WO2014109152A1 - Buse d'entrée et dispositif de détoxification - Google Patents

Buse d'entrée et dispositif de détoxification Download PDF

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Publication number
WO2014109152A1
WO2014109152A1 PCT/JP2013/082795 JP2013082795W WO2014109152A1 WO 2014109152 A1 WO2014109152 A1 WO 2014109152A1 JP 2013082795 W JP2013082795 W JP 2013082795W WO 2014109152 A1 WO2014109152 A1 WO 2014109152A1
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WO
WIPO (PCT)
Prior art keywords
inlet nozzle
gas
inlet
nozzle
present
Prior art date
Application number
PCT/JP2013/082795
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English (en)
Japanese (ja)
Inventor
隆介 水谷
Original Assignee
エドワーズ株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by エドワーズ株式会社 filed Critical エドワーズ株式会社
Publication of WO2014109152A1 publication Critical patent/WO2014109152A1/fr

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
    • F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G5/00—Incineration of waste; Incinerator constructions; Details, accessories or control therefor
    • F23G5/44—Details; Accessories
    • F23G5/442—Waste feed arrangements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G5/00—Incineration of waste; Incinerator constructions; Details, accessories or control therefor
    • F23G5/44—Details; Accessories
    • F23G5/48—Preventing corrosion
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G2205/00—Waste feed arrangements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23K—FEEDING FUEL TO COMBUSTION APPARATUS
    • F23K2400/00—Pretreatment and supply of gaseous fuel
    • F23K2400/20—Supply line arrangements

Definitions

  • the present invention relates to an inlet nozzle and an abatement apparatus. Specifically, the present invention relates to an inlet nozzle provided with an inclination inside, and a detoxification apparatus including the inlet nozzle.
  • a process gas such as silane gas (SiH 4 ) is used in a vacuum chamber for generating a Si film.
  • the exhaust gas after being used is exhausted to the outside from a reactor of a vacuum pump connected to a vacuum chamber, which is an apparatus for a semiconductor manufacturing process.
  • Examples of such exhaust gas include silane gas as described above, and six fluorocarbons.
  • Various toxic gases such as tungsten nitride (WF 6 ) and dichlorosilane (SiH 2 Cl 2 ) are often contained in the film forming process.
  • a detoxifying device is connected to the exhaust side of the vacuum pump to discharge such exhaust gas as harmless gas.
  • abatement devices such as a combustion type and a plasma type.
  • a poisonous gas is changed to a harmless gas by causing an oxidation reaction that burns and reacts with air (oxygen).
  • oxygen oxygen
  • silane gas SiH 4
  • silica SiO 2
  • This silica is a solid / powder, and is given energy when it is changed (to silica) by the oxidation reaction described above, and scatters in the space of the combustion furnace, which is a space where the oxidation reaction takes place. That is, since it does not fall straight and scatters, most of it adheres to the wall of the combustion furnace and accumulates over time. Therefore, it is necessary to perform regular maintenance (overhaul) to remove the deposit. Generally, this maintenance is performed about once every three months. In view of operation and cost, it is better that the interval from the maintenance to the next maintenance (free maintenance period) is longer. That is, it is desirable that the abatement apparatus has a structure in which deposits generated by the oxidation reaction are difficult to adhere.
  • Patent Document 1 describes a method of burning exhaust gas using an exhaust gas combustion nozzle connected to a combustion chamber of a combustion-type abatement apparatus. More specifically, the exhaust gas combustion nozzle of Patent Document 1 includes an exhaust gas nozzle, first and second combustion nozzles, and further an air supply nozzle, and prevents silica from adhering and accumulating at the tip of the nozzle. Therefore, it is configured such that a complete oxidation reaction occurs on the downstream side of the gas.
  • FIG. 6 is a view for explaining a conventional inlet nozzle 1.
  • FIG. 6A is a diagram showing a cross-sectional view in the axial direction of the conventional inlet nozzle 1
  • FIG. 6B is a view below the inlet head 2 in which the conventional inlet nozzle 1 is disposed (gas flows).
  • FIG. 6 (a) the inner diameter of the casing portion of the conventional inlet nozzle 1 is constant everywhere, and has a straight structure from the upstream side to the downstream side of the gas. *
  • An object of the present invention is to provide an inlet nozzle for reducing the amount of deposits adhering to the wall surface of a combustion furnace and prolonging the maintenance cycle, and a detoxifying device including the inlet nozzle.
  • the present invention according to claim 1 is an inlet nozzle for guiding an exhaust gas containing a gas to be abated to a chamber for abatement, wherein the inner circumference of the inner wall surface of the inlet nozzle is An inlet nozzle having an inclined portion that decreases from the upstream side toward the downstream side when the exhaust gas flows is provided.
  • the inlet nozzle according to claim 1 wherein the inclined portion is formed on the inner wall surface on the downstream side in the axial direction of the inlet nozzle.
  • the abatement chamber, the inlet nozzle according to the first or second aspect, and a plurality of holes for disposing the inlet nozzle, the abatement chamber there is provided a detoxifying device comprising a nozzle fixing member to be fitted.
  • the said nozzle fixing member can be removed,
  • the abatement apparatus of Claim 3 characterized by the above-mentioned is provided.
  • attachment adhering to the wall surface of a combustion furnace can be reduced, and the abatement apparatus provided with the inlet nozzle for extending the period of a maintenance and the said inlet nozzle can be provided.
  • the inlet nozzle according to the embodiment of the present invention includes an inclined portion inside the casing of the inlet nozzle, and due to this inclination, gas (harmful gas) and powder passing through the inlet nozzle.
  • the body flow is always constant inside the combustion chamber (combustion furnace). More specifically, in the inlet nozzle according to the embodiment of the present invention, a gas such as a detoxifying gas (exhaust gas) and a powder such as particulate dust generated by combustion decomposition flow in the center of the combustion chamber. A slope is provided inside.
  • the injection direction of the inlet nozzle for introducing the detoxifying gas is directed toward the center (i.e., the center line of the combustion furnace), and the flow of the gas in the center line direction component in the combustion chamber increases.
  • the probability of scattering to the inner wall surface side in the combustion chamber and adhering to and depositing on the inner wall surface can be reduced. That is, it becomes possible to fly the powder generated by the combustion decomposition to the upstream end of the cooling unit, which is the next step of the combustion chamber, without adhering to the inner wall surface of the combustion chamber.
  • the detoxification apparatus in which the inlet nozzle according to the embodiment of the present invention is disposed can reduce deposits adhering mainly to the side surface of the combustion chamber, so that the maintenance cycle is lengthened. Can do. *
  • FIG. 1 is a diagram showing a schematic configuration example for explaining a system layout in which an abatement apparatus 400 including an inlet nozzle 40 according to an embodiment of the present invention is disposed.
  • the abatement apparatus 400 provided with the inlet nozzle 40 is a combustion-type abatement apparatus as an example.
  • the abatement apparatus 400 in which the inlet nozzle 40 according to the embodiment of the present invention is disposed is not limited to the combustion type, and for example, other than the plasma type or gasoline engine type abatement apparatus 400 or the like. It can be arranged.
  • a process apparatus (process chamber) 100 such as a wafer film forming apparatus installed in the clean room 200 is connected to a dry pump 300 via a vacuum pipe 500.
  • the dry pump 300 is connected to the abatement apparatus 400 via the exhaust pipe 600.
  • the casing forming the exterior body of the abatement apparatus 400 has a substantially cylindrical shape, and an inlet head 403 (FIG. 2) is configured as a lid at the upper and lower ends.
  • the casing does not necessarily need to be substantially cylindrical, and may have a configuration in which the interior is isolated from the space and the outside. *
  • FIG. 2 is a diagram showing a schematic configuration example of the abatement apparatus 400 in which the inlet nozzle 40 according to the embodiment of the present invention is arranged, and an arrow G in the figure indicates a flow of gas containing the abatement gas.
  • Exhaust gas containing toxic gas discharged from the process apparatus 100 is transported to the abatement apparatus 400 through the vacuum pipe 500, the dry pump 300, and the exhaust pipe 600.
  • the inlet three-way valve 401 separates the gas discharged into the combustible exhaust duct and the gas sent to the combustor (combustion furnace) 404.
  • the embodiment of the present invention will be described following the flow of exhaust gas toward the combustor 404.
  • the exhaust gas is conveyed to the combustor 404 through the inlet pipe 402 and the inlet head (gas introduction unit) 403.
  • the combustor 404 is a space for burning a detoxifying gas including a toxic gas, and has an internal temperature of about 800 ° C.
  • the abatement apparatus 400 includes a combustor 404 that is a combustion furnace and a quench 405 that is a gas temperature cooling unit.
  • the combustor 404 is configured to process a combustible gas or a cleaning gas to be processed from a CVD (Chemical Vapor Deposition) apparatus (not shown) of a semiconductor manufacturing process through a vacuum pump (not shown).
  • CVD Chemical Vapor Deposition
  • the gas is introduced from an inlet head 403, which is an inlet of the abatement apparatus 400 via the inlet pipe 402 and disposed at the upstream end of the combustor 404, and is decomposed at a high temperature.
  • the flammable gas is a colorless and toxic silane gas (SiH 4 ), a colorless (yellow) toxic high-pressure gas such as tungsten hexafluoride (WF 6 ), dichlorosilane (SiH 2 Cl 2 ), etc., and a cleaning gas. Is ammonia (NH 3 ).
  • exhaust gas exhausted from the vacuum pump and introduced from the inlet head 403 is combusted and decomposed by the combustor 404.
  • Exhaust gas generated by this combustion decomposition is cooled from about 800 ° C. to about 80 ° C. by quench 405 which is a gas temperature cooling unit. Cooling water is used for cooling the exhaust gas. Then, the cooled exhaust gas and particulate dust generated by combustion decomposition are discharged from the discharge port (downstream end) of the combustor 404, and the packed tower which is a wet detoxification section passes through the cyclone 406 which is a powder removal section. 407. Water-soluble gases such as hydrogen fluoride (HF) and hydrogen chloride (HCl) are dissolved in this portion. In this embodiment, the cyclone 406 and the packed tower 407 are made of polypropylene.
  • an inclination is provided inside the inlet nozzle 40 provided in the inlet head 403 (about the inclination). Details will be described later).
  • the flow of gas and powder passing through the inlet nozzle 40 is always constant inside the combustor 404 by the inclination provided in the inlet nozzle 40. More specifically, an inclination is provided in the inlet nozzle 40 so that gas (exhaust gas / detoxification gas) and powder (fine particle dust) flow on the central axis of the combustor 404.
  • FIG. 3 is a view for explaining the vicinity of the inlet head 403 in the abatement apparatus 400 including the inlet nozzle 40 according to the embodiment of the present invention.
  • 3A is an enlarged view of FIG. 2 ⁇ (inlet pipe 402, inlet head 403, combustor 404, scraper 408, which will be described later), and shows a cross-sectional view in the axial direction, and FIG. The figure when the part (the inlet nozzle 40, the inlet head 403) is seen from the upstream of the flow of gas is shown.
  • the inlet head 403 is configured to have four introduction holes 409 in which the inlet nozzles 40 are disposed, but the number of introduction holes 409 may be set as necessary.
  • the material of the inlet head 403 according to the embodiment of the present invention is preferably stainless steel.
  • a scraper 408 for removing powder adhering to the downstream end (combustor 404 side) end of the inlet nozzle 40 is disposed.
  • FIG. 4 is a view for explaining the inlet nozzle 40 according to the embodiment of the present invention, and shows a sectional view in the axial direction of the inlet nozzle 40 according to the present invention.
  • the direction in which the gas flows is described as an “axial direction”, and the direction perpendicular to the axial direction is described as a “diameter (diameter / radius)”.
  • the material of the inlet nozzle 40 according to the embodiment of the present invention is desirably, for example, Inconel: Inconel (registered trademark) or Hastelloy (corrosion resistant) which is a nickel-based superalloy.
  • the inlet nozzle 40 is a part that allows the inlet piping 402 and the inlet head 403 to communicate with each other in the detoxifying apparatus 400, and is a substantially housing having a cavity therein, the flange portion 41, and the housing side portion. 42, an inclined portion 43, a bottom portion 44, and the like.
  • the flange portion 41 is located on the upper side in the axial direction of the inlet nozzle 40 (that is, on the upstream side of the flowing gas) and is fitted to the inlet pipe 402.
  • the housing side portion 42 constitutes the side surface of the inlet nozzle 40, and is a cylindrical housing in this embodiment, and is fitted into an introduction hole 409 provided in the inlet head 403.
  • the inclined portion 43 is formed on a part of the inside of the housing side portion 42 (that is, inside the inlet nozzle 40).
  • the inclined portion 43 is substantially tapered, and a bottom portion 44 having a side surface parallel to the housing side portion 42 is formed on the lower side in the axial direction (that is, the downstream side of the flowing gas).
  • the axial length L1 of the entire inlet nozzle 40 is about 76.6 mm
  • the axial length L2 excluding the bottom 44 is 71.6 mm
  • the length L3 in the axial direction of the bottom 44 is 5 mm
  • the length L4 in the axial direction from the end of the flange 41 (on the inlet pipe 402 side) to the portion where the inclined portion 43 starts to be inclined is 30 mm
  • the length L5 in the axial direction is 41.6 mm
  • the length L6 in the axial direction of the flange portion 41 is 6 mm.
  • the outer diameter d1 of the flange portion 41 of the inlet nozzle 40 is 33 mm
  • the diameter d3 of the space surrounded by the casing side portion 42 and the bottom portion 44 is 12 mm
  • the outer diameter d4 of the casing side portion 42 is 26.7 mm.
  • the inlet nozzle 40 As an inclined portion 43 on the inner wall surface of the inlet nozzle 40 (inner wall of the casing side portion 42), the gas passing through the inside (exhaust gas / harmful gas) is upstream.
  • a slope structure that gradually decreases the inner diameter of the inlet nozzle 40 from the side toward the downstream side is formed from the vicinity of the center of the wall surface in the axial direction toward the downstream side. That is, a structure like a slide is formed on a part of the inner wall of the casing (cylindrical body) constituting the inlet nozzle 40.
  • the taper angle ⁇ of the slope structure is configured as 8.21 degrees as an example.
  • the taper angle (inclination angle) ⁇ is preferably about 15 ° in view of the balance with the scraper 408.
  • the scraper 408 is an elastic body (spring), but is not limited thereto.
  • the scraper may have a rod shape, a blade shape, or a spatula shape.
  • FIG. 4 is a view of the inlet nozzle 40 according to the embodiment of the present invention shown in FIG. 4 as viewed from the direction of arrow A (that is, from the inlet piping 402 side).
  • 4 is a view of the inlet nozzle 40 according to the embodiment of the present invention shown in FIG. 4 as viewed from the direction of arrow B (that is, from the combustor 404 side).
  • 4 is a cross-sectional view in the direction of arrow C of the inlet nozzle 40 according to the embodiment of the present invention illustrated in FIG. That is, it is a cross-sectional view of a portion where the inclined portion 43 is not formed.
  • the inclined portion 43 of the inlet nozzle 40 is the inner wall of the casing (cylindrical body) constituting the inlet nozzle 40.
  • the inner circumference of the portion from the half in the axial direction of the inlet nozzle 40 to the upper side (the inlet pipe 402 side) has the same diameter, The slope structure is formed on one side (half of the inner circumference).
  • the detoxification apparatus 400 is provided in the inlet nozzle 40 through which a gas (toxic gas: silane gas, tungsten hexafluoride, dichlorosilane, etc.) contained in the exhaust gas and to be detoxified flows.
  • a gas toxic gas: silane gas, tungsten hexafluoride, dichlorosilane, etc.
  • An inclined portion 43 is provided.
  • the inlet nozzle 40 which concerns on embodiment of this invention set the position which provides the inclination part 43, ie, the position which begins to form a slope structure, from the position of the approximate center of the length of the axial direction of the inlet nozzle 40.
  • it is not limited to this.
  • the slope portion 43 may start to form a slope structure from the uppermost portion of the inlet nozzle 40, that is, a part of the inner diameter of the flange portion 41, or may be lower than the center position in the axial direction of the inlet nozzle 40. You may make it the structure which begins to form a slope structure from a part (combustor 404 side).
  • the ratio of L4: (L5 + L3) is preferably about 6: 4
  • the ratio of the diameter of d2: d3 is preferably about 2: 1.
  • the inclined portion 43 is formed on the inner wall of the inlet nozzle 40 by welding.
  • the method of forming the inclined portion 43 is not limited to this, and for example, cutting or casting is performed. It may be formed by a method. *
  • the exhaust gas introduced from the inlet pipe 402 passes through the four inlet holes 409 when passing through the inlet nozzle 40.
  • the traveling direction is always controlled to be a constant direction by the respective inclined portions 43 formed inside the inlet nozzle 40 disposed in the nozzle. More specifically, the exhaust gas introduced from the inlet pipe 402 is controlled so as to pass through the center inside the combustor 404.
  • the abatement apparatus 400 provided with the inlet nozzle 40 is configured such that the exhaust gas introduced from the inlet pipe 402 is the inlet nozzle 40.
  • the powder generated by being combusted and decomposed by the combustor 404 after passing through the air is allowed to fly to the upstream end of the quench 405 before scattering to the inner wall surface of the combustor 404 and adhering to the inner wall surface.
  • FIG. 5 is a view for explaining a modification of the inlet nozzle 40 according to the present invention.
  • the same number is attached
  • FIG. 5 is a view of an inlet head 403 provided with an inlet nozzle 50 according to a modification of the embodiment of the present invention as viewed from below (that is, the downstream side when exhaust gas flows).
  • the inlet nozzle 50 according to the modification of the embodiment of the present invention is not provided with a bottom portion 44 (FIG. 4) having a side surface parallel to the housing side portion 42 on the downstream side of the inclined portion 43. Instead, on the extension of the inclined portion 43, the bottom portion 54 coincides with the bottom surface of the inclined portion 43.
  • the bottom 44 (54) of the inlet nozzle 40 (50) according to the embodiment of the present invention can have various shapes. *
  • the inlet head 403 is configured to be removable with respect to the combustor 404, but the inlet head 403 and the combustor 404 may be configured integrally.
  • Inlet nozzle (conventional) 2 Inlet head (conventional) 40 Inlet nozzle 41 Flange part 42 Housing side part 43 Inclined part 44 Bottom part 50 Inlet nozzle 54 Bottom part 100 Process equipment 200 Clean room 300 Dry pump 400 Exhaust equipment 401 Inlet three-way valve 402 Piping 403 Inlet head 404 Combustor 405 Quench 406 Cyclone 407 Packed tower 408 Scraper 409 Introduction hole 500 Vacuum piping 600 Exhaust piping

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  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Incineration Of Waste (AREA)
  • Treating Waste Gases (AREA)

Abstract

Selon l'invention, une partie inclinée (43) est disposée sur l'intérieur d'une buse d'entrée (40) disposée sur un dispositif de détoxification, de façon à permettre ainsi à une poudre générée par une décomposition par combustion de s'envoler vers l'extrémité amont d'une unité de refroidissement, qui est l'étage suivant après la chambre de combustion, sans adhérer à la surface de paroi interne de la chambre de combustion.
PCT/JP2013/082795 2013-01-11 2013-12-06 Buse d'entrée et dispositif de détoxification WO2014109152A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2013003088A JP2014134350A (ja) 2013-01-11 2013-01-11 インレットノズル、及び除害装置
JP2013-003088 2013-01-11

Publications (1)

Publication Number Publication Date
WO2014109152A1 true WO2014109152A1 (fr) 2014-07-17

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2022122616A (ja) * 2021-02-10 2022-08-23 栗田工業株式会社 排ガス処理設備
JP7377332B2 (ja) 2019-11-21 2023-11-09 エコシス ピーティーイー リミテッド ガス汚染物処理装置

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GB2533293A (en) 2014-12-15 2016-06-22 Edwards Ltd Inlet assembly
GB2550382B (en) * 2016-05-18 2020-04-22 Edwards Ltd Burner Inlet Assembly
JP7252718B2 (ja) * 2018-06-14 2023-04-05 エドワーズ株式会社 除害装置、及びインレットノズル
FR3123713B1 (fr) 2021-06-08 2023-10-20 Orano Recyclage Dispositif d’alimentation d’un récipient pour installation de traitement thermique de déchets

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JP2002276921A (ja) * 2001-03-23 2002-09-25 Babcock Hitachi Kk シラン除去装置
JP2004053219A (ja) * 2002-07-24 2004-02-19 Nippon Sanso Corp 燃焼除害装置
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Publication number Priority date Publication date Assignee Title
JPS57184822A (en) * 1981-05-09 1982-11-13 Hashimoto Seisakusho:Kk Combustion cylinder for bad-smelling gas of sewage truck
JP2002106825A (ja) * 2000-10-02 2002-04-10 Ebara Corp 燃焼式排ガス処理装置
JP2002276921A (ja) * 2001-03-23 2002-09-25 Babcock Hitachi Kk シラン除去装置
JP2004053219A (ja) * 2002-07-24 2004-02-19 Nippon Sanso Corp 燃焼除害装置
JP2005083745A (ja) * 2003-09-09 2005-03-31 Das-Duennschicht Anlagen System Gmbh 汚染物質を含むプロセス排ガスの熱処理装置
JP2010164283A (ja) * 2009-01-19 2010-07-29 Nippon Steel Engineering Co Ltd 廃棄物のガス化で発生する可燃性ガスの燃焼バーナ

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7377332B2 (ja) 2019-11-21 2023-11-09 エコシス ピーティーイー リミテッド ガス汚染物処理装置
JP2022122616A (ja) * 2021-02-10 2022-08-23 栗田工業株式会社 排ガス処理設備
JP7230940B2 (ja) 2021-02-10 2023-03-01 栗田工業株式会社 排ガス処理設備

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