WO2002045823A1 - Dispositif de traitement de gaz d'echappement - Google Patents

Dispositif de traitement de gaz d'echappement Download PDF

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Publication number
WO2002045823A1
WO2002045823A1 PCT/JP2001/009933 JP0109933W WO0245823A1 WO 2002045823 A1 WO2002045823 A1 WO 2002045823A1 JP 0109933 W JP0109933 W JP 0109933W WO 0245823 A1 WO0245823 A1 WO 0245823A1
Authority
WO
WIPO (PCT)
Prior art keywords
coolant
guide cylinder
exhaust gas
peripheral surface
temporary storage
Prior art date
Application number
PCT/JP2001/009933
Other languages
English (en)
Japanese (ja)
Inventor
Michitaka Hishiike
Takakazu Nakanishi
Masaaki Nakagawa
Hiroaki Gotou
Original Assignee
Sumitomo Seika Chemicals Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Seika Chemicals Co., Ltd. filed Critical Sumitomo Seika Chemicals Co., Ltd.
Priority to KR10-2003-7007366A priority Critical patent/KR20030074638A/ko
Publication of WO2002045823A1 publication Critical patent/WO2002045823A1/fr

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D47/00—Separating dispersed particles from gases, air or vapours by liquid as separating agent
    • B01D47/12—Washers with plural different washing sections
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D47/00—Separating dispersed particles from gases, air or vapours by liquid as separating agent
    • B01D47/02—Separating dispersed particles from gases, air or vapours by liquid as separating agent by passing the gas or air or vapour over or through a liquid bath

Definitions

  • the present invention relates to an exhaust gas treatment apparatus suitable for cooling and washing high-temperature combustion exhaust gas containing dust and corrosive gas, such as silane discharged during a CVD (Chemical Vapor Deposition) process for semiconductor production. It is suitable for treating the flue gas generated by burning gas.
  • CVD Chemical Vapor Deposition
  • the exhaust gas containing the metal hydride and the exhaust gas containing the fluorine compound are discharged at regular time intervals. Since these CVD exhaust gases are harmful, they are exhausted after being rendered harmless by combustion decomposition.
  • the combustion exhaust gas generated by the combustion of the exhaust gas is extremely high temperature, and the combustion decomposition of fine powder metal oxides such as silica (Si 2 ) and fluorine compounds generated during the combustion decomposition of metal hydrides It contains acidic gas such as hydrogen fluoride that is sometimes generated.
  • acidic gas such as hydrogen fluoride that is sometimes generated.
  • Purification processes such as re-cleaning and adsorption are performed. It has also been considered to cool the combustion exhaust gas by spraying a cooling liquid. Furthermore, the flue gas is guided from the combustion chamber to the coolant tank by the inner pipe of the double pipe. It has been proposed to treat the combustion exhaust gas by allowing the cleaning liquid supplied between the outer and inner pipes of the double pipe to flow out through a number of openings provided in the inner pipe, and washing the inner pipe wall over the entire circumference. (Japanese Patent Application Laid-Open No. 63-62528). However, a large amount of air is required to dilute and cool the high-temperature flue gas, so the processing air volume increases.
  • flue gas containing fluorine compounds is very stable both chemically and thermally and requires very high temperatures for combustion decomposition, above 1200 ° C, preferably 150 ° C. It is necessary to heat to about 0 ° C. As a result, the temperature of the flue gas becomes extremely high, and a very large amount of air is required to cool it to 100 ° C or less by air dilution. Then, there is a problem that the processing equipment such as the washing tower becomes large and the equipment cost increases. In addition, metal oxides and acid gases that should be removed by adsorption treatment or alkali washing are also diluted, so that the adsorption efficiency and washing efficiency also decrease.
  • the condensed coolant contains hydrogen fluoride and fluorine gas that are by-produced when the fluorine compounds in the CVD exhaust gas are decomposed. Therefore, it becomes highly corrosive hydrofluoric acid water. Therefore, there is a problem that if the wall of the cooling chamber is made of a general corrosion-resistant metal such as stainless steel, it is severely corroded. In order to cope with such corrosion by hydrofluoric acid water, if an expensive touch-resistant material such as Monel Metal Dinconel is used as the material of the wall of the cooling chamber, the material cost increases.
  • An object of the present invention is to provide a combustion exhaust gas treatment apparatus that can solve the above problems. Disclosure of the invention
  • the apparatus for treating flue gas of the present invention includes a guide tube connected to a discharge source of the flue gas, and a temporary storage unit for a supplied cooling liquid.
  • An inlet of the flue gas in the guide tube is opened upward,
  • the coolant outlet of the temporary storage section is the inlet of the guide cylinder so that the coolant flowing out from the coolant outlet of the temporary storage section can flow down along the inner peripheral surface from the entire periphery of the inlet of the guide cylinder.
  • a cooling liquid film covering the inner peripheral surface of the guide cylinder can be formed by the cooling liquid flowing down along the inner peripheral surface of the guide cylinder.
  • the combustion exhaust gas which passes through a guide cylinder can be cooled and wash
  • the cooling liquid film can cover the inner peripheral surface of the guide cylinder over a wide range without any excess.
  • the temporary storage section is constituted by an annular flow path, and the periphery of the coolant outlet of the temporary storage section is constituted by the periphery of the entrance of the guide tube along the annular flow path.
  • the coolant only the coolant overflows from the annular flow path, and the coolant flows down along the inner peripheral surface of the guide cylinder from the coolant outlet through the peripheral edge of the inlet of the guide cylinder.
  • the surface can be reliably formed with a simple structure of the cooling liquid film. JP01 / 09933 1-41
  • the inner peripheral surface of the guide cylinder covered by the cooling liquid film is formed so that the coolant flows down along the inner peripheral surface of the guide cylinder while rotating around the vertical axis. It is preferable that the coolant is supplied to the temporary storage so that the coolant is swirled in the annular flow path along the peripheral surface of the rotating body.
  • the cooling liquid flowing down along the inner peripheral surface of the guide cylinder has a circumferential velocity on the inner peripheral surface of the guide cylinder, and the flow velocity is increased as compared with the case where the cooling liquid flows down naturally. Solid substances can be more reliably prevented from adhering and accumulating on the peripheral surface.
  • the guide tube is inserted into the center hole of the annular wall constituting the bottom of the annular flow passage so that the guide tube can be pulled out from above, and the outer peripheral surface of the peripheral wall of the guide tube has a tapered surface that becomes smaller in diameter as it goes downward.
  • the peripheral wall of the guide cylinder is supported by the inner periphery of the annular wall.
  • the outer peripheral surface of the guide tube is constituted by the inner peripheral surface of the temporary storage portion, and a gap is formed between the inner periphery of the annular wall constituting the bottom wall of the temporary storage portion and the outer periphery of the guide tube. It is preferable that the coolant in the temporary storage section flowing out from the temporary storage section can flow down along the outer peripheral surface of the guide cylinder.
  • the outer peripheral surface of the guide cylinder can be cooled by the coolant without complicating the structure, and the efficiency of cooling the combustion exhaust gas can be improved. It is preferable that the inner peripheral surface of the guide cylinder covered with the cooling liquid film has a tapered surface whose diameter becomes smaller as it goes downward.
  • the area along the tapered surface can be reliably covered with the cooling liquid film without interruption.
  • the outlet of the flue gas in the guide tube is opened downward, and the outlet side of the guide tube
  • a coolant tank connected to the coolant tank is provided, the coolant is stored in the coolant tank, and an outlet of the guide cylinder is arranged above the liquid level of the coolant stored in the coolant tank at intervals. Further, the interval is preferably set so that the liquid level is pushed down by the force of the combustion exhaust gas discharged from the outlet of the guide cylinder.
  • the combustion exhaust gas discharged from the outlet of the guide cylinder can be reliably brought into contact with the coolant stored in the coolant tank to improve the cooling efficiency.
  • the flow of the combustion exhaust gas discharged from the outlet of the guide cylinder is hindered by the coolant.
  • the gap is 5 mn! It is preferably about 1 Omm.
  • the guide cylinder has a downward opening, and a coolant tank connected to the outlet side of the guide cylinder is provided.
  • the coolant is stored in the coolant tank, and the downward opening of the guide cylinder is cooled.
  • a notch is formed on the peripheral wall of the guide cylinder, which is immersed in the coolant stored in the liquid tank and extends from above the liquid surface of the coolant stored in the coolant tank to a downward opening of the guide cylinder. It is preferable that the notch forms an outlet for the combustion exhaust gas in the guide cylinder.
  • the combustion exhaust gas passing through the guide cylinder is configured by a notch formed in the peripheral wall of the guide cylinder after the flow direction is changed by contacting the liquid surface of the coolant stored in the coolant tank and changing the flow direction. Spill out of the outlet.
  • the efficiency of cooling the combustion exhaust gas by the coolant stored in the coolant tank can be improved.
  • FIG. 1 is a configuration explanatory view of an exhaust gas treatment system according to a first embodiment of the present invention.
  • FIG. 2 is a configuration explanatory view of an exhaust gas treatment device according to the first embodiment of the present invention.
  • FIG. 3 is a partial plan sectional view of the exhaust gas treatment apparatus according to the first embodiment of the present invention.
  • FIG. 4 is a partial cross-sectional view of a modified example of the exhaust gas treatment device of the first embodiment of the present invention.
  • FIG. 5 is a configuration explanatory view of an exhaust gas treatment device according to a second embodiment of the present invention.
  • FIG. 6 is a configuration explanatory view of an exhaust gas treatment system according to a third embodiment of the present invention.
  • the exhaust gas treatment system 1 includes an exhaust gas combustion device 2, a combustion exhaust gas treatment device 3 discharged from the combustion device 2, and a combustion exhaust gas treatment device 3 And a post-treatment device 4 for combustion exhaust gas.
  • the exhaust gas combustion device 2 is used for treating, for example, exhaust gas containing metal hydride and exhaust gas containing fluorine compound, and is provided with a combustion chamber 12 made of a refractory material and the combustion chamber 12.
  • the fuel gas for example, liquefied fossil oil gas (LPG), liquefied natural gas (LNG), hydrogen gas, or a mixed gas thereof can be used.
  • the combustion supporting gas for example, air, oxygen-enriched air obtained by adding oxygen to air as needed, or the like can be used.
  • a flame is formed in the combustion chamber 12 by the pilot burner 16, so that the fuel gas and the exhaust gas introduced into the combustion chamber 12 are burned in the presence of the supporting gas.
  • the combustion of the exhaust gas discharges the combustion exhaust gas from the lower opening of the combustion chamber 12.
  • the flue gas treatment device 3 is composed of a guide cylinder 21 connected to a combustion device 2 which is a source of flue gas via an exhaust duct 18, a coolant tank 32, and a coolant tank 3.
  • the exhaust duct 18 discharges the combustion exhaust gas discharged from the lower opening of the combustion chamber 12. The upper end is quickly connected to the combustion device 2 so as to guide it downward.
  • the inner periphery of the exhaust duct 18 is lined with a refractory material 19 such as a ceramic. As shown in FIG. 2, an outer peripheral wall 23 extending downward from a lower end of the exhaust duct 18 and an annular wall 24 extending inward from a lower end of the outer peripheral wall 23 are provided.
  • the inner and outer peripheries of the outer peripheral wall 23 and the annular wall 24 are arranged along a circle in plan view.
  • a guide cylinder 21 is inserted into the center hole of the annular wall 24 so as to be able to be pulled out from above. As a result, the guide cylinder 21 can be easily attached and detached, so that maintenance can be facilitated.
  • the guide cylinder 21 has a shape of a hollow rotating body with a vertical axis, and has an inlet 21 a for combustion exhaust gas that opens upward and an outlet 21 b for combustion exhaust gas that opens downward,
  • the inner and outer peripheral surfaces 2 1 c ′ and 2 1 c ′′ of the upper peripheral wall 2 1 c follow a tapered surface having a smaller diameter as going downward, and the inner and outer peripheral surfaces 2 I d ′ and 2 1 d of the lower peripheral wall 2 1 d "Follows the cylindrical surface.
  • the periphery 21a 'of the entrance 21a is arranged so as to be horizontal.
  • the upper peripheral wall 21 c of the guide cylinder 21 arranged in the center hole of the annular wall 24 is supported by the inner periphery 24 a of the annular wall 24.
  • the temporary storage section 22 is constituted by an annular flow path R surrounded by the outer peripheral wall 23, the annular wall 24, and the upper peripheral wall 21c of the guide cylinder 21.
  • the coolant stored in the coolant tank 32 in the annular flow path R is supplied by the pump P via the pipe 31.
  • the two-dot chain line indicates the liquid level T of the coolant in the annular flow path R, and the coolant is supplied such that the liquid level T is higher than the peripheral edge 21 a ′ of the inlet 21 a of the guide cylinder 21. Be paid.
  • the periphery of the coolant outlet 22a of the temporary storage section 22 is constituted by the periphery 21a 'of the inlet 21a of the guide cylinder 21 along the inner periphery of the annular flow path.
  • the coolant outlet 22 a of the temporary storage part 22 is disposed at a position surrounding the inlet 21 a of the guide cylinder 21, and flows out from the coolant outlet 22 a of the temporary storage part 22.
  • the coolant can flow down along the inner peripheral surfaces 21 c ′ and 21 d ′ from the entire circumference ⁇ 21 a ′ of the inlet 2 la in the guide cylinder 21.
  • the inner peripheral surface 2 1 c ′ of the guide cylinder 2 1, 2 The cooling liquid flowing down along 1 d ′ forms a cooling liquid film covering the inner peripheral surfaces 21 c ′ and 2 I d ′ of the guide cylinder 21. Since the guide cylinder 21 has a rotating body shape centered on the vertical axis, the inner peripheral surfaces 21 c ′ and 21 d ′ of the guide cylinder 21 covered by the cooling liquid film are positioned on the vertical axis. Along the circumference of the rotating body. As shown in FIG. 3, the direction of introduction of the coolant through the pipe 31 to the temporary storage section 22 is determined by the inside and outside of the annular flow path R constituting the temporary storage section 22 as indicated by arrows in the figure.
  • the coolant is supplied to the temporary storage section 22 so that the coolant is swirled in the annular flow path R in the tangential direction of the circle along the circumference.
  • the coolant flows down along the inner peripheral surfaces 21 c ′ and 21 d ′ of the guide cylinder 21 while rotating around the vertical axis as indicated by the arrow in the figure.
  • high-temperature combustion exhaust gas containing silica / hydrogen fluoride and the like discharged from the combustion chamber 12 and passing through the guide cylinder 21 is transferred to the inner peripheral surfaces 21 c ′ and 21 of the guide cylinder 21.
  • a general corrosion-resistant material such as an acid-resistant nickel alloy such as Hastelloy C or stainless steel coated with a fluorine resin can be used.
  • the dry high-temperature part such as the inner peripheral surface of the exhaust duct 18 upstream of the cooling liquid film is made of ceramic or the like.
  • Refractory material 19 ensures protection.
  • the inlet 21 a of the guide cylinder 21 opens upward, and the coolant flowing out of the coolant outlet 22 a of the temporary coolant storage unit 22 that includes the inlet 21 a is Since it flows down along the inner peripheral surfaces 21c 'and 21d' from the peripheral edge 21a 'of the entrance 21a of the guide cylinder 21, the inner peripheral surface 2 of the guide cylinder 21 1 c ′ and 21 d ′ can be covered over a wide area without being over-corrected.
  • the inner peripheral surfaces 21 c ′ and 21 d ′ of the guide cylinder 21 contain Solid matter can be reliably prevented from adhering, accumulating or corroding. Also, only by allowing the coolant to overflow from the annular flow path R, the coolant flows from the coolant outlet 22 a through the periphery 21 a of the inlet 21 a of the guide cylinder 21, and the coolant flows into the guide cylinder 21. Since it flows down along the inner peripheral surfaces 21c 'and 21d', a cooling liquid film covering the inner peripheral surfaces 21c 'and 21d' can be reliably formed with a simple configuration.
  • the coolant flowing down along the inner peripheral surfaces 21 c ′ and 21 d ′ of the guide cylinder 21 flows down while rotating around the vertical axis, the inner peripheral surface 2 1 c ', 21 d' in the circumferential direction, the flow velocity is higher than when flowing down naturally, and solid matter adheres and accumulates on the inner peripheral surfaces 21c ', 21d'. Can be prevented more reliably.
  • the inner peripheral surface 21c 'of the upper peripheral wall 21c of the guide cylinder 21 follows a tapered surface having a smaller diameter as it goes downward, the inner peripheral surface 21c' is surely formed on the coolant film. It can be covered more seamlessly.
  • the annular flow path R is married by the outer peripheral wall 23, the annular wall 24, and the upper peripheral wall 21 c of the guide cylinder 21, and thus the inner peripheral surface of the temporary storage part 22 forms the upper part of the guide cylinder 21.
  • An outer peripheral surface 2 1 c "of the peripheral wall 21c is formed.
  • a gap is provided between the inner peripheral surface 24a of the annular wall 24 constituting the bottom wall of the temporary storage portion 22 and the outer peripheral surface of the guide cylinder 21.
  • the coolant in the temporary storage portion 22 flowing out of the gap can flow down along the outer peripheral surface 21 1 ", 21 d ⁇ of the guide cylinder 21.
  • the outer peripheral surfaces 2 1 c ⁇ and 2 1 ⁇ ′′ of the guide cylinder 21 can be cooled by a cooling liquid without complicating the structure, thereby improving the efficiency of cooling the combustion exhaust gas. It may be provided by lowering the molding accuracy of the outer periphery 21a of the circumference 24a and the upper peripheral wall 21c of the guide cylinder 21. Alternatively, as shown in the modification of FIG.
  • a part of the upper wall of the coolant tank 32 is constituted by the annular wall 24, so that the coolant tank is provided on the outlet 21b side of the guide cylinder 21.
  • the cooling liquid tank 32 is connected to the cooling liquid supplied from the cooling liquid supply source W and the temporary storage section 22. T / JP01 / 09933
  • the coolant circulating by flowing down through the inner cylinder 21 is stored.
  • the coolant in the coolant tank 32 overflows to the outside through a drain port 3 2b provided in the coolant tank 32 as shown in FIG. I do.
  • the height of the coolant L in the coolant tank 32 is kept within a certain range.
  • a sensor for detecting the liquid level L may be provided, and the height of the liquid level L may be kept within a certain range by controlling the flow rate of the cooling liquid supplied to the cooling liquid tank 32 according to the sensor output.
  • the outlet 21 b of the guide cylinder 21 is disposed above the liquid level L of the cooling liquid in the cooling liquid tank 32 at an interval ⁇ .
  • the interval ⁇ 5 is set so that the liquid level L is pushed down by the pressure of the combustion exhaust gas discharged from the outlet 21b of the guide cylinder 21 as shown by a two-dot chain line in FIG. Set to about.
  • the combustion exhaust gas discharged from the outlet 21b of the guide cylinder 21 can be reliably brought into contact with the coolant stored in the coolant tank 32 to improve the cooling efficiency, and furthermore, the compound in the combustion exhaust gas can be improved. Can be absorbed and washed.
  • the flow of the combustion exhaust gas discharged from the outlet of the guide cylinder 21 is cooled. It is not inhibited by the liquid.
  • the combustion exhaust gas can be sufficiently cooled to, for example, 100 ° C. or less by cooling and washing in the treatment device 3 for the combustion exhaust gas.
  • the combustion exhaust gas is discharged from the gas phase section 32 a of the cooling liquid tank 32 to the aftertreatment device 4.
  • the post-treatment apparatus 4 has a packed tower 34, and spray nozzles 38, 39 arranged in the packed tower 34. Each spray nozzle 38, 3 From 9 the coolant is sprayed.
  • the packed tower 34 includes a tubular body 34 a extending upward from the opening edge of the upper wall of the coolant tank 32 so as to communicate with the gas phase portion 32 a of the coolant tank 32. It is composed of an absorbent material 34b filled in 34a and hydrogen fluoride, silica, etc. from the combustion exhaust gas. Remove.
  • FIG. 5 shows a second embodiment, and the same parts as those in the first embodiment are denoted by the same reference numerals. In the second embodiment, the downward opening of the guide cylinder 21 is immersed in the coolant stored in the coolant tank 32.
  • a notch 2 1 e extending from above the liquid level L of the coolant stored in the coolant tank 32 to a downward opening of the guide cylinder 21 is formed in the lower peripheral wall 21 d of the guide cylinder 21.
  • a plurality of cutouts 21 e constitute an outlet 21 b of the combustion exhaust gas in the guide cylinder 21.
  • the combustion exhaust gas passing through the guide cylinder 21 comes into contact with the liquid level L of the coolant stored in the coolant tank 32 and changes the flow direction, and then the notch 2 1 e Flows out of the outlet consisting of At this time, the residence time of the combustion exhaust gas in the guide cylinder 21 is lengthened by the lower peripheral wall 21 d between the notches 21 e in the circumferential direction, so that the cooling liquid stored in the coolant tank 32 is increased. The efficiency of cooling the combustion exhaust gas by the liquid can be improved.
  • the rest is the same as the first embodiment.
  • the upper peripheral wall 21c of the guide cylinder 21 has an inlet 21a! : Multiple notches 2 If are formed at intervals in the circumferential direction. As a result, even if the coolant supplied to the temporary storage section 22 temporarily decreases, the coolant is guided from the notch 21 f to the inside of the guide cylinder 21 by the guide. The coolant flowing down along the inner peripheral surfaces 21c 'and 21d' of the cylinder 21 can be secured. Others are the same as in the first embodiment.
  • coolant spray nozzles 51, 52 are provided in the guide cylinder 21 and the coolant tank 32, and the inside of the guide cylinder 21 and the coolant tank 32 are provided. Spray the coolant supplied from pump P. Thereby, the cooling effect of the combustion exhaust gas can be improved. Since the spray nozzle 51 provided in the guide tower 21 is cooled by the cooling liquid film, it is not corroded by the high-temperature gas, and the cooling water sprayed from the spray nozzle 51 is supplied to the exhaust duct 18. Since the inner circumference is not wetted, it is possible to prevent solids in the combustion exhaust gas from being deposited on the refractory material 19.
  • the cooling liquid spray port of the spray nozzle 51 provided in the nozzle 21 be disposed at a position inside the guide cylinder 21 with respect to the cooling liquid film so that the cooling liquid can be sprayed reliably.
  • the outer peripheral surfaces 21 c ′ and 21 d ′′ of the guide cylinder 21 may be cooled by a coolant sprayed from a coolant spray nozzle 52 provided in the coolant tank 32.
  • high-temperature exhaust gas discharged when burning and decomposing harmful gas discharged in a CVD process or the like can be cooled and washed at low cost simply and efficiently, and the exhaust gas flow path by solid by-products
  • the present invention is not limited to the above-described embodiment, and can prevent exhaust gas from being clogged and corroded, and can reduce equipment costs.
  • the present invention is not limited to this, and is suitable for treating other high-temperature exhaust gas.
  • Exhaust gas treatment was performed by the exhaust gas treatment system of the first embodiment.
  • the guide cylinder 21 is made of stainless steel, the inner peripheral surfaces 21 c 'and 21 d' are coated with Teflon resin with a thickness of 0.5 mm, the inner diameter of the inlet 21 a is 150 mm, and the lower peripheral wall
  • the inner diameter of 21 d was 100 mm
  • the axial dimension of the upper peripheral wall 21 c was 100 mm
  • the axial dimension of the lower peripheral wall 21 d was 100 mm.
  • the coolant tank 32 was made of stainless steel, and the inner peripheral surface was coated with epoxy resin lining.
  • the inner periphery of the pipe 31 connecting the cooling liquid tank 32 and the temporary storage section 22 was covered with a Teflon tube.
  • the cylindrical body 34a of the packed tower 34 was made of stainless steel and the inner periphery was lined with epoxy resin.
  • 1% C exhaust gas 2 0 0 nitrogen base Ichisu containing 2 F 6 L / min, using a propane 1 0 L Zm in the fuel gas, air 2 5 0 as the combustion-supporting gas Combustion decomposition was performed at 1200 ° C. using LZmin, and the combustion exhaust gas was discharged.
  • Coolant flow rate supplied from the coolant tank 32 to the temporary storage section 22 by the pump P Is 20 LZmin, and the flow rate of the coolant flowing down from the temporary storage section 22 along the inner peripheral surfaces 21 c ′ and 2 Id ′ of the guide cylinder 21 is about 15 LZmin, and the temporary storage section is used.
  • the flow rate of the cooling liquid flowing down from 22 along the outer peripheral surfaces 21 c ⁇ and 21 d "of the guide cylinder 21 was about 5 L / min.
  • the cooling liquid was sprayed at 10 L / min.
  • Example 2 In the combustion chamber 1 2, discharge 1% of the S i H 4 and 1% C nitrogen-based flue gas 200 L / min containing 2 F 6, combustion is burned decomposed under the same conditions as in Example 1 the exhaust gas The other conditions were the same as in Example 1.
  • the flue gas was cooled to 82 ° C at the inlet of packed tower 34 and 25 at the outlet.
  • C 2 F 6 was 10 ppm or less
  • -SiH 4 was 0.5 ppm or less, and both had a decomposition of 99% or more. Efficiency was obtained.

Abstract

L'invention concerne un dispositif de traitement de gaz d'échappement comprenant un tube de guidage (21) relié à une source à décharge de gaz d'échappement et une partie de stockage temporaire (22) d'apport de refroidissement. L'entrée (21a) de gaz d'échappement du tube de guidage (21) est ouverte vers le haut, et la sortie (22a) de l'apport de refroidissement de la partie de stockage temporaire (22) est placée de façon à entourer l'entrée (21a) du tube de guidage (21). L'apport de refroidissement s'écoulant par la sortie (22a) s'écoule vers le bas par le pourtour (21a') de l'entrée (21a) du tube de guidage (21), le long de ses surfaces périphériques internes (21c', 21d'), un film de refroidissement recouvrant ces surfaces périphériques internes (21c', 21d') du tube de guidage (21) étant formé par l'écoulement sortant le long des surfaces périphériques internes (21c', 21d') du tube de guidage (21).
PCT/JP2001/009933 2000-12-04 2001-11-14 Dispositif de traitement de gaz d'echappement WO2002045823A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR10-2003-7007366A KR20030074638A (ko) 2000-12-04 2001-11-14 연소 배기 가스의 처리 장치

Applications Claiming Priority (2)

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JP2000368446A JP2002166126A (ja) 2000-12-04 2000-12-04 燃焼排ガスの処理装置
JP2000-368446 2000-12-04

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WO2002045823A1 true WO2002045823A1 (fr) 2002-06-13

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KR (1) KR20030074638A (fr)
CN (1) CN1477989A (fr)
TW (1) TW505766B (fr)
WO (1) WO2002045823A1 (fr)

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KR101303918B1 (ko) 2011-03-09 2013-09-05 주식회사 포스코건설 배기가스 처리장치
JP6322502B2 (ja) * 2014-07-08 2018-05-09 大陽日酸株式会社 排ガス処理設備
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JP6659471B2 (ja) * 2016-06-08 2020-03-04 株式会社荏原製作所 排ガス処理装置
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CN110461437B (zh) * 2017-01-06 2022-09-13 阿尔泽塔公司 用于改善废气消减的系统和方法
JP7076223B2 (ja) * 2018-02-26 2022-05-27 株式会社荏原製作所 湿式除害装置
CN110523188B (zh) * 2019-08-22 2021-09-17 青岛明华电子仪器有限公司 一种烟尘气体处理设备
CN111905492A (zh) * 2020-07-30 2020-11-10 安徽国能亿盛环保科技有限公司 一种烟气除尘系统

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CN104879767A (zh) * 2015-05-12 2015-09-02 靖江格兰石化设备有限公司 一种烟气急冷器
CN115350577A (zh) * 2022-07-29 2022-11-18 北京京仪自动化装备技术股份有限公司 废气处理反应装置及半导体废气处理系统
CN115350577B (zh) * 2022-07-29 2024-02-02 北京京仪自动化装备技术股份有限公司 废气处理反应装置及半导体废气处理系统

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