TW202528034A - 排氣處理裝置 - Google Patents

排氣處理裝置

Info

Publication number
TW202528034A
TW202528034A TW113147266A TW113147266A TW202528034A TW 202528034 A TW202528034 A TW 202528034A TW 113147266 A TW113147266 A TW 113147266A TW 113147266 A TW113147266 A TW 113147266A TW 202528034 A TW202528034 A TW 202528034A
Authority
TW
Taiwan
Prior art keywords
liquid
treatment device
gas
gas treatment
exhaust gas
Prior art date
Application number
TW113147266A
Other languages
English (en)
Chinese (zh)
Inventor
細谷和正
宮崎一知
富井��之
中村諭
松島圭亮
京谷敬史
Original Assignee
日商荏原製作所股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商荏原製作所股份有限公司 filed Critical 日商荏原製作所股份有限公司
Publication of TW202528034A publication Critical patent/TW202528034A/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/46—Removing components of defined structure
    • B01D53/68—Halogens or halogen compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/77—Liquid phase processes
    • B01D53/78—Liquid phase processes with gas-liquid contact
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D47/00—Separating dispersed particles from gases, air or vapours by liquid as separating agent
    • B01D47/02—Separating dispersed particles from gases, air or vapours by liquid as separating agent by passing the gas or air or vapour over or through a liquid bath
    • B01D47/022—Separating dispersed particles from gases, air or vapours by liquid as separating agent by passing the gas or air or vapour over or through a liquid bath by using a liquid curtain
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/76—Gas phase processes, e.g. by using aerosols
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/20—Halogens or halogen compounds
    • B01D2257/204—Inorganic halogen compounds
    • B01D2257/2045—Hydrochloric acid
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/20—Halogens or halogen compounds
    • B01D2257/204—Inorganic halogen compounds
    • B01D2257/2047—Hydrofluoric acid
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/55—Compounds of silicon, phosphorus, germanium or arsenic
    • B01D2257/553—Compounds comprising hydrogen, e.g. silanes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2258/00—Sources of waste gases
    • B01D2258/02—Other waste gases
    • B01D2258/0216—Other waste gases from CVD treatment or semi-conductor manufacturing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2259/00—Type of treatment
    • B01D2259/80—Employing electric, magnetic, electromagnetic or wave energy, or particle radiation
    • B01D2259/818—Employing electrical discharges or the generation of a plasma

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biomedical Technology (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Health & Medical Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Incineration Of Waste (AREA)
  • Treating Waste Gases (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Chimneys And Flues (AREA)
TW113147266A 2023-12-11 2024-12-05 排氣處理裝置 TW202528034A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2023208425A JP2025092973A (ja) 2023-12-11 2023-12-11 排ガス処理装置
JP2023-208425 2023-12-11

Publications (1)

Publication Number Publication Date
TW202528034A true TW202528034A (zh) 2025-07-16

Family

ID=94432683

Family Applications (1)

Application Number Title Priority Date Filing Date
TW113147266A TW202528034A (zh) 2023-12-11 2024-12-05 排氣處理裝置

Country Status (6)

Country Link
US (1) US20250186929A1 (https=)
EP (1) EP4570359A1 (https=)
JP (1) JP2025092973A (https=)
KR (1) KR20250089439A (https=)
CN (1) CN120132581A (https=)
TW (1) TW202528034A (https=)

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0954366A4 (en) * 1996-12-31 2001-06-20 Atmi Ecosys Corp INPUT STRUCTURES FOR INTRODUCING A GAS STREAM CONTAINING SOLID MATERIALS AND / OR PRODUCING PARTICULATE SOLID MATERIALS IN A GAS TREATMENT SYSTEM
US6759018B1 (en) * 1997-05-16 2004-07-06 Advanced Technology Materials, Inc. Method for point-of-use treatment of effluent gas streams
JP4937886B2 (ja) 2006-12-05 2012-05-23 株式会社荏原製作所 燃焼式排ガス処理装置
TWI398293B (zh) * 2010-11-08 2013-06-11 東服企業股份有限公司 Cyclone Oxygen Combustion Unit for Treatment of Emissions from Semiconductor Processes
JP6659461B2 (ja) 2016-05-23 2020-03-04 株式会社荏原製作所 排ガス処理装置
GB2561191B (en) * 2017-04-04 2020-08-26 Edwards Ltd Apparatus for treating gases and a method of reducing deposition on a surface in such apparatus

Also Published As

Publication number Publication date
JP2025092973A (ja) 2025-06-23
KR20250089439A (ko) 2025-06-18
EP4570359A1 (en) 2025-06-18
CN120132581A (zh) 2025-06-13
US20250186929A1 (en) 2025-06-12

Similar Documents

Publication Publication Date Title
TWI581827B (zh) Gas handling device
US8197765B2 (en) Waste gas purification apparatus
KR20090104804A (ko) 가스 처리장치
US11527422B2 (en) Exhaust gas processing apparatus
CN101332405A (zh) 废气处理装置
CN115193234A (zh) 一种no去除器和半导体尾气处理设备
US7862638B2 (en) Gas supply system for semiconductor manufacturing apparatus
JP6336059B2 (ja) 熱交換器及び該熱交換器を用いた排ガス処理装置
TWI793266B (zh) 濕式除害裝置
TW202528034A (zh) 排氣處理裝置
JP2010023000A (ja) 排ガス除害装置
JP6120288B2 (ja) ガス流処理装置
US11511226B2 (en) Process gas suction structure and exhaust gas treatment apparatus
KR100998853B1 (ko) 폐가스 처리장치
KR20230025435A (ko) 가스 처리로 및 이것을 사용한 배기 가스 처리 장치
TWI910253B (zh) 排氣處理設備
US20010018034A1 (en) Ammonia generating apparatus
KR100290706B1 (ko) 수용성 폐가스처리장치 및 그 방법
JP2024171381A (ja) 排ガス処理装置
KR20090075098A (ko) 가스 스크러버
JP2007232308A (ja) ガス処理装置
KR102215467B1 (ko) 멀티 챔버를 구비하는 유해가스 처리용 스크러버
JP2022072981A (ja) 排ガス処理設備
KR100992752B1 (ko) 반도체 제조 공정의 폐가스 처리장치
KR101019635B1 (ko) 착탈 가능한 버닝월을 구비한 스크러버