JP2024048630A5 - - Google Patents

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Publication number
JP2024048630A5
JP2024048630A5 JP2022154649A JP2022154649A JP2024048630A5 JP 2024048630 A5 JP2024048630 A5 JP 2024048630A5 JP 2022154649 A JP2022154649 A JP 2022154649A JP 2022154649 A JP2022154649 A JP 2022154649A JP 2024048630 A5 JP2024048630 A5 JP 2024048630A5
Authority
JP
Japan
Prior art keywords
quartz crystal
extraction electrode
vibration element
disposed
crystal wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2022154649A
Other languages
English (en)
Japanese (ja)
Other versions
JP2024048630A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2022154649A priority Critical patent/JP2024048630A/ja
Priority claimed from JP2022154649A external-priority patent/JP2024048630A/ja
Priority to US18/474,691 priority patent/US20240113687A1/en
Priority to CN202311264636.2A priority patent/CN117792333A/zh
Publication of JP2024048630A publication Critical patent/JP2024048630A/ja
Publication of JP2024048630A5 publication Critical patent/JP2024048630A5/ja
Pending legal-status Critical Current

Links

JP2022154649A 2022-09-28 2022-09-28 振動素子、及び水晶ウエハ Pending JP2024048630A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2022154649A JP2024048630A (ja) 2022-09-28 2022-09-28 振動素子、及び水晶ウエハ
US18/474,691 US20240113687A1 (en) 2022-09-28 2023-09-26 Resonator element and quartz crystal wafer
CN202311264636.2A CN117792333A (zh) 2022-09-28 2023-09-27 振动元件和石英晶片

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2022154649A JP2024048630A (ja) 2022-09-28 2022-09-28 振動素子、及び水晶ウエハ

Publications (2)

Publication Number Publication Date
JP2024048630A JP2024048630A (ja) 2024-04-09
JP2024048630A5 true JP2024048630A5 (https=) 2025-08-28

Family

ID=90395258

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022154649A Pending JP2024048630A (ja) 2022-09-28 2022-09-28 振動素子、及び水晶ウエハ

Country Status (3)

Country Link
US (1) US20240113687A1 (https=)
JP (1) JP2024048630A (https=)
CN (1) CN117792333A (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7746782B2 (ja) * 2021-10-04 2025-10-01 セイコーエプソン株式会社 振動素子、振動デバイス、及び振動素子の製造方法

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