JP2024544192A5 - - Google Patents

Info

Publication number
JP2024544192A5
JP2024544192A5 JP2024532666A JP2024532666A JP2024544192A5 JP 2024544192 A5 JP2024544192 A5 JP 2024544192A5 JP 2024532666 A JP2024532666 A JP 2024532666A JP 2024532666 A JP2024532666 A JP 2024532666A JP 2024544192 A5 JP2024544192 A5 JP 2024544192A5
Authority
JP
Japan
Prior art keywords
arm
robot
robot arm
link
axis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2024532666A
Other languages
English (en)
Japanese (ja)
Other versions
JP2024544192A (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from PCT/US2022/080775 external-priority patent/WO2023102497A1/en
Publication of JP2024544192A publication Critical patent/JP2024544192A/ja
Publication of JP2024544192A5 publication Critical patent/JP2024544192A5/ja
Pending legal-status Critical Current

Links

JP2024532666A 2021-12-03 2022-12-01 マルチステーション半導体処理チャンバ用のダイレクトピックロボット Pending JP2024544192A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US202163264905P 2021-12-03 2021-12-03
US63/264,905 2021-12-03
PCT/US2022/080775 WO2023102497A1 (en) 2021-12-03 2022-12-01 Direct-pick robot for multi station semiconductor processing chambers

Publications (2)

Publication Number Publication Date
JP2024544192A JP2024544192A (ja) 2024-11-28
JP2024544192A5 true JP2024544192A5 (https=) 2025-12-05

Family

ID=86613122

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2024532666A Pending JP2024544192A (ja) 2021-12-03 2022-12-01 マルチステーション半導体処理チャンバ用のダイレクトピックロボット

Country Status (7)

Country Link
US (1) US20250046643A1 (https=)
EP (1) EP4441779A4 (https=)
JP (1) JP2024544192A (https=)
KR (1) KR20240112941A (https=)
CN (1) CN118661249A (https=)
TW (1) TW202342249A (https=)
WO (1) WO2023102497A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117766446B (zh) * 2024-02-20 2024-05-03 无锡星微科技有限公司 一种送片机械手及具有该机械手的晶圆传输系统

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002158272A (ja) * 2000-11-17 2002-05-31 Tatsumo Kk ダブルアーム基板搬送装置
KR100978236B1 (ko) * 2008-09-30 2010-08-26 주식회사 아토 웨이퍼 이송 로봇
KR20100056795A (ko) * 2008-11-20 2010-05-28 세메스 주식회사 웨이퍼 이송로봇
CN102326244B (zh) * 2009-01-11 2014-12-17 应用材料公司 用于在电子器件制造中传输基板的机械手系统、装置及方法
WO2014085479A1 (en) * 2012-11-30 2014-06-05 Applied Materials, Inc Multi-axis robot apparatus with unequal length forearms, electronic device manufacturing systems, and methods for transporting substrates in electronic device manufacturing
KR102214943B1 (ko) * 2013-01-18 2021-02-10 퍼시몬 테크놀로지스 코포레이션 상이한 링크 길이를 가지는 아암이 구비되는 로봇
US11024531B2 (en) 2017-01-23 2021-06-01 Lam Research Corporation Optimized low energy / high productivity deposition system

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