JP2024544192A - マルチステーション半導体処理チャンバ用のダイレクトピックロボット - Google Patents

マルチステーション半導体処理チャンバ用のダイレクトピックロボット Download PDF

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Publication number
JP2024544192A
JP2024544192A JP2024532666A JP2024532666A JP2024544192A JP 2024544192 A JP2024544192 A JP 2024544192A JP 2024532666 A JP2024532666 A JP 2024532666A JP 2024532666 A JP2024532666 A JP 2024532666A JP 2024544192 A JP2024544192 A JP 2024544192A
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JP
Japan
Prior art keywords
arm
robot arm
robot
link
arms
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2024532666A
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English (en)
Japanese (ja)
Other versions
JP2024544192A5 (https=
Inventor
ブランク・リチャード・エム．
クレマーマン・イズヤ
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Lam Research Corp
Original Assignee
Lam Research Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lam Research Corp filed Critical Lam Research Corp
Publication of JP2024544192A publication Critical patent/JP2024544192A/ja
Publication of JP2024544192A5 publication Critical patent/JP2024544192A5/ja
Pending legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/33—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations into and out of processing chamber
    • H10P72/3311—Horizontal transfer of a batch of workpieces
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
    • H10P72/76—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches
    • H10P72/7602—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches the wafers being placed on a robot blade or gripped by a gripper for conveyance
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/0084—Program-controlled manipulators comprising a plurality of manipulators
    • B25J9/0087—Dual arms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/02—Program-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Program-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/041—Cylindrical coordinate type
    • B25J9/042—Cylindrical coordinate type comprising an articulated arm
    • B25J9/043—Cylindrical coordinate type comprising an articulated arm double selective compliance articulated robot arms [SCARA]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90—Devices for picking-up and depositing articles or materials
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0451—Apparatus for manufacturing or treating in a plurality of work-stations
    • H10P72/0464—Apparatus for manufacturing or treating in a plurality of work-stations characterised by the construction of the transfer chamber
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/33—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations into and out of processing chamber
    • H10P72/3302—Mechanical parts of transfer devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Robotics (AREA)
  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
JP2024532666A 2021-12-03 2022-12-01 マルチステーション半導体処理チャンバ用のダイレクトピックロボット Pending JP2024544192A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US202163264905P 2021-12-03 2021-12-03
US63/264,905 2021-12-03
PCT/US2022/080775 WO2023102497A1 (en) 2021-12-03 2022-12-01 Direct-pick robot for multi station semiconductor processing chambers

Publications (2)

Publication Number Publication Date
JP2024544192A true JP2024544192A (ja) 2024-11-28
JP2024544192A5 JP2024544192A5 (https=) 2025-12-05

Family

ID=86613122

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2024532666A Pending JP2024544192A (ja) 2021-12-03 2022-12-01 マルチステーション半導体処理チャンバ用のダイレクトピックロボット

Country Status (7)

Country Link
US (1) US20250046643A1 (https=)
EP (1) EP4441779A4 (https=)
JP (1) JP2024544192A (https=)
KR (1) KR20240112941A (https=)
CN (1) CN118661249A (https=)
TW (1) TW202342249A (https=)
WO (1) WO2023102497A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117766446B (zh) * 2024-02-20 2024-05-03 无锡星微科技有限公司 一种送片机械手及具有该机械手的晶圆传输系统

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002158272A (ja) * 2000-11-17 2002-05-31 Tatsumo Kk ダブルアーム基板搬送装置
KR100978236B1 (ko) * 2008-09-30 2010-08-26 주식회사 아토 웨이퍼 이송 로봇
KR20100056795A (ko) * 2008-11-20 2010-05-28 세메스 주식회사 웨이퍼 이송로봇
CN102326244B (zh) * 2009-01-11 2014-12-17 应用材料公司 用于在电子器件制造中传输基板的机械手系统、装置及方法
WO2014085479A1 (en) * 2012-11-30 2014-06-05 Applied Materials, Inc Multi-axis robot apparatus with unequal length forearms, electronic device manufacturing systems, and methods for transporting substrates in electronic device manufacturing
KR102214943B1 (ko) * 2013-01-18 2021-02-10 퍼시몬 테크놀로지스 코포레이션 상이한 링크 길이를 가지는 아암이 구비되는 로봇
US11024531B2 (en) 2017-01-23 2021-06-01 Lam Research Corporation Optimized low energy / high productivity deposition system

Also Published As

Publication number Publication date
TW202342249A (zh) 2023-11-01
EP4441779A1 (en) 2024-10-09
EP4441779A4 (en) 2026-01-07
CN118661249A (zh) 2024-09-17
KR20240112941A (ko) 2024-07-19
WO2023102497A1 (en) 2023-06-08
US20250046643A1 (en) 2025-02-06

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