JP2024525835A5 - - Google Patents

Info

Publication number
JP2024525835A5
JP2024525835A5 JP2024502178A JP2024502178A JP2024525835A5 JP 2024525835 A5 JP2024525835 A5 JP 2024525835A5 JP 2024502178 A JP2024502178 A JP 2024502178A JP 2024502178 A JP2024502178 A JP 2024502178A JP 2024525835 A5 JP2024525835 A5 JP 2024525835A5
Authority
JP
Japan
Prior art keywords
gate insulator
semiconductor device
power semiconductor
region
channel region
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2024502178A
Other languages
English (en)
Japanese (ja)
Other versions
JP2024525835A (ja
Filing date
Publication date
Priority claimed from EP21186089.5A external-priority patent/EP4120360A1/en
Application filed filed Critical
Publication of JP2024525835A publication Critical patent/JP2024525835A/ja
Publication of JP2024525835A5 publication Critical patent/JP2024525835A5/ja
Pending legal-status Critical Current

Links

JP2024502178A 2021-07-16 2022-07-13 パワー半導体デバイスおよび製造方法 Pending JP2024525835A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP21186089.5A EP4120360A1 (en) 2021-07-16 2021-07-16 Power semiconductor device
EP21186089.5 2021-07-16
PCT/EP2022/069637 WO2023285550A1 (en) 2021-07-16 2022-07-13 Power semiconductor device and production method

Publications (2)

Publication Number Publication Date
JP2024525835A JP2024525835A (ja) 2024-07-12
JP2024525835A5 true JP2024525835A5 (https=) 2025-06-24

Family

ID=76958797

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2024502178A Pending JP2024525835A (ja) 2021-07-16 2022-07-13 パワー半導体デバイスおよび製造方法

Country Status (5)

Country Link
EP (1) EP4120360A1 (https=)
JP (1) JP2024525835A (https=)
CN (1) CN117652033A (https=)
DE (1) DE212022000251U1 (https=)
WO (1) WO2023285550A1 (https=)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102023121453A1 (de) * 2023-08-10 2025-02-13 Infineon Technologies Ag Halbleitervorrichtung mit breiter bandlücke und verfahren zum herstellen einer halbleitervorrichtung mit breiter bandlücke
CN119947212A (zh) * 2023-10-30 2025-05-06 安世半导体科技(上海)有限公司 半导体器件及其制造方法
CN117650164A (zh) * 2023-10-31 2024-03-05 海信家电集团股份有限公司 半导体装置
EP4694615A1 (en) * 2024-08-09 2026-02-11 Hitachi Energy Ltd Semiconductor device

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1407476A4 (en) 2000-08-08 2007-08-29 Advanced Power Technology POWER MOS MODULE WITH ASYMMETRIC CHANNEL STRUCTURE
JP4073176B2 (ja) * 2001-04-02 2008-04-09 新電元工業株式会社 半導体装置およびその製造方法
US7382019B2 (en) * 2005-04-26 2008-06-03 Fairchild Semiconductor Corporation Trench gate FETs with reduced gate to drain charge
US20070063269A1 (en) 2005-09-20 2007-03-22 International Rectifier Corp. Trench IGBT with increased short circuit capability
WO2010001201A1 (en) * 2008-06-30 2010-01-07 Freescale Semiconductor, Inc. Method of forming a power semiconductor device and power semiconductor device
JP2016054181A (ja) * 2014-09-03 2016-04-14 トヨタ自動車株式会社 絶縁ゲート型スイッチング素子
JP6203697B2 (ja) * 2014-09-30 2017-09-27 株式会社東芝 半導体装置およびその製造方法
US10204909B2 (en) 2015-12-22 2019-02-12 Varian Semiconductor Equipment Associates, Inc. Non-uniform gate oxide thickness for DRAM device

Similar Documents

Publication Publication Date Title
JP2024525835A5 (https=)
US8878286B2 (en) Semiconductor device with enhanced mobility and method
US12328939B2 (en) Semiconductor device and method for fabricating the same
CN1672263A (zh) 场效应晶体管及其制造方法
CN106992212B (zh) 具有增大的栅-漏电容的晶体管器件
CN113169230B (zh) 具有mos结构和应力件的碳化硅功率器件
CN117652033A (zh) 功率半导体器件及制造方法
JP7772122B2 (ja) 半導体装置
CN108258046B (zh) 半导体元件
JP2024525829A5 (https=)
US20230155025A1 (en) Semiconductor device
JP2024525833A5 (https=)
US5291050A (en) MOS device having reduced gate-to-drain capacitance
JP2004140086A (ja) トレンチゲート型半導体装置
TWI473267B (zh) 金氧半場效電晶體元件
CN111697075A (zh) 具有屏蔽源极的绝缘栅场效应晶体管结构和方法
JP2024030592A (ja) 半導体装置及びその製造方法
JP2024526794A5 (https=)
JP2023085505A5 (https=)
JP3137840B2 (ja) 半導体装置
WO2022067946A1 (zh) 半导体功率器件
JP7781687B2 (ja) 半導体装置及び半導体回路
US20260096119A1 (en) Semiconductor device
TWI900409B (zh) 垂直型功率半導體裝置
CN115498031B (zh) 一种基于硅基的可调控双栅隧穿场效应晶体管