KR20250089439A - 배기 가스 처리 장치 - Google Patents

배기 가스 처리 장치 Download PDF

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Publication number
KR20250089439A
KR20250089439A KR1020240179504A KR20240179504A KR20250089439A KR 20250089439 A KR20250089439 A KR 20250089439A KR 1020240179504 A KR1020240179504 A KR 1020240179504A KR 20240179504 A KR20240179504 A KR 20240179504A KR 20250089439 A KR20250089439 A KR 20250089439A
Authority
KR
South Korea
Prior art keywords
exhaust gas
gas treatment
treatment device
liquid
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
KR1020240179504A
Other languages
English (en)
Korean (ko)
Inventor
가즈마사 호소타니
가즈토모 미야자키
다카유키 도미이
사토루 나카무라
게이스케 마츠시마
다카시 교타니
Original Assignee
가부시키가이샤 에바라 세이사꾸쇼
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 가부시키가이샤 에바라 세이사꾸쇼 filed Critical 가부시키가이샤 에바라 세이사꾸쇼
Publication of KR20250089439A publication Critical patent/KR20250089439A/ko
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/46—Removing components of defined structure
    • B01D53/68—Halogens or halogen compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/77—Liquid phase processes
    • B01D53/78—Liquid phase processes with gas-liquid contact
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D47/00—Separating dispersed particles from gases, air or vapours by liquid as separating agent
    • B01D47/02—Separating dispersed particles from gases, air or vapours by liquid as separating agent by passing the gas or air or vapour over or through a liquid bath
    • B01D47/022—Separating dispersed particles from gases, air or vapours by liquid as separating agent by passing the gas or air or vapour over or through a liquid bath by using a liquid curtain
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/76—Gas phase processes, e.g. by using aerosols
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/20—Halogens or halogen compounds
    • B01D2257/204—Inorganic halogen compounds
    • B01D2257/2045—Hydrochloric acid
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/20—Halogens or halogen compounds
    • B01D2257/204—Inorganic halogen compounds
    • B01D2257/2047—Hydrofluoric acid
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/55—Compounds of silicon, phosphorus, germanium or arsenic
    • B01D2257/553—Compounds comprising hydrogen, e.g. silanes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2258/00—Sources of waste gases
    • B01D2258/02—Other waste gases
    • B01D2258/0216—Other waste gases from CVD treatment or semi-conductor manufacturing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2259/00—Type of treatment
    • B01D2259/80—Employing electric, magnetic, electromagnetic or wave energy, or particle radiation
    • B01D2259/818—Employing electrical discharges or the generation of a plasma

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biomedical Technology (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Health & Medical Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Incineration Of Waste (AREA)
  • Treating Waste Gases (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Chimneys And Flues (AREA)
KR1020240179504A 2023-12-11 2024-12-05 배기 가스 처리 장치 Pending KR20250089439A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2023-208425 2023-12-11
JP2023208425A JP2025092973A (ja) 2023-12-11 2023-12-11 排ガス処理装置

Publications (1)

Publication Number Publication Date
KR20250089439A true KR20250089439A (ko) 2025-06-18

Family

ID=94432683

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020240179504A Pending KR20250089439A (ko) 2023-12-11 2024-12-05 배기 가스 처리 장치

Country Status (6)

Country Link
US (1) US20250186929A1 (https=)
EP (1) EP4570359A1 (https=)
JP (1) JP2025092973A (https=)
KR (1) KR20250089439A (https=)
CN (1) CN120132581A (https=)
TW (1) TW202528034A (https=)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008161861A (ja) 2006-12-05 2008-07-17 Ebara Corp 燃焼式排ガス処理装置
JP2017211100A (ja) 2016-05-23 2017-11-30 株式会社荏原製作所 排ガス処理装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0954366A4 (en) * 1996-12-31 2001-06-20 Atmi Ecosys Corp INPUT STRUCTURES FOR INTRODUCING A GAS STREAM CONTAINING SOLID MATERIALS AND / OR PRODUCING PARTICULATE SOLID MATERIALS IN A GAS TREATMENT SYSTEM
US6759018B1 (en) * 1997-05-16 2004-07-06 Advanced Technology Materials, Inc. Method for point-of-use treatment of effluent gas streams
TWI398293B (zh) * 2010-11-08 2013-06-11 東服企業股份有限公司 Cyclone Oxygen Combustion Unit for Treatment of Emissions from Semiconductor Processes
GB2561191B (en) * 2017-04-04 2020-08-26 Edwards Ltd Apparatus for treating gases and a method of reducing deposition on a surface in such apparatus

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008161861A (ja) 2006-12-05 2008-07-17 Ebara Corp 燃焼式排ガス処理装置
JP2017211100A (ja) 2016-05-23 2017-11-30 株式会社荏原製作所 排ガス処理装置

Also Published As

Publication number Publication date
JP2025092973A (ja) 2025-06-23
EP4570359A1 (en) 2025-06-18
TW202528034A (zh) 2025-07-16
CN120132581A (zh) 2025-06-13
US20250186929A1 (en) 2025-06-12

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Legal Events

Date Code Title Description
PA0109 Patent application

St.27 status event code: A-0-1-A10-A12-nap-PA0109

PG1501 Laying open of application

St.27 status event code: A-1-1-Q10-Q12-nap-PG1501