JP2024020745A5 - - Google Patents

Info

Publication number
JP2024020745A5
JP2024020745A5 JP2022123167A JP2022123167A JP2024020745A5 JP 2024020745 A5 JP2024020745 A5 JP 2024020745A5 JP 2022123167 A JP2022123167 A JP 2022123167A JP 2022123167 A JP2022123167 A JP 2022123167A JP 2024020745 A5 JP2024020745 A5 JP 2024020745A5
Authority
JP
Japan
Prior art keywords
gas
unit
wall
substrate
opening
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2022123167A
Other languages
English (en)
Japanese (ja)
Other versions
JP2024020745A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2022123167A priority Critical patent/JP2024020745A/ja
Priority claimed from JP2022123167A external-priority patent/JP2024020745A/ja
Priority to CN202310872827.0A priority patent/CN117497446A/zh
Priority to KR1020230092994A priority patent/KR102768296B1/ko
Priority to TW112127657A priority patent/TWI890098B/zh
Publication of JP2024020745A publication Critical patent/JP2024020745A/ja
Publication of JP2024020745A5 publication Critical patent/JP2024020745A5/ja
Pending legal-status Critical Current

Links

JP2022123167A 2022-08-02 2022-08-02 基板処理装置 Pending JP2024020745A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2022123167A JP2024020745A (ja) 2022-08-02 2022-08-02 基板処理装置
CN202310872827.0A CN117497446A (zh) 2022-08-02 2023-07-17 基板处理装置
KR1020230092994A KR102768296B1 (ko) 2022-08-02 2023-07-18 기판 처리 장치
TW112127657A TWI890098B (zh) 2022-08-02 2023-07-25 基板處理裝置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2022123167A JP2024020745A (ja) 2022-08-02 2022-08-02 基板処理装置

Publications (2)

Publication Number Publication Date
JP2024020745A JP2024020745A (ja) 2024-02-15
JP2024020745A5 true JP2024020745A5 (enExample) 2025-08-01

Family

ID=89667826

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022123167A Pending JP2024020745A (ja) 2022-08-02 2022-08-02 基板処理装置

Country Status (4)

Country Link
JP (1) JP2024020745A (enExample)
KR (1) KR102768296B1 (enExample)
CN (1) CN117497446A (enExample)
TW (1) TWI890098B (enExample)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100612421B1 (ko) * 2004-10-27 2006-08-16 삼성전자주식회사 기판 이송 시스템
JP6045840B2 (ja) 2012-07-30 2016-12-14 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置
JP7149118B2 (ja) * 2018-07-03 2022-10-06 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置
JP7335797B2 (ja) * 2019-11-29 2023-08-30 株式会社Ｓｃｒｅｅｎホールディングス 現像装置
TWI796778B (zh) * 2020-09-09 2023-03-21 日商斯庫林集團股份有限公司 基板處理裝置及基板處理方法

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