JP2024048630A - 振動素子、及び水晶ウエハ - Google Patents

振動素子、及び水晶ウエハ Download PDF

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Publication number
JP2024048630A
JP2024048630A JP2022154649A JP2022154649A JP2024048630A JP 2024048630 A JP2024048630 A JP 2024048630A JP 2022154649 A JP2022154649 A JP 2022154649A JP 2022154649 A JP2022154649 A JP 2022154649A JP 2024048630 A JP2024048630 A JP 2024048630A
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JP
Japan
Prior art keywords
extraction electrode
vibration element
quartz crystal
crystal wafer
axis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2022154649A
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English (en)
Japanese (ja)
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JP2024048630A5 (https=
Inventor
敦司 松尾
Atsushi Matsuo
克彦 牧
Katsuhiko Maki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP2022154649A priority Critical patent/JP2024048630A/ja
Priority to US18/474,691 priority patent/US20240113687A1/en
Priority to CN202311264636.2A priority patent/CN117792333A/zh
Publication of JP2024048630A publication Critical patent/JP2024048630A/ja
Publication of JP2024048630A5 publication Critical patent/JP2024048630A5/ja
Pending legal-status Critical Current

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    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/19—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator consisting of quartz
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02015—Characteristics of piezoelectric layers, e.g. cutting angles
    • H03H9/02023—Characteristics of piezoelectric layers, e.g. cutting angles consisting of quartz
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/0595—Holders or supports the holder support and resonator being formed in one body
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/13—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials

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  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP2022154649A 2022-09-28 2022-09-28 振動素子、及び水晶ウエハ Pending JP2024048630A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2022154649A JP2024048630A (ja) 2022-09-28 2022-09-28 振動素子、及び水晶ウエハ
US18/474,691 US20240113687A1 (en) 2022-09-28 2023-09-26 Resonator element and quartz crystal wafer
CN202311264636.2A CN117792333A (zh) 2022-09-28 2023-09-27 振动元件和石英晶片

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2022154649A JP2024048630A (ja) 2022-09-28 2022-09-28 振動素子、及び水晶ウエハ

Publications (2)

Publication Number Publication Date
JP2024048630A true JP2024048630A (ja) 2024-04-09
JP2024048630A5 JP2024048630A5 (https=) 2025-08-28

Family

ID=90395258

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022154649A Pending JP2024048630A (ja) 2022-09-28 2022-09-28 振動素子、及び水晶ウエハ

Country Status (3)

Country Link
US (1) US20240113687A1 (https=)
JP (1) JP2024048630A (https=)
CN (1) CN117792333A (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7746782B2 (ja) * 2021-10-04 2025-10-01 セイコーエプソン株式会社 振動素子、振動デバイス、及び振動素子の製造方法

Also Published As

Publication number Publication date
US20240113687A1 (en) 2024-04-04
CN117792333A (zh) 2024-03-29

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