JP2023550129A5 - - Google Patents

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Publication number
JP2023550129A5
JP2023550129A5 JP2023530684A JP2023530684A JP2023550129A5 JP 2023550129 A5 JP2023550129 A5 JP 2023550129A5 JP 2023530684 A JP2023530684 A JP 2023530684A JP 2023530684 A JP2023530684 A JP 2023530684A JP 2023550129 A5 JP2023550129 A5 JP 2023550129A5
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JP
Japan
Prior art keywords
flow
control
pressure
gas
gas supply
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JP2023530684A
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English (en)
Japanese (ja)
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JP7853975B2 (ja
JP2023550129A (ja
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Priority claimed from PCT/US2021/072433 external-priority patent/WO2022109547A1/en
Publication of JP2023550129A publication Critical patent/JP2023550129A/ja
Publication of JP2023550129A5 publication Critical patent/JP2023550129A5/ja
Application granted granted Critical
Publication of JP7853975B2 publication Critical patent/JP7853975B2/ja
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JP2023530684A 2020-11-20 2021-11-16 質量流量コントローラ及びシステム Active JP7853975B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US202063116599P 2020-11-20 2020-11-20
US63/116,599 2020-11-20
PCT/US2021/072433 WO2022109547A1 (en) 2020-11-20 2021-11-16 Method and apparatus for pulse gas delivery with pressure control

Publications (3)

Publication Number Publication Date
JP2023550129A JP2023550129A (ja) 2023-11-30
JP2023550129A5 true JP2023550129A5 (https=) 2024-11-13
JP7853975B2 JP7853975B2 (ja) 2026-04-30

Family

ID=81658879

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023530684A Active JP7853975B2 (ja) 2020-11-20 2021-11-16 質量流量コントローラ及びシステム

Country Status (5)

Country Link
US (1) US12521745B2 (https=)
JP (1) JP7853975B2 (https=)
KR (1) KR20230108292A (https=)
TW (1) TW202235669A (https=)
WO (1) WO2022109547A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117716476A (zh) * 2021-08-05 2024-03-15 东京毅力科创株式会社 基板处理方法和基板处理装置

Family Cites Families (25)

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JPH02253315A (ja) * 1989-03-27 1990-10-12 Kubota Ltd 配水制御装置
JP4137666B2 (ja) 2003-02-17 2008-08-20 株式会社堀場エステック マスフローコントローラ
US7335396B2 (en) * 2003-04-24 2008-02-26 Micron Technology, Inc. Methods for controlling mass flow rates and pressures in passageways coupled to reaction chambers and systems for depositing material onto microfeature workpieces in reaction chambers
JP4086057B2 (ja) * 2004-06-21 2008-05-14 日立金属株式会社 質量流量制御装置及びこの検定方法
KR100653710B1 (ko) * 2004-12-14 2006-12-04 삼성전자주식회사 질량 유량 제어기
US7673645B2 (en) * 2005-04-21 2010-03-09 Mks Instruments, Inc. Gas delivery method and system including a flow ratio controller using a multiple antisymmetric optimal control arrangement
JP4788920B2 (ja) 2006-03-20 2011-10-05 日立金属株式会社 質量流量制御装置、その検定方法及び半導体製造装置
US7891228B2 (en) * 2008-11-18 2011-02-22 Mks Instruments, Inc. Dual-mode mass flow verification and mass flow delivery system and method
TWI435196B (zh) * 2009-10-15 2014-04-21 派伏塔系統公司 氣體流量控制方法及裝置
US8499786B2 (en) * 2010-04-09 2013-08-06 Hitachi Metals, Ltd Mass flow controller with enhanced operating range
KR101599343B1 (ko) * 2011-05-10 2016-03-03 가부시키가이샤 후지킨 유량 모니터 부착 압력식 유량 제어 장치
US9690301B2 (en) * 2012-09-10 2017-06-27 Reno Technologies, Inc. Pressure based mass flow controller
JP5809012B2 (ja) 2011-10-14 2015-11-10 株式会社堀場エステック 流量制御装置、流量測定機構、又は、当該流量測定機構を備えた流量制御装置に用いられる診断装置及び診断用プログラム
US9846074B2 (en) 2012-01-20 2017-12-19 Mks Instruments, Inc. System for and method of monitoring flow through mass flow controllers in real time
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JP5960614B2 (ja) * 2012-03-29 2016-08-02 Ckd株式会社 流体制御システム、流体制御方法
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CN202690588U (zh) 2012-07-25 2013-01-23 浙江华昌液压机械有限公司 油缸内泄漏线性测量装置
WO2015123008A1 (en) 2014-02-13 2015-08-20 Mks Instruments, Inc. System for and method of providing pressure insensitive self verifying mass flow controller
JP6512959B2 (ja) * 2015-06-19 2019-05-15 東京エレクトロン株式会社 ガス供給系、ガス供給制御方法、及びガス置換方法
WO2017011325A1 (en) * 2015-07-10 2017-01-19 Pivotal Systems Corporation Method and apparatus for gas flow control
JP7245600B2 (ja) * 2016-12-15 2023-03-24 株式会社堀場エステック 流量制御装置、及び、流量制御装置用プログラム
US10649471B2 (en) 2018-02-02 2020-05-12 Mks Instruments, Inc. Method and apparatus for pulse gas delivery with isolation valves
CN111971636B (zh) * 2018-04-19 2023-12-12 株式会社堀场Stec 流量控制装置、诊断方法和存储介质
US10725484B2 (en) 2018-09-07 2020-07-28 Mks Instruments, Inc. Method and apparatus for pulse gas delivery using an external pressure trigger

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