2025092973A JP 2025092973 A JP2025092973 A JP 2025092973A JP 2023208425 A JP2023208425 A JP 2023208425A JP 2023208425 A JP2023208425 A JP 2023208425A JP 2025092973 A JP2025092973 A JP 2025092973A
Authority
JP
Japan
Prior art keywords
inner cylinder
gas
liquid
exhaust gas
treatment device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2023208425A
Other languages
English (en)
Japanese (ja)
Other versions
JP2025092973A5 (https=
Inventor
和正 細谷
Kazumasa Hosoya
一知 宮崎
Kazutomo Miyazaki
隆之 富井
Takayuki Tomii
諭 中村
Satoshi Nakamura
圭亮 松島
Keisuke Matsushima
敬史 京谷
Takashi Kyotani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp filed Critical Ebara Corp
Priority to JP2023208425A priority Critical patent/JP2025092973A/ja
Priority to EP24217680.8A priority patent/EP4570359A1/en
Priority to KR1020240179504A priority patent/KR20250089439A/ko
Priority to TW113147266A priority patent/TW202528034A/zh
Priority to CN202411796566.XA priority patent/CN120132581A/zh
Priority to US18/973,341 priority patent/US20250186929A1/en
Publication of JP2025092973A publication Critical patent/JP2025092973A/ja
Publication of JP2025092973A5 publication Critical patent/JP2025092973A5/ja
Pending legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/46—Removing components of defined structure
    • B01D53/68—Halogens or halogen compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/77—Liquid phase processes
    • B01D53/78—Liquid phase processes with gas-liquid contact
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D47/00—Separating dispersed particles from gases, air or vapours by liquid as separating agent
    • B01D47/02—Separating dispersed particles from gases, air or vapours by liquid as separating agent by passing the gas or air or vapour over or through a liquid bath
    • B01D47/022—Separating dispersed particles from gases, air or vapours by liquid as separating agent by passing the gas or air or vapour over or through a liquid bath by using a liquid curtain
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/76—Gas phase processes, e.g. by using aerosols
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/20—Halogens or halogen compounds
    • B01D2257/204—Inorganic halogen compounds
    • B01D2257/2045—Hydrochloric acid
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/20—Halogens or halogen compounds
    • B01D2257/204—Inorganic halogen compounds
    • B01D2257/2047—Hydrofluoric acid
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/55—Compounds of silicon, phosphorus, germanium or arsenic
    • B01D2257/553—Compounds comprising hydrogen, e.g. silanes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2258/00—Sources of waste gases
    • B01D2258/02—Other waste gases
    • B01D2258/0216—Other waste gases from CVD treatment or semi-conductor manufacturing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2259/00—Type of treatment
    • B01D2259/80—Employing electric, magnetic, electromagnetic or wave energy, or particle radiation
    • B01D2259/818—Employing electrical discharges or the generation of a plasma

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biomedical Technology (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Health & Medical Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Incineration Of Waste (AREA)
  • Treating Waste Gases (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Chimneys And Flues (AREA)
JP2023208425A 2023-12-11 2023-12-11 排ガス処理装置 Pending JP2025092973A (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2023208425A JP2025092973A (ja) 2023-12-11 2023-12-11 排ガス処理装置
EP24217680.8A EP4570359A1 (en) 2023-12-11 2024-12-05 Exhaust gas treatment apparatus
KR1020240179504A KR20250089439A (ko) 2023-12-11 2024-12-05 배기 가스 처리 장치
TW113147266A TW202528034A (zh) 2023-12-11 2024-12-05 排氣處理裝置
CN202411796566.XA CN120132581A (zh) 2023-12-11 2024-12-09 废气处理装置
US18/973,341 US20250186929A1 (en) 2023-12-11 2024-12-09 Exahust gas treatment apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2023208425A JP2025092973A (ja) 2023-12-11 2023-12-11 排ガス処理装置

Publications (2)

Publication Number Publication Date
JP2025092973A true JP2025092973A (ja) 2025-06-23
JP2025092973A5 JP2025092973A5 (https=) 2026-04-03

Family

ID=94432683

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023208425A Pending JP2025092973A (ja) 2023-12-11 2023-12-11 排ガス処理装置

Country Status (6)

Country Link
US (1) US20250186929A1 (https=)
EP (1) EP4570359A1 (https=)
JP (1) JP2025092973A (https=)
KR (1) KR20250089439A (https=)
CN (1) CN120132581A (https=)
TW (1) TW202528034A (https=)

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0954366A4 (en) * 1996-12-31 2001-06-20 Atmi Ecosys Corp INPUT STRUCTURES FOR INTRODUCING A GAS STREAM CONTAINING SOLID MATERIALS AND / OR PRODUCING PARTICULATE SOLID MATERIALS IN A GAS TREATMENT SYSTEM
US6759018B1 (en) * 1997-05-16 2004-07-06 Advanced Technology Materials, Inc. Method for point-of-use treatment of effluent gas streams
JP4937886B2 (ja) 2006-12-05 2012-05-23 株式会社荏原製作所 燃焼式排ガス処理装置
TWI398293B (zh) * 2010-11-08 2013-06-11 東服企業股份有限公司 Cyclone Oxygen Combustion Unit for Treatment of Emissions from Semiconductor Processes
JP6659461B2 (ja) 2016-05-23 2020-03-04 株式会社荏原製作所 排ガス処理装置
GB2561191B (en) * 2017-04-04 2020-08-26 Edwards Ltd Apparatus for treating gases and a method of reducing deposition on a surface in such apparatus

Also Published As

Publication number Publication date
KR20250089439A (ko) 2025-06-18
EP4570359A1 (en) 2025-06-18
TW202528034A (zh) 2025-07-16
CN120132581A (zh) 2025-06-13
US20250186929A1 (en) 2025-06-12

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