CN117792333A - 振动元件和石英晶片 - Google Patents
振动元件和石英晶片 Download PDFInfo
- Publication number
- CN117792333A CN117792333A CN202311264636.2A CN202311264636A CN117792333A CN 117792333 A CN117792333 A CN 117792333A CN 202311264636 A CN202311264636 A CN 202311264636A CN 117792333 A CN117792333 A CN 117792333A
- Authority
- CN
- China
- Prior art keywords
- extraction electrode
- electrode
- quartz wafer
- excitation electrode
- quartz
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010453 quartz Substances 0.000 title claims abstract description 68
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims abstract description 68
- 238000000605 extraction Methods 0.000 claims abstract description 67
- 230000005284 excitation Effects 0.000 claims abstract description 42
- 239000013078 crystal Substances 0.000 claims abstract description 13
- 239000000758 substrate Substances 0.000 claims abstract description 9
- 238000000034 method Methods 0.000 description 10
- 239000000853 adhesive Substances 0.000 description 6
- 230000001070 adhesive effect Effects 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000004048 modification Effects 0.000 description 4
- 238000012986 modification Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 238000007689 inspection Methods 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 241001391944 Commicarpus scandens Species 0.000 description 1
- 241000270666 Testudines Species 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- 229920001971 elastomer Polymers 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 239000002985 plastic film Substances 0.000 description 1
- 229920006255 plastic film Polymers 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 229920002635 polyurethane Polymers 0.000 description 1
- 239000004814 polyurethane Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
- H03H9/19—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator consisting of quartz
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/02—Details
- H03H9/02007—Details of bulk acoustic wave devices
- H03H9/02015—Characteristics of piezoelectric layers, e.g. cutting angles
- H03H9/02023—Characteristics of piezoelectric layers, e.g. cutting angles consisting of quartz
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/02—Details
- H03H9/05—Holders or supports
- H03H9/0595—Holders or supports the holder support and resonator being formed in one body
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/02—Details
- H03H9/125—Driving means, e.g. electrodes, coils
- H03H9/13—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022-154649 | 2022-09-28 | ||
| JP2022154649A JP2024048630A (ja) | 2022-09-28 | 2022-09-28 | 振動素子、及び水晶ウエハ |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN117792333A true CN117792333A (zh) | 2024-03-29 |
Family
ID=90395258
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202311264636.2A Pending CN117792333A (zh) | 2022-09-28 | 2023-09-27 | 振动元件和石英晶片 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US20240113687A1 (https=) |
| JP (1) | JP2024048630A (https=) |
| CN (1) | CN117792333A (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7746782B2 (ja) * | 2021-10-04 | 2025-10-01 | セイコーエプソン株式会社 | 振動素子、振動デバイス、及び振動素子の製造方法 |
-
2022
- 2022-09-28 JP JP2022154649A patent/JP2024048630A/ja active Pending
-
2023
- 2023-09-26 US US18/474,691 patent/US20240113687A1/en active Pending
- 2023-09-27 CN CN202311264636.2A patent/CN117792333A/zh active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| JP2024048630A (ja) | 2024-04-09 |
| US20240113687A1 (en) | 2024-04-04 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |